Teaching method for transfer device, and transfer system

Abstract

A teaching method for a transfer device provided with a pick configured to hold a substrate and a mapping sensor, includes detecting a position of an edge of the substrate arranged in a teaching target module by the mapping sensor and setting a teaching position in one horizontal direction, transferring the substrate from the teaching target module to a stage of an alignment device by the pick based on the set teaching position, rotating the stage by a predetermined angle and detecting a locus of the position of the edge of the substrate, and estimating an eccentricity amount between the stage and the substrate based on the detected locus of the position of the edge of the substrate.

What is claimed is: 
     
       1. A teaching method for a transfer device that includes a pick configured to hold a substrate and a mapping sensor, comprising:
 detecting a position of an edge of the substrate arranged in a teaching target module by the mapping sensor and setting a teaching position in one horizontal direction; 
 transferring the substrate from the teaching target module to a stage of an alignment device by the pick based on the set teaching position; 
 rotating the stage by a predetermined angle and detecting a locus of the position of the edge of the substrate; and 
 estimating an eccentricity amount between the stage and the substrate based on the detected locus of the position of the edge of the substrate. 
 
     
     
       2. The teaching method of  claim 1 , further comprising:
 determining whether the estimated eccentricity amount exceeds a threshold value, 
 wherein if the estimated eccentricity amount exceeds the threshold value, the teaching method further comprises: 
 returning the stage to an original angle and transferring the substrate from the alignment device to the teaching target module by the pick; 
 setting a teaching position in another horizontal direction based on the estimated eccentricity amount; 
 transferring the substrate from the teaching target module to the stage of the alignment device by the pick based on the set teaching position; 
 rotating the stage by the predetermined angle and detecting a locus of the position of the edge of the substrate; and 
 estimating an eccentricity amount between the stage and the substrate based on the detected locus of the position of the edge of the substrate. 
 
     
     
       3. The teaching method of  claim 2 , wherein the predetermined angle is less than 90°. 
     
     
       4. The teaching method of  claim 3 , wherein the estimated eccentricity amount is a displacement amount of the position of the edge of the substrate when the stage is rotated by 90°. 
     
     
       5. The teaching method of  claim 4 , further comprising:
 determining whether the estimated eccentricity amount exceeds a threshold value, 
 wherein if the estimated eccentricity amount does not exceed the threshold value, the teaching method further comprises: 
 measuring an eccentricity amount between the stage and the substrate by the alignment device; 
 returning the stage to an original angle and transferring the substrate from the alignment device to the teaching target module by the pick; and 
 setting the teaching position in the one horizontal direction based on the measured eccentricity amount. 
 
     
     
       6. The teaching method of  claim 1 , wherein the predetermined angle is less than 90°. 
     
     
       7. The teaching method of  claim 1 , wherein the estimated eccentricity amount is a displacement amount of the position of the edge of the substrate when the stage is rotated by 90°. 
     
     
       8. The teaching method of  claim 1 , further comprising:
 determining whether the estimated eccentricity amount exceeds a threshold value, 
 wherein if the estimated eccentricity amount does not exceed the threshold value, the teaching method further comprises: 
 measuring an eccentricity amount between the stage and the substrate by the alignment device; 
 returning the stage to an original angle and transferring the substrate from the alignment device to the teaching target module by the pick; and 
 
       setting the teaching position in the one horizontal direction based on the measured eccentricity amount. 
     
     
       9. A transfer system, comprising:
 a transfer device including a pick configured to hold a substrate and a mapping sensor; 
 an alignment device; and 
 a controller, 
 wherein the controller is configured to: 
 control the transfer device to detect a position of an edge of the substrate arranged in a teaching target module by the mapping sensor; 
 set a teaching position in one horizontal direction based on the detected position of the edge of the substrate; 
 control the transfer device to transfer the substrate from the teaching target module to a stage of the alignment device by the pick based on the set teaching position; 
 control the alignment device to rotate the stage by a predetermined angle and detect a locus of the position of the edge of the substrate; and 
 estimate an eccentricity amount between the stage and the substrate based on the detected locus of the position of the edge of the substrate.