Semiconductor device

Abstract

A semiconductor device according to an embodiment includes a first substrate including a first insulating layer, a first conductive layer provided in the first insulating layer, a first metal layer provided in the first insulating layer, and a second metal layer provided between the first metal layer and the first conductive layer, a linear expansion coefficient of the second metal layer being higher than that of the first metal layer; and a second substrate including a second insulating layer, and a third metal layer provided in the second insulating layer, in contact with the first metal layer. The second substrate contacts with the first substrate.

What is claimed is: 
     
       1. A semiconductor device, comprising:
 a first substrate including:
 a first insulating layer, 
 a first conductive layer provided in the first insulating layer, 
 a first metal layer provided in the first insulating layer, the first metal layer including a metal containing copper as its main constituent, and 
 a second metal layer provided between the first metal layer and the first conductive layer, a linear expansion coefficient of the second metal layer being higher than a linear expansion coefficient of the first metal layer; and 
 
 a second substrate in direct contact with the first substrate, the second substrate including:
 a second insulating layer, 
 a second conductive layer provided in the second insulating layer, 
 a third metal layer provided in the second insulating layer, the third metal layer being in direct contact with the first metal layer, the third metal layer including a metal containing copper as its main constituent, and 
 a fourth metal layer provided between the third metal layer and the second conductive layer, a linear expansion coefficient of the fourth metal layer being higher than a linear expansion coefficient of the third metal layer, 
 
 wherein the first insulating layer includes a first hole, and both the first metal layer and the second metal layer are provided in the first hole, 
 wherein the second insulating layer includes a second hole, and both the third metal layer and the fourth metal layer are provided in the second hole, 
 wherein the first hole further includes a first barrier layer provided between the first metal layer and the second metal layer, and between the first metal layer and the first insulating layer, and a second barrier layer provided between the second metal layer and the first conductive layer, and between the second metal layer and the first insulating layer, wherein side walls of the first barrier layer and the second barrier layer are aligned in a first direction in which the first metal layer and the second metal layer are stacked. 
 
     
     
       2. The semiconductor device according to  claim 1 , wherein the first metal layer and the third metal layer are made of a same material. 
     
     
       3. The semiconductor device according to  claim 1 , wherein the second metal layer includes a metal containing aluminum as its main constituent. 
     
     
       4. The semiconductor device according to  claim 1 ,
 wherein a thickness of the second metal layer in the first direction is 30% or more of a sum of a thickness of the first metal layer in the first direction and the thickness of the second metal layer in the first direction. 
 
     
     
       5. The semiconductor device according to  claim 1 ,
 wherein when a direction perpendicular to the first direction is referred to as a second direction, 
 a width of the second metal layer in the second direction is narrower than a width of the first conductive layer in the second direction. 
 
     
     
       6. The semiconductor device according to  claim 1 , wherein the fourth metal layer includes a metal containing aluminum as its main constituent. 
     
     
       7. The semiconductor device according to  claim 1 , wherein the first insulating layer and the second insulating layer directly contact each other. 
     
     
       8. The semiconductor device according to  claim 2 , wherein the first insulating layer and the second insulating layer directly contact each other. 
     
     
       9. The semiconductor device according to  claim 1 , wherein the fourth metal layer is in direct contact with the third metal layer. 
     
     
       10. The semiconductor device according to  claim 1 ,
 wherein when a direction perpendicular to the first direction is referred to as a second direction, and a direction perpendicular to both the first direction and the second direction is referred to as a third direction, 
 widths of the first metal layer and the second metal layer in the second direction are substantially equal, and 
 widths of the first metal layer and the second metal layer in the third direction are substantially equal. 
 
     
     
       11. The semiconductor device according to  claim 1 , wherein both the third metal layer and the fourth metal layer are surrounded by the second insulating layer. 
     
     
       12. A semiconductor device, comprising:
 a first substrate including:
 a first insulating layer, 
 a first conductive layer provided in the first insulating layer, 
 a first metal layer provided in the first insulating layer, 
 a second metal layer provided between the first metal layer and the first conductive layer, a linear expansion coefficient of the second metal layer being higher than a linear expansion coefficient of the first metal layer, 
 a first barrier metal provided between the first metal layer and the second metal layer, and between the first metal layer and the first insulating layer, and 
 a second barrier metal provided between the second metal layer and the first conductive layer, and between the second metal layer and the first insulating layer; and 
 
 a second substrate in direct contact with the first substrate, the second substrate including:
 a second insulating layer, 
 a second conductive layer provided in the second insulating layer, 
 a third metal layer provided in the second insulating layer, the third metal layer being in direct contact with the first metal layer, and 
 a fourth metal layer provided between the third metal layer and the second conductive layer, a linear expansion coefficient of the fourth metal layer being higher than a linear expansion coefficient of the third metal layer, 
 
 wherein the first insulating layer includes a first hole, and both the first metal layer and the second metal layer are provided in the first hole, 
 wherein the second insulating layer includes a second hole, and both the third metal layer and the fourth metal layer are provided in the second hole, and 
 wherein the second metal layer and the first metal layer are stacked in a first direction, and a width of the first metal layer and a width of the second metal layer, in a second direction perpendicular to the first direction, are substantially equal. 
 
     
     
       13. The semiconductor device according to  claim 12 , wherein the first barrier metal includes titanium or titanium nitride, and the second barrier metal includes titanium or titanium nitride. 
     
     
       14. The semiconductor device according to  claim 1 , wherein:
 the second metal layer has a first narrow portion and a first wide portion, the first narrow portion being provided between the first conductive layer and the first wide portion, 
 the second metal layer includes a first step between the first narrow portion and the first wide portion, 
 the fourth metal layer has a second narrow portion and a second wide portion, the second narrow portion being provided between the second conductive layer and the second wide portion, and 
 the fourth metal layer includes a second step between the second narrow portion and the second wide portion. 
 
     
     
       15. The semiconductor device according to  claim 12 , wherein:
 the second metal layer has a first narrow portion and a first wide portion, the first narrow portion being provided between the first conductive layer and the first wide portion, 
 the second metal layer includes a first step between the first narrow portion and the first wide portion, 
 the fourth metal layer has a second narrow portion and a second wide portion, the second narrow portion being provided between the second conductive layer and the second wide portion, and 
 the fourth metal layer includes a second step between the second narrow portion and the second wide portion. 
 
     
     
       16. The semiconductor device according to  claim 12 , wherein a distance between portions of the first insulating layer sandwiching the first barrier metal and the first metal layer in the second direction in a cross section parallel to the first direction at a vicinity of an interface between the first barrier metal and the first metal layer is substantially equal to a distance between portions of the first insulating layer sandwiching the second barrier metal and the second metal layer in the second direction in the cross section parallel to the first direction at a vicinity of an interface between the first barrier metal and the second metal layer. 
     
     
       17. The semiconductor device according to  claim 12 , wherein an interface between the first insulating layer and the first barrier metal and an interface between the first insulating layer and the second barrier metal are on a straight line in a cross section parallel to the first direction.