Inventor · name-matched record
ROBERTS MICHAEL PHILIP
1 granted patent·1 pending application·0 citations·filing 2021–2025
7Inventor score
Technology areasH10P
Files withLAM RES CORP2
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
2 records- 0180US2026043135A1Independently adjustable flowpath conductance in multi-station semiconductor processingLAM RES CORP·Filed 2025·Application pending·0 cites
- 0254US12531220B2Automated feedforward and feedback sequence for patterning CD controlLAM RES CORP·Filed 2021·Granted Jan 20, 2026·0 cites·32 claims
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Identity basis: exact name match across USPTO filings. How scoring works →