Inspection system and temperature measuring method for inspection system

Abstract

An inspection system includes an inspection device that includes a stage on which a substrate is mounted and inspects the substrate on the stage, a temperature adjustment mechanism that adjusts the temperature of the stage, a substrate accommodating part, a temperature measurement substrate standby part that makes a temperature measurement substrate wait, a transfer unit that transfers the substrate and the temperature measurement substrate onto the stage, and a camera used for aligning the substrate on the stage. The temperature measurement substrate includes, on the surface thereof, a temperature measurement member whose state changes depending on the temperature. The transfer unit transfers the temperature measurement substrate onto the stage, the camera images the temperature measurement member, and the temperature of the temperature measurement substrate is measured from a change in the state of the temperature measurement member.

The invention claimed is: 
     
       1. An inspection system comprising:
 at least one inspection device having a stage on which a substrate is mounted and configured to inspect the substrate on the stage; 
 a temperature control mechanism configured to control a temperature of the stage; 
 a substrate accommodating part configured to accommodate the substrate; 
 a temperature measurement substrate standby part configured to making a temperature measurement substrate to be mounted on the stage wait; 
 a transfer unit configured to transfer the substrate accommodated in the substrate accommodating part and the temperature measurement substrate waiting at the temperature measurement substrate standby part onto the stage; and 
 a camera used for aligning the substrate on the stage, 
 wherein the temperature measurement substrate has a temperature measurement member whose state changes depending on a temperature on a surface of the temperature measurement substrate, and 
 the temperature measurement substrate is transferred from the temperature measurement substrate standby part onto the stage by the transfer unit, and the camera images the temperature measurement member so that a temperature of the temperature measurement substrate is measured from a change in the state of the temperature measurement member. 
 
     
     
       2. The inspection system of  claim 1 , wherein the at least one inspection device includes two or more inspection devices, and the transfer device transfers the substrate and the temperature measurement substrate onto stages of inspection devices. 
     
     
       3. The inspection system of  claim 1 , wherein the temperature measurement substrate has the same shape as a shape of the substrate. 
     
     
       4. The inspection system of  claim 1 , wherein the temperature measurement member is provided on a base of the temperature measurement substrate. 
     
     
       5. The inspection system of  claim 4 , wherein a material and a thickness of the base are adjusted such that a heat capacity of the temperature measurement substrate becomes close to a heat capacity of the substrate. 
     
     
       6. The inspection system of  claim 5 , wherein the base is made of the same material as a material of the substrate. 
     
     
       7. The inspection system of  claim 1 , wherein the camera images at least one temperature measurement portion of the temperature measurement member. 
     
     
       8. The inspection system of  claim 7 , wherein the at least one temperature measurement portion of the temperature measurement member includes two or more temperature measurement portions, and the camera images the temperature measurement portions to measure temperature distribution of the temperature measurement substrate. 
     
     
       9. The inspection system of  claim 1 , wherein a color of the temperature measurement member changes depending on a temperature. 
     
     
       10. The inspection system of  claim 1 , wherein the temperature measurement member is made of a temperature indicating material whose color changes reversibly at a certain temperature. 
     
     
       11. The inspection system of  claim 1 , wherein the temperature measurement member is formed by laminating a plurality of transparent sheets having predetermined patterns of color developing materials that develop colors by reaction at a predetermined temperature such that positions and reaction temperatures of the color developing materials of the transparent sheets are different from each other, and temperature data is obtained by allowing the camera to recognize, by using pattern matching, a difference in the positions or the number of the patterns due to a temperature difference. 
     
     
       12. The inspection system of  claim 1 , wherein the temperature measurement member is formed by laminating a plurality of transparent sheets having predetermined patterns of the same color developing materials that develop colors by reaction at a predetermined temperature such that positions of the color developing materials of the transparent sheets are different from each other, and temperature data is obtained by allowing the camera to recognize, by using pattern matching, a difference in the positions or the number of the patterns due to a temperature difference based on the positions of the transparent sheets.