Microelectromechanical system apparatus with heater

Abstract

A MEMS apparatus with heater includes central part, periphery part, gap and first connecting part. Central part includes center of mass, heater and first joint. Heater is disposed inside central part. First joint is located on boundary of central part. Displacement of first joint is produced when central part is heated by heater. Periphery part surrounds central part. Gap surrounds central part, and is located between central part and periphery part. First connecting part connects central part and periphery part along first reference line and includes first inner connecting portion and first outer connecting portion. First inner connecting portion is connected to first joint. First outer connecting portion is connected to periphery part. First reference line passes through first joint, and first reference line is not parallel to line connecting center of mass and first joint.

What is claimed is: 
     
       1. A MEMS apparatus with heater, comprising:
 a central part, comprising: 
 a center of mass; 
 a heater, disposed in the central part; and 
 a first joint, located on a boundary of the central part, wherein a displacement of the first joint is produced when the central part is heated by the heater; 
 a periphery part, surrounding the central part; 
 a gap, wherein the gap surrounds the central part, and is located between the central part and the periphery part; and 
 a first connecting part, connecting the central part and the periphery part along a first reference line and comprising: 
 a first inner connecting portion, connected to the first joint; and 
 a first outer connecting portion, connected to the periphery part; 
 wherein, the first reference line passes through the first joint, and the first reference line is not parallel to a first connecting line that connects the center of mass and the first joint. 
 
     
     
       2. The MEMS apparatus with heater as claimed in  claim 1 , wherein the first reference line is a tangent line passing through the first joint, and an angle between the first reference line and the first connecting line is larger than or equal to 90 degrees. 
     
     
       3. The MEMS apparatus with heater as claimed in  claim 2 , wherein the first connecting part comprises an inner side and an outer side, and a length of the inner side is greater than a length of the outer side. 
     
     
       4. The MEMS apparatus with heater as claimed in  claim 3 , further comprising:
 a second connecting part, connecting the central part and the periphery part; 
 wherein the central part further comprises a second joint located on the boundary of the central part, and a line connecting the first joint and the second joint passes through the center of mass. 
 
     
     
       5. The MEMS apparatus with heater as claimed in  claim 1 , wherein the first joint is disposed at a position on a boundary of the central part, wherein the position has a minimum displacement when the central part is not connected with the first connecting part and the central part is heated. 
     
     
       6. The MEMS apparatus with heater as claimed in  claim 1 , further comprising:
 a second connecting part and a third connecting part; 
 wherein the central part further comprises a second joint located on the boundary of the central part and a third joint located on the boundary of the central part, the second connecting part connects the central part and the periphery part along a second reference line, the second connecting part comprises a second inner connecting portion and a second outer connecting portion, the second inner connecting portion is connected to the second joint, the second outer connecting portion is connected to the periphery part, the third connecting part connects the central part and the periphery part along a third reference line, the third connecting part comprises a third inner connecting portion and a third outer connecting portion, the third inner connecting portion is connected to the third joint, the third outer connecting portion is connected to the periphery part, and the first connecting line, a second connecting line connecting the second joint and the center of mass, and a third connecting line connecting the third joint and the center of mass are not aligned. 
 
     
     
       7. The MEMS apparatus with heater as claimed in  claim 1 , further comprising:
 a second connecting part, a third connecting part and a fourth connecting part; 
 wherein the central part further comprises a second joint located on the boundary, the third connecting part connects the central part and the periphery part along the first reference line, the third connecting part comprises a third inner connecting portion and a third outer connecting portion, the third inner connecting portion is connected to the first joint, the third outer connecting portion is connected to the periphery part, the second connecting part connects the central part and the periphery part along a second reference line and the fourth connecting part connects the central part and the periphery part along the second reference line, the second connecting part comprises a second inner connecting portion and a second outer connecting portion, the second inner connecting portion is connected to the second joint, the second outer connecting portion is connected to the periphery part, the fourth connecting part comprises a fourth inner connecting part and a fourth outer connecting part, the fourth inner connecting part is connected to the second joint, and the fourth outer connecting part is connected to the periphery part. 
 
     
     
       8. A MEMS apparatus with heater, comprising:
 a substrate; 
 a central part, comprising: 
 a center of mass; a first thin film layer, disposed on the substrate; 
 a heater, disposed in the first thin film layer; and 
 a first joint, located on a boundary of the central part, wherein a displacement of the first joint is produced when the central part is heated by the heater; 
 a periphery part, surrounding the central part, the periphery part comprising: 
 a base, disposed on the substrate; and 
 a second thin film layer, disposed on the base; 
 a gap, wherein the gap surrounds the central part, and is located between the central part and the periphery part; and 
 a first connecting part, connecting the first thin film layer and the second thin film layer along a first reference line, the first connecting part comprising: 
 a first inner connecting portion, connected to the first joint; and 
 a first outer connecting portion, connected to the periphery part; 
 wherein, the first reference line passes through the first joint, and the first reference line is not parallel to a first connecting line that connects the center of mass and the first joint. 
 
     
     
       9. The MEMS apparatus with heater as claimed in  claim 8 , wherein the first reference line is a tangent line passing through the first joint, and an angle between the first reference line and the first connecting line is larger than or equal to 90 degrees. 
     
     
       10. The MEMS apparatus with heater as claimed in  claim 8 , wherein the first joint is disposed at a position on a boundary of the central part, wherein the position has a minimum displacement when the central part is not connected with the first connecting part and the central part is heated. 
     
     
       11. The MEMS apparatus with heater as claimed in  claim 10 , wherein the first connecting part further comprises an inner side and an outer side, and a length of the inner side is greater than a length of the outer side. 
     
     
       12. The MEMS apparatus with heater as claimed in  claim 11 , further comprising:
 a second connecting part, connecting the second joint and the periphery part; 
 wherein the central part further comprises a second joint located on the boundary of the central part, and a line connecting the first joint and the second joint passes through the center of mass. 
 
     
     
       13. The MEMS apparatus with heater as claimed in  claim 8 , further comprising:
 a second connecting part and a third connecting part; 
 wherein the central part further comprises a second joint located on the boundary of the central part and a third joint located on the boundary of the central part, the second connecting part connects the central part and the periphery part along a second reference line, the second connecting part comprises a second inner connecting portion and a second outer connecting portion, the second inner connecting portion is connected to the second joint, the second outer connecting portion is connected to the periphery part, the third connecting part connects the central part and the periphery part along a third reference line, the third connecting part comprises a third inner connecting portion and a third outer connecting portion, the third inner connecting portion is connected to the third joint, the third outer connecting portion is connected to the periphery part, the first connecting line, a second connecting line connecting the second joint and the center of mass and a third connecting line connecting the third joint and the center of mass are not aligned. 
 
     
     
       14. The MEMS apparatus with heater as claimed in  claim 8 , further comprising:
 a second connecting part, a third connecting part and a fourth connecting part; 
 wherein the central part further comprises a second joint located on the boundary, the third connecting part connects the central part and the periphery part along the first reference line, the third connecting part comprises a third inner connecting portion and a third outer connecting portion, the third inner connecting portion is connected to the first joint, the third outer connecting portion is connected to the periphery part, the second connecting part connects the central part and the periphery part along a second reference line and the fourth connecting part connects the central part and the periphery part along the second reference line, the second connecting part comprises a second inner connecting portion and a second outer connecting portion, the second inner connecting portion is connected to the second joint, the second outer connecting portion is connected to the periphery part, the fourth connecting part comprises a fourth inner connecting part and a fourth outer connecting part, the fourth inner connecting part is connected to the second joint, and the fourth outer connecting part is connected to the periphery part.