Inventor · name-matched record
TAN ZHONGKUI
1 granted patent·3 pending applications·0 citations·filing 2022–2025
7Inventor score
Files withLAM RES CORP4
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
4 records- 0194US2026011531A1Systems and methods for reverse pulsingLAM RES CORP·Filed 2025·Application pending·0 cites
- 0260US2026010143A1High aspect ratio carbon etch with simulated bosch processLAM RES CORP·Filed 2023·Application pending·0 cites
- 0355US12581917B2Matching pre-processing and post-processing substrate samplesLAM RES CORP·Filed 2022·Granted Mar 17, 2026·0 cites·23 claims
- 0454US2026026274A1In situ declogging in plasma etchingLAM RES CORP·Filed 2023·Application pending·0 cites
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Identity basis: exact name match across USPTO filings. How scoring works →