High-power ion sputtering magnetron

Abstract

A high-power ion sputtering magnetron having a rotary cathode comprising a conducting member disposed within the rotary cathode being made of an electrically conductive material for conducting electrical current from the power supply to the rotary cathode. The ion sputtering magnetron also has an electromagnetic field shield disposed between the conducting member and the drive shaft portion. The field shield is made of an electromagnetic field-permeable material such as a ferrous material for reducing damage to parts adjacent to the rotary cathode that are susceptible to inductive magnetic heating.

What is claimed is:  
     
         1 . A rotary cathode device connectable to a power supply of electrical current, said rotary cathode device comprising: 
 a conducting member disposed within the rotary cathode device, said conducting member being made of an electrically conductive material for conducting the electrical current from the power supply to the rotary cathode device.    
     
     
         2 . A rotary cathode device as in  claim 1  wherein said conducting member is a coolant conduit.  
     
     
         3 . A rotary cathode device as recited in  claim 1  further comprising a drive shaft portion, said drive shaft portion includes an interior surface and an exterior surface.  
     
     
         4 . A rotary cathode device as recited in  claim 3  wherein said drive shaft portion is further made of an electromagnetic field-permeable material.  
     
     
         5 . A rotary cathode device as recited in  claim 4  wherein said electromagnetic field-permeable material is a ferrous material.  
     
     
         6 . A rotary cathode device as recited in  claim 3  further comprising an electromagnetic field shield disposed between the conducting member and the drive shaft portion, said electromagnetic field shield is made of an electromagnetic field-permeable material.  
     
     
         7 . A rotary cathode device as recited in  claim 3  further comprising an electromagnetic field shield attached to at least a portion of the interior surface of the drive shaft portion, said electromagnetic field shield is made of an electromagnetic field-permeable material.  
     
     
         8 . A rotary cathode device as recited in  claim 3  further comprising an electromagnetic field shield attached to at least a portion of the exterior surface of the drive shaft portion, said electromagnetic field shield is made of an electromagnetic field-permeable material.  
     
     
         9 . A rotary cathode device connectable to a power supply of electrical current, said rotary cathode device comprising: 
 a coolant conduit disposed within the rotary cathode device made of an electrically conductive material for connecting the electrical current from the power supply to the rotary cathode; and    a drive shaft portion made of a ferrous material for absorbing the electromagnetic field to reduce heat damage to parts adjacent to the rotary cathode device that are susceptible to inductive magnetic heating.    
     
     
         10 . A high-power ion sputtering magnetron connectable to a power supply of electrical current, said magnetron device comprising: 
 a rotary cathode disposed upon the magnetron device, said rotary cathode comprising a conducting member disposed within the rotary cathode, said conducting member being made of an electrically conductive material for connecting the electrical current from the power supply to the rotary cathode.    
     
     
         11 . A magnetron device as recited in  claim 10  wherein the conducting member is a coolant conduit.  
     
     
         12 . A magnetron device as recited in  claim 10  wherein the rotary cathode further comprises a drive shaft portion rotatably disposed upon the magnetron device, and said drive shaft portion includes an interior surface and an exterior surface.  
     
     
         13 . A magnetron device as recited in  claim 12  wherein the drive shaft portion is further made of an electromagnetic field-permeable material.  
     
     
         14 . A magnetron device as recited in  claim 13  wherein the electromagnetic field-permeable material is a ferrous material.  
     
     
         15 . A magnetron device as recited in  claim 12  wherein the rotary cathode further comprises an electromagnetic field shield disposed between the conducting member and the drive shaft portion, said field shield is made of an electromagnetic field-permeable material.  
     
     
         16 . A magnetron device as recited in  claim 12  wherein the rotary cathode further comprises an electromagnetic field shield attached to at least a portion of the interior surface of the drive shaft portion, the field shield is made of an electromagnetic field-permeable material.  
     
     
         17 . A magnetron device as recited in  claim 12  wherein the rotary cathode further comprises an electromagnetic field shield attached to at least a portion of the exterior surface of the drive shaft portion, and the drive shaft portion is made of an electromagnetic field-permeable material.  
     
     
         18 . A high-power ion sputtering magnetron connectable to an electrical power supply, said magnetron device comprising: 
 a rotary cathode rotatably mounted upon the magnetron device, said rotary cathode comprising a conducting member disposed within the rotary cathode, said conducting member being made of an electrically conductive material for connecting the electrical current from the power supply to the rotary cathode; and    a drive shaft portion rotatably mounted to the magnetron device, said drive shaft portion being made of a ferrous material for absorbing the electromagnetic field to reduce heat damage to parts adjacent to the rotary cathode device that are susceptible to inductive magnetic heating.