Inventor · disambiguated record

Paulus M. H. Ter Beek

Also filed as: TER BEEK PAULUS M H

1 granted patent·1,609 citations·filing 1997–1997

63Inventor score

Technology areasH10P

Files withASM LITHOGRAPHY BV1

Top patents by PatentIndex Score

1 record

0196US5969441ATwo-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning deviceASM LITHOGRAPHY BV·Filed 1997·Granted Oct 19, 1999·1.6k cites·14 claims

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