Inventor · name-matched record
XUE JUN
2 granted patents·1 pending application·0 citations·filing 2019–2025
22Inventor score
Files withLAM RES CORP3
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
3 records- 0186US2026036908A1Integration of dry development and etch processes for euv patterning in a single process chamberLAM RES CORP·Filed 2025·Application pending·0 cites
- 0252US12586765B2Surface modification for metal-containing photoresist depositionLAM RES CORP·Filed 2021·Granted Mar 24, 2026·0 cites·37 claims
- 0347US12550646B2Selectively etching for nanowiresLAM RES CORP·Filed 2019·Granted Feb 10, 2026·0 cites·14 claims
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Identity basis: exact name match across USPTO filings. How scoring works →