Polishing surface constituting member and polishing apparatus using the polishing surface constituting member

Abstract

A polishing surface constituting member capable of polishing an object surface flat and uniformly with minimal overpolishing at the edge of the object is provided, together with a polishing apparatus using the polishing surface constituting member. The polishing surface constituting member polishes the object pressed against it under a predetermined pressure by relative movement therebetween. A surface of the polishing surface constituting member that comes in contact with the object is provided with grooves at a predetermined pitch or provided with projections in a predetermined configuration.

What is claimed is:  
     
         1 . A polishing surface constituting member for polishing an object to be polished by pressing said object against said polishing surface constituting member under a predetermined pressure and causing relative movement between said object and said polishing surface constituting member, 
 wherein a surface of said polishing surface constituting member that comes in contact with said object is provided with grooves at a predetermined pitch or provided with projections in a predetermined configuration.    
     
     
         2 . A polishing surface constituting member according to  claim 1 , which has a laminated structure including at least two layers, wherein said grooves or grooves provided between said projections extend to a surface of a layer of said polishing surface constituting member immediately subsequent to a layer thereof that comes in contact with said object to be polished.  
     
     
         3 . A polishing surface constituting member according to  claim 2 , wherein at least one of underlying layers of said polishing surface constituting member subsequent to the layer thereof that comes in contact with said object to be polished is a layer pressurized by a fluid.  
     
     
         4 . A polishing surface constituting member according to  claim 1 , which has a laminated structure including at least two layers, wherein said grooves or grooves provided between said projections extend into a layer of said polishing surface constituting member immediately subsequent to a layer thereof that comes in contact with said object to be polished.  
     
     
         5 . A polishing surface constituting member according to  claim 4 , wherein at least one of underlying layers of said polishing surface constituting member subsequent to the layer thereof that comes in contact with said object to be polished is a layer pressurized by a fluid.  
     
     
         6 . A polishing apparatus for polishing an object to be polished by pressing said object against a polishing surface constituting member on a polishing table under a predetermined pressure and causing relative movement between said object and said polishing surface constituting member, 
 wherein said polishing surface constituting member is the polishing surface constituting member according to  claim 1 .    
     
     
         7 . A polishing apparatus for polishing an object to be polished by pressing said object against a polishing surface constituting member on a polishing table under a predetermined pressure and causing relative movement between said object and said polishing surface constituting member, 
 wherein said polishing surface constituting member is the polishing surface constituting member according to  claim 2 .    
     
     
         8 . A polishing apparatus for polishing an object to be polished by pressing said object against a polishing surface constituting member on a polishing table under a predetermined pressure and causing relative movement between said object and said polishing surface constituting member, 
 wherein said polishing surface constituting member is the polishing surface constituting member according to  claim 4 .    
     
     
         9 . A polishing surface constituting member according to  claim 1 , which has a laminated structure including at least two layers, wherein said grooves or grooves provided between said projections extend short of a surface of a layer of said polishing surface constituting member immediately subsequent to a layer thereof that comes in contact with said object to be polished.