US12438083B2ActiveUtilityA1
Assemblies having conductive interconnects which are laterally and vertically offset relative to one another
Est. expiryJul 10, 2040(~14 yrs left)· nominal 20-yr term from priority
H10W 20/42H10W 20/057H10W 20/43H10W 20/076H10B 63/84H10B 61/00H10B 63/80H10B 63/20H10B 63/24H10B 61/10H01L 23/5226H01L 23/528
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Claims
Abstract
Some embodiments include an integrated assembly having a base which includes first circuitry. Memory decks are over the base. Each of the memory decks has a sense/access line coupled with the first circuitry. The memory decks and base are vertically spaced from one another by gaps. The gaps alternate in a vertical direction between first gaps and second gaps. Overlapping conductive paths extend from the sense/access lines to the first circuitry. The conductive paths include first conductive interconnects within the first gaps and second conductive interconnects within the second gaps. The first and second conductive interconnects are laterally offset relative to one another.
Claims
exact text as granted — not AI-modifiedWe claim:
1. A method of forming an integrated assembly, the method comprising:
providing a base comprising a first circuitry;
forming memory arrays over the base and each of the memory arrays comprising a sense/access line, the memory arrays being vertically spaced from one another by gaps, the gaps alternating in a vertical direction between first gaps and second gaps, a gap between the base and a bottommost of the memory arrays being one of the first gaps; and
forming conductive paths overlapping among themselves and extending from the sense/access lines to the first circuitry, the conductive paths comprising:
first conductive interconnects within the first gaps; and
second conductive interconnects within the second gaps;
the first and second conductive interconnects being laterally spaced relative to one another.
2. The method of claim 1 , wherein the memory arrays include memory cells addressed by the sense/access lines.
3. The method of claim 2 , wherein the memory cells include phase change memory.
4. The method of claim 2 , wherein the memory cells include magnetic memory.
5. The method of claim 2 , wherein the memory cells include resistive memory.
6. The method of claim 1 , wherein the sense/access lines are wordlines.
7. The method of claim 1 , wherein the sense/access lines are bitlines.
8. A method of forming an integrated assembly, the method comprising:
distributing first conductive interconnects laterally spaced from each other along a first row in a first direction on a base, an intervening region between the first conductive interconnects;
distributing second conductive interconnects along a second row on the base, the second row parallel to the first row with the first row spaced from the second row in a second direction perpendicular to the first direction, the second conductive interconnects aligned with the intervening region; and
forming conductive lines over the first conductive interconnects.
9. The method of claim 8 , wherein the forming of the conductive lines comprises forming the conductive lines over the second conductive interconnects.
10. The method of claim 8 , further comprising forming third conductive interconnects over the conductive lines.
11. The method of claim 10 , wherein the third conductive interconnects are aligned over the first row in the first direction over the intervening region.
12. The method of claim 10 , wherein the third conductive interconnects are aligned over the second row in the second direction.Cited by (0)
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