US11208726B2ActiveUtilityA1

Microetching agent for copper, copper surface roughening method and wiring board production method

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Assignee: MEC CO LTDPriority: Sep 22, 2017Filed: Aug 20, 2018Granted: Dec 28, 2021
Est. expirySep 22, 2037(~11.2 yrs left)· nominal 20-yr term from priority
C23C 22/52C23F 1/18H05K 3/383H05K 2203/0789
58
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Cited by
29
References
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Claims

Abstract

A microetching agent is an acidic aqueous solution containing an organic acid, cupric ions, and halide ions. The molar concentration of halide ion of the microetching agent is 0.005 to 0.1 mol/L. By bringing the microetching agent into contact with a copper surface, the copper surface is roughened. An average etching amount in the depth direction during roughening is preferably 0.4 μm or less. The microetching agent can impart on copper surfaces a roughened shape having excellent adhesiveness to resins and the like, even with a low etching amount.

Claims

exact text as granted — not AI-modified
The invention claimed is: 
     
       1. A microetching agent for roughening a copper surface, wherein:
 the microetching agent is an acidic aqueous solution having a pH of more than 1 and 5 or less, 
 the microetching agent comprises an organic acid, cupric ions and chloride ions, 
 the microetching agent is free from a cupric complex of azoles, 
 the microetching agent is substantially free from a cationic polymer having a weight average molecular weight of 1000 or more, wherein a weight concentration of the cationic polymer is 0.5 ppm or less, 
 a molar concentration of the chloride ions is 0.005 to 0.1 mol/L, and 
 a molar concentration of the cupric ions is 2.2 to 30 times the molar concentration of the chloride ions. 
 
     
     
       2. The microetching agent according to  claim 1 , wherein a molar concentration of the cupric ions is 0.05 to 2 mol/L.

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