Inventor · name-matched record
SMITH MARK D
3 granted patents·1 pending application·0 citations·filing 2024–2025
49Inventor score
Files withKLA CORP4
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
4 records- 0185US2026079407A1System and method for optimizing through silicon via overlayKLA CORP·Filed 2025·Application pending·0 cites
- 0279US12579631B2Method to calibrate, predict, and control stochastic defects in EUV lithographyKLA CORP·Filed 2024·Granted Mar 17, 2026·0 cites·20 claims
- 0379US12561790B2Method to calibrate, predict, and control stochastic defects in EUV lithographyKLA CORP·Filed 2024·Granted Feb 24, 2026·0 cites·18 claims
- 0478US12561791B2Method to calibrate, predict, and control stochastic defects in EUV lithographyKLA CORP·Filed 2024·Granted Feb 24, 2026·0 cites·13 claims
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Identity basis: exact name match across USPTO filings. How scoring works →