Inventor · name-matched record
SRIDHAR SHYAM
2 granted patents·1 pending application·0 citations·filing 2023–2024
23Inventor score
Technology areasH01J
Files withTOKYO ELECTRON LTD3
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
3 records- 0170US12580153B2Balanced resonator source for plasma processingTOKYO ELECTRON LTD·Filed 2024·Granted Mar 17, 2026·0 cites·20 claims
- 0268US12555756B2System and method to measure ion properties in a plasma systemTOKYO ELECTRON LTD·Filed 2023·Granted Feb 17, 2026·0 cites·20 claims
- 0358US2026066226A1Method of sustaining plasma for plasma processingTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
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Identity basis: exact name match across USPTO filings. How scoring works →