Inventor · name-matched record
TODO SOYA
3 granted patents·0 citations·filing 2022–2023
39Inventor score
Files withTOKYO ELECTRON LTD3
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
3 records- 0160US12548744B2Plasma processing apparatus, control method, and storage medium for suppressing deterioration effects from wear of an edge ringTOKYO ELECTRON LTD·Filed 2022·Granted Feb 10, 2026·0 cites·15 claims
- 0259US12562352B2Prediction method and information processing apparatus for predicting the process result in a plasma etching processTOKYO ELECTRON LTD·Filed 2023·Granted Feb 24, 2026·0 cites·12 claims
- 0349US12573592B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Mar 10, 2026·0 cites·10 claims
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Identity basis: exact name match across USPTO filings. How scoring works →