Amorphous dielectric capacitors on silicon

Abstract

High-capacity capacitors and gate insulators exhibiting moderately high dielectric constants with surprisingly low leakage using amorphous or low temperature films of perovskite type oxides including a titanate system material such as barium titanate, strontium titanate, barium strontium titanate (BST), lead titanate, lead zirconate titanate, lead lanthanum zirconate titanate, barium lanthanum titanate, a niobate, aluminate or tantalate system material such as lead magnesium niobate, lithium niobate lithium tantalate, potassium niobate and potassium tantalum niobate, a tungsten-bronze system material such as barium strontium niobate, lead barium niobate, barium titanium niobate, and Bi-layered perovskite system material such as strontium bismuth tantalate, bismuth titanate deposited directly on a silicon surface at temperatures about 450° C. or less.

Having thus described our invention, what we claim as new and desire to secure by the Letter Patent is:  
     
         1 . A capacitor comprising an amorphous dielectric material having a dielectric constant of 10 or greater deposited directly on a silicon-containing electrode.  
     
     
         2 . The capacitor of    claim 1    wherein the amorphous dielectric material is fabricated at temperatures about 450° C. or less.  
     
     
         3 . The capacitor of    claim 1    wherein the amorphous dielectric material is a thin film having a thickness of from about 1 to about 2000 nm.  
     
     
         4 . The capacitor of    claim 1    wherein said amorphous dielectric material is a perovskite-type oxide having the formula ABO 3  wherein B is at least one acidic oxide containing a metal from Group IVB, VB, VIB, VIIB, IIIA and IB of the Periodic Table of Elements and A is at least one additional cation having a positive formal charge of from about 1 to about 3.  
     
     
         5 . The capacitor of    claim 4    wherein said amorphous dielectric material is a titanate, niobate, aluminate or tantalate system material, a tungsten-bronze system material or a Bi-layered system material.  
     
     
         6 . The capacitor of    claim 5    wherein said amorphous dielectric material is barium strontium titanate, barium titanate, strontium titanate, lead zirconium titanate, barium zirconium titanate, tantalum titanate, lead lanthanum titanate, barium strontium niobate, barium lanthanum titanate, lanthanum aluminate, yttrium aluminate, strontium aluminum tantalate or barium titanium niobate.  
     
     
         7 . The capacitor of    claim 6    wherein said amorphous dielectric is barium strontium titanate.  
     
     
         8 . The capacitor of    claim 1    wherein a top conductive electrode is formed on said amorphous dielectric material.  
     
     
         9 . The capacitor of    claim 8    wherein said top conductive electrode is composed of a conductive material selected from the group consisting of a noble metal, a noble metal oxide, a conductive oxide and mixtures thereof.  
     
     
         10 . The capacitor of    claim 8    wherein a passivating layer is formed on said top conductive electrode.  
     
     
         11 . A method for forming a capacitor comprising an amorphous dielectric material having a dielectric constant of 10 or greater deposited directly on a silicon-containing material comprising the steps of: 
 (a) preparing a bottom electrode, said bottom electrode being composed of Si or a Si-containing material;    (b) forming an amorphous dielectric material on top of the bottom electrode;    (c) annealing the amorphous dielectric material at a temperature which is effective in improving the quality as well as the dielectric constant of the amorphous dielectric material; and    (d) fabricating a top conductive electrode on said annealed amorphous dielectric material.    
     
     
         12 . The method of    claim 11    wherein steps (b) and (c) are carried out at temperatures of about 450° C. or less.  
     
     
         13 . The method of    claim 11    wherein step (b) is carried out by chemical vapor deposition, plasma assisted chemical vapor deposition, low pressure chemical vapor deposition, high density plasma chemical vapor deposition, metal organic decomposition, sol-gel, evaporation, sputtering, or pulsed laser deposition.  
     
     
         14 . The method of    claim 11    further comprising (e) forming a passivating layer on said top conductive electrode.  
     
     
         15 . A gate insulator for use in a transistor comprising an amorphous dielectric material having a dielectric constant of 10 or greater.  
     
     
         16 . The gate insulator of    claim 15    wherein the amorphous dielectric material is fabricated at temperatures about 450° C. or less.  
     
     
         17 . The gate insulator of    claim 15    wherein the amorphous dielectric material is a thin film having a thickness of from about 1 to about 2000 nm.  
     
     
         18 . The gate insulator of    claim 15    wherein said amorphous dielectric material is a perovskite-type oxide having the formula ABO 3  wherein B is at least one acidic oxide containing a metal from Group IVB, VB, VIB, VIIB, IIIA and IB of the Periodic Table of Elements and A is at least one additional cation having a positive formal charge of from about 1 to about 3.  
     
     
         19 . The gate insulator of    claim 18    wherein said amorphous dielectric material is a titanate, niobate, aluminate or tantalate system material, a tungsten-bronze system material or a Bi-layered system material.  
     
     
         20 . The gate insulator of    claim 19    wherein said amorphous dielectric material is barium strontium titanate, barium titanate, strontium titanate, lead zirconium titanate, barium zirconium titanate, tantalum titanate, lead lanthanum titanate, barium strontium niobate, barium lanthanum titanate, lanthanum aluminate, yttrium aluminate, strontium aluminum tantalate or barium titanium niobate.  
     
     
         21 . The gate insulator of    claim 20    wherein said amorphous dielectric material is barium strontium titanate.  
     
     
         22 . A method of fabricating a transistor comprising an amorphous dielectric constant material as a gate insulator comprising the steps of: 
 (a) forming an amorphous dielectric material on a structure containing a semiconducting electrode, said amorphous dielectric material having a dielectric constant of 10 or above;    (b) annealing the amorphous dielectric material at a temperature which is effective in improving the quality as well as the dielectric constant of the amorphous dielectric material; and    (c) forming a gate conductor on said annealed amorphous dielectric material.    
     
     
         23 . The method of    claim 22    wherein steps (a) and (b) are carried out at temperatures of about 450° C. or less.  
     
     
         24 . The method of    claim 22    wherein step (a) is carried out by chemical vapor deposition, plasma assisted chemical vapor deposition, low pressure chemical vapor deposition, high density plasma chemical vapor deposition, metal organic decomposition, sol-gel, evaporation, sputtering, or pulsed laser deposition.  
     
     
         25 . The method of    claim 22    further comprising (d) forming a passivating layer on said gate conductor.  
     
     
         26 . The method of    claim 22    wherein said semiconducting electrode is silicon, a silicon containing material, a semiconducting organic or inorganic material.