Inventor · disambiguated record
Tetsuji Togawa
Also filed as: TOGAWA TETSUJI
147 granted patents·13 pending applications·3,090 citations·filing 1995–2023
99Inventor score
Top patents by PatentIndex Score
160 records- 0199USD634719SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2010·Granted Mar 22, 2011·539 cites·1 claims
- 0296US6790763B2Substrate processing methodEBARA CORP·Filed 2001·Granted Sep 14, 2004·57 cites·39 claims
- 0395US10040166B2Polishing apparatusEBARA CORP·Filed 2014·Granted Aug 7, 2018·11 cites·15 claims
- 0495US8083571B2Polishing apparatusNABEYA OSAMU·Filed 2005·Granted Dec 27, 2011·22 cites·5 claims
- 0594US10343252B2Polishing apparatus for detecting abnormality in polishing of a substrateEBARA CORP·Filed 2017·Granted Jul 9, 2019·4 cites·14 claims
- 0694US7223690B2Substrate processing methodEBARA CORP·Filed 2004·Granted May 29, 2007·41 cites·16 claims
- 0794US6609962B1Dressing apparatus and polishing apparatusEBARA CORP·Filed 2000·Granted Aug 26, 2003·85 cites·23 claims
- 0893US10293455B2Polishing apparatusEBARA CORP·Filed 2016·Granted May 21, 2019·5 cites·18 claims
- 0993US6358128B1Polishing apparatusEBARA CORP·Filed 2000·Granted Mar 19, 2002·61 cites·70 claims
- 1093US5830045APolishing apparatusEBARA CORP·Filed 1996·Granted Nov 3, 1998·95 cites·25 claims
- 1192US8485866B2Substrate holding apparatus, polishing apparatus, and polishing methodYASUDA HOZUMI·Filed 2012·Granted Jul 16, 2013·8 cites·6 claims
- 1292US7632378B2Polishing apparatusEBARA CORP·Filed 2005·Granted Dec 15, 2009·15 cites·12 claims
- 1392US7357699B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2004·Granted Apr 15, 2008·49 cites·34 claims
- 1492US7311585B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2005·Granted Dec 25, 2007·15 cites·12 claims
- 1592US7150673B2Method for estimating polishing profile or polishing amount, polishing method and polishing apparatusEBARA CORP·Filed 2005·Granted Dec 19, 2006·15 cites·27 claims
- 1692US6878044B2Polishing apparatusEBARA CORP·Filed 2004·Granted Apr 12, 2005·47 cites·18 claims
- 1792US6852019B2Substrate holding apparatusEBARA CORP·Filed 2001·Granted Feb 8, 2005·49 cites·40 claims
- 1892US5679059APolishing aparatus and methodEBARA CORP·Filed 1995·Granted Oct 21, 1997·110 cites·83 claims
- 1991US8641480B2Polishing apparatus and polishing methodNAKANISHI MASAYUKI·Filed 2011·Granted Feb 4, 2014·10 cites·12 claims
- 2091US7854646B2Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2010·Granted Dec 21, 2010·12 cites·7 claims
- 2191US7083507B2Substrate holding apparatusEBARA CORP·Filed 2005·Granted Aug 1, 2006·14 cites·37 claims
- 2290US11548113B2Method and apparatus for polishing a substrateEBARA CORP·Filed 2019·Granted Jan 10, 2023·2 cites·8 claims
- 2390US8979615B2Polishing apparatus and polishing methodSEKI MASAYA·Filed 2011·Granted Mar 17, 2015·8 cites·6 claims
- 2490US7632173B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2007·Granted Dec 15, 2009·11 cites·37 claims
- 2590US7491117B2Substrate holding apparatusEBARA CORP·Filed 2006·Granted Feb 17, 2009·11 cites·5 claims
- 2690US7234999B2Method for estimating polishing profile or polishing amount, polishing method and polishing apparatusEBARA CORP·Filed 2006·Granted Jun 26, 2007·12 cites·16 claims
- 2790US7207862B2Polishing apparatus and method for detecting foreign matter on polishing surfaceEBARA CORP·Filed 2003·Granted Apr 24, 2007·37 cites·8 claims
- 2890US6953390B2Polishing apparatusEBARA CORP·Filed 2003·Granted Oct 11, 2005·30 cites·8 claims
- 2990US6828225B2Substrate processing methodEBARA CORP·Filed 2004·Granted Dec 7, 2004·27 cites·12 claims
- 3090US5643067ADressing apparatus and methodEBARA CORP·Filed 1995·Granted Jul 1, 1997·87 cites·35 claims
- 3189US9248545B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2014·Granted Feb 2, 2016·7 cites·13 claims
- 3289US8100743B2Polishing apparatusNABEYA OSAMU·Filed 2008·Granted Jan 24, 2012·14 cites·8 claims
- 3389US6578891B1Substrate holder and substrate transfer apparatus using the sameEBARA CORP·Filed 2000·Granted Jun 17, 2003·49 cites·21 claims
- 3489US6354922B1Polishing apparatusEBARA CORP·Filed 2000·Granted Mar 12, 2002·50 cites·29 claims
- 3588US9782869B2Apparatus for detecting abnormality in polishing of a substrateEBARA CORP·Filed 2016·Granted Oct 10, 2017·2 cites·7 claims
- 3688US8070560B2Polishing apparatus and methodYASUDA HOZUMI·Filed 2008·Granted Dec 6, 2011·13 cites·7 claims
- 3788US7635292B2Substrate holding device and polishing apparatusEBARA CORP·Filed 2005·Granted Dec 22, 2009·13 cites·13 claims
- 3888US5885134APolishing apparatusEBARA CORP·Filed 1997·Granted Mar 23, 1999·81 cites·20 claims
- 3987US10155294B2Polishing apparatus and polishing methodEBARA CORP·Filed 2018·Granted Dec 18, 2018·2 cites·5 claims
- 4087US9694467B2Polishing method of polishing a substrateEBARA CORP·Filed 2016·Granted Jul 4, 2017·2 cites·5 claims
- 4187US9399274B2Wafer polishing methodEBARA CORP·Filed 2014·Granted Jul 26, 2016·6 cites·17 claims
- 4286US7988537B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2008·Granted Aug 2, 2011·8 cites·12 claims
- 4386US7867063B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2009·Granted Jan 11, 2011·8 cites·20 claims
- 4485US9566616B2Substrate processing apparatusEBARA CORP·Filed 2014·Granted Feb 14, 2017·5 cites·13 claims
- 4584US11511389B2Polishing head and polishing apparatusEBARA CORP·Filed 2019·Granted Nov 29, 2022·3 cites·11 claims
- 4684US9914196B2Polishing apparatus and polishing methodEBARA CORP·Filed 2015·Granted Mar 13, 2018·2 cites·5 claims
- 4784US8748289B2Method for manufacturing semiconductor deviceEBARA CORP·Filed 2013·Granted Jun 10, 2014·5 cites·4 claims
- 4884US8152594B2Polishing apparatusSAITO KENICHIRO·Filed 2008·Granted Apr 10, 2012·14 cites·10 claims
- 4984US7670206B2Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2004·Granted Mar 2, 2010·27 cites·10 claims
- 5084US5839947APolishing apparatusEBARA CORP·Filed 1997·Granted Nov 24, 1998·58 cites·14 claims
Showing the top 50 of 160 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →