Inventor · name-matched record

TANAKA MASAHIKO

1 granted patent·449 citations·filing 1991–1991

59Inventor score

Technology areasH01J

This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.

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1 record

0199US5234526AWindow for microwave plasma processing deviceLAM RES CORP·Filed 1991·Granted Aug 10, 1993·449 cites·37 claims

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Identity basis: exact name match across USPTO filings. How scoring works →