Inventor · name-matched record
WADA MAKOTO
1 granted patent·1 pending application·0 citations·filing 2021–2025
6Inventor score
Technology areasH01J
Files withTOKYO ELECTRON LTD2
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
2 records- 0170US2026047360A1Substrate processing method, method for manufacturing semiconductor device, and microwave plasma apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0256US12534800B2Pre-coating method and processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jan 27, 2026·0 cites·5 claims
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Identity basis: exact name match across USPTO filings. How scoring works →