Transistor having high dielectric constant gate insulating layer and source and drain forming schottky contact with substrate

Abstract

The invention is directed to a device for regulating the flow of electric current with high dielectric constant gate insulating layer and a source and/or drain forming a Schottky contact or Schottky-like region with a substrate and its fabrication method. In one aspect, the gate insulating layer has a dielectric constant greater than the dielectric constant of silicon. In another aspect, the current regulating device may be a MOSFET device, optionally a planar P-type or N-type MOSFET, having any orientation. In another aspect, the source and/or drain may consist partially or fully of a silicide.

We claim:  
     
         1 . A method for manufacture of a device for regulating the flow of electrical current, the method comprising: 
 providing for a semiconductor substrate;    providing for an electrically insulating layer in contact with the semiconductor substrate, the insulating layer having a dielectric constant greater than 4.0;    providing for a gate electrode in contact with at least a portion of the insulating layer; and    providing a source electrode and a drain electrode in contact with the semiconductor substrate and proximal to the gate electrode wherein at least one of the source electrode and the drain electrode forms a Schottky contact or Schottky-like region with the semiconductor substrate.    
     
     
         2 . The method of  claim 1 , wherein the source and drain electrodes are formed from a member of the group consisting of: platinum silicide, palladium silicide and iridium silicide.  
     
     
         3 . The method of  claim 1 , wherein the source and drain electrodes are formed from a member of the group consisting of the rare earth silicides.  
     
     
         4 . The method of  claim 1 , wherein the insulating layer is formed from a member of the group consisting of metal oxides.  
     
     
         5 . The method of  claim 1 , wherein the insulating layer is formed from an oxy-nitride stack.  
     
     
         6 . The method of  claim 1 , wherein the Schottky contact or Schottky-like region is formed at least in areas adjacent to the channel.  
     
     
         7 . The method of  claim 1 , wherein an entire interface between at least one of the source electrode and the drain electrode and the semiconductor substrate forms a Schottky contact or Schottky-like region with the semiconductor substrate.  
     
     
         8 . The method of  claim 1 , wherein dopants are introduced into the channel region.  
     
     
         9 . The method of  claim 1 , wherein the insulating layer includes more than one layer.  
     
     
         10 . The method of  claim 2  or  3 , wherein the insulating layer is formed from a member of the group consisting of metal oxides.  
     
     
         11 . The method of  claim 2  or  3 , wherein the insulating layer is formed from an oxy-nitride stack.  
     
     
         12 . The method of  claim 10 , wherein the Schottky contact or Schottky-like region is formed at least in areas adjacent to the channel, and wherein dopants are introduced into the channel region.  
     
     
         13 . The method of  claim 11 , wherein the Schottky contact or Schottky-like region is formed at least in areas adjacent to the channel, and wherein dopants are introduced into the channel region.  
     
     
         14 . The method of  claim 2  or  3 , wherein providing a source electrode and a drain electrode in contact with the semiconductor substrate is performed at a processing temperature of less than about 800° C.  
     
     
         15 . A method for manufacture of a device for regulating the flow of electrical current, the method comprising: 
 providing for a semiconductor substrate;    providing for an electrically insulating layer in contact with the semiconductor substrate, the insulating layer having a dielectric constant greater than 7.6;    providing for a gate electrode in contact with at least a portion of the insulating layer; and    providing a source electrode and a drain electrode in contact with the semiconductor substrate and proximal to the gate electrode wherein at least one of the source electrode and the drain electrode forms a Schottky contact or Schottky-like region with the semiconductor substrate.    
     
     
         16 . The method of  claim 15 , wherein the source and drain electrodes are formed from a member of the group consisting of: platinum silicide, palladium silicide and iridium silicide.  
     
     
         17 . The method of  claim 15 , wherein the source and drain electrodes are formed from a member of the group consisting of the rare earth silicides.  
     
     
         18 . The method of  claim 15 , wherein the insulating layer is formed from a member of the group consisting of metal oxides.  
     
     
         19 . The method of  claim 15 , wherein the insulating layer is formed from an oxy-nitride stack.  
     
     
         20 . The method of  claim 15 , wherein the Schottky contact or Schottky-like region is formed at least in areas adjacent to the channel.  
     
     
         21 . The method of  claim 15 , wherein an entire interface between at least one of the source electrode and the drain electrode and the semiconductor substrate forms a Schottky contact or Schottky-like region with the semiconductor substrate.  
     
     
         22 . The method of  claim 15 , wherein the insulating layer includes more than one layer.  
     
     
         23 . The method of  claim 15 , wherein dopants are introduced into the channel region.  
     
     
         24 . A method for manufacture of a device for regulating the flow of electrical current, the method comprising: 
 providing for a semiconductor substrate;    providing for an electrically insulating layer in contact with the semiconductor substrate, the insulating layer having a dielectric constant greater than 15;    providing for a gate electrode in contact with at least a portion of the insulating layer; and    providing a source electrode and a drain electrode in contact with the semiconductor substrate and proximal to the gate electrode wherein at least one of the source electrode and the drain electrode forms a Schottky contact or Schottky-like region with the semiconductor substrate.    
     
     
         25 . The method of  claim 24 , wherein the source and drain electrodes are formed from a member of the group consisting of: platinum silicide, palladium silicide and iridium silicide.  
     
     
         26 . The method of  claim 24 , wherein the source and drain electrodes are formed from a member of the group consisting of the rare earth silicides.  
     
     
         27 . The method of  claim 24 , wherein the insulating layer is formed from a member of the group consisting of metal oxides.  
     
     
         28 . The method of  claim 24 , wherein the insulating layer is formed from an oxy-nitride stack.  
     
     
         29 . The method of  claim 24 , wherein the Schottky contact or Schottky-like region is formed at least in areas adjacent to the channel.  
     
     
         30 . The method of  claim 24 , wherein an entire interface between at least one of the source electrode and the drain electrode and the semiconductor substrate forms a Schottky contact or Schottky-like region with the semiconductor substrate.  
     
     
         31 . The method of  claim 24 , wherein dopants are introduced into the channel region.  
     
     
         32 . The method of  claim 24 , wherein the insulating layer includes more than one layer.  
     
     
         33 . A method for manufacture of a device for regulating the flow of electrical current, the method comprising: 
 providing for a semiconductor substrate;    providing for an electrically insulating layer in contact with the semiconductor substrate, the insulating layer having a dielectric constant greater than 4.0;    providing for a gate electrode located in contact with at least a portion of the insulating layer;    exposing the semiconductor substrate on one or more areas proximal to the gate electrode;    providing for a thin film of metal on at least a portion of the exposed semiconductor substrate; and    reacting the metal with the exposed semiconductor substrate such that a Schottky or Schottky-like source electrode and drain electrode are formed on the semiconductor substrate.    
     
     
         34 . The method of  claim 33 , wherein the gate electrode is provided by: 
 depositing a thin conducting film on the insulating layer;    patterning and etching the conducting film to form a gate electrode; and    forming one or more thin insulating layers on one or more sidewalls of the gate electrode.    
     
     
         35 . The method of  claim 33 , further comprising removing metal not reacted during the reacting process.  
     
     
         36 . The method of  claim 33 , wherein the reacting comprises thermal annealing.  
     
     
         37 . The method of  claim 33 , wherein the source and drain electrodes are formed from a member of the group consisting of: platinum silicide, palladium silicide and iridium silicide.  
     
     
         38 . The method of  claim 33 , wherein the source and drain electrodes are formed from a member of the group consisting of the rare earth silicides.  
     
     
         39 . The method of  claim 33 , wherein the insulating layer is formed from a member of the group consisting of metal oxides.  
     
     
         40 . The method of  claim 33 , wherein the insulating layer is formed from an oxy-nitride stack.  
     
     
         41 . The method of  claim 33 , wherein the Schottky contact or Schottky-like region is formed at least in areas adjacent to the channel.  
     
     
         42 . The method of  claim 33 , wherein an entire interface between at least one of the source electrode and the drain electrode and the semiconductor substrate forms a Schottky contact or Schottky-like region with the semiconductor substrate.  
     
     
         43 . The method of  claim 33 , wherein dopants are introduced into the channel region.  
     
     
         44 . A method for manufacture of a device for regulating the flow of electrical current, the method comprising: 
 providing for a semiconductor substrate;    providing for an electrically insulating layer in contact with the semiconductor substrate, the insulating layer having a dielectric constant greater than 7.6;    providing for a gate electrode located in contact with at least a portion of the insulating layer;    exposing the semiconductor substrate on one or more areas proximal to the gate electrode;    providing for a thin film of metal on at least a portion of the exposed semiconductor substrate; and    reacting the metal with the exposed semiconductor substrate such that a Schottky or Schottky-like source electrode and drain electrode are formed on the semiconductor substrate.    
     
     
         45 . The method of  claim 44 , wherein the gate electrode is provided by: 
 depositing a thin conducting film on the insulating layer;    patterning and etching the conducting film to form a gate electrode; and    forming one or more thin insulating layers on one or more sidewalls of the gate electrode.    
     
     
         46 . The method of  claim 44 , further comprising removing metal not reacted during the reacting process.  
     
     
         47 . The method of  claim 44 , wherein the reacting comprises thermal annealing.  
     
     
         48 . The method of  claim 44 , wherein the source and drain electrodes are formed from a member of the group consisting of: platinum silicide, palladium silicide and iridium silicide.  
     
     
         49 . The method of  claim 44 , wherein the source and drain electrodes are formed from a member of the group consisting of the rare earth suicides.  
     
     
         50 . The method of  claim 44 , wherein the insulating layer is formed from a member of the group consisting of metal oxides.  
     
     
         51 . The method of  claim 44 , wherein the insulating layer is formed from an oxy-nitride stack.  
     
     
         52 . The method of  claim 44 , wherein the Schottky contact or Schottky-like region is formed at least in areas adjacent to the channel.  
     
     
         53 . The method of  claim 44 , wherein an entire interface between at least one of the source electrode and the drain electrode and the semiconductor substrate forms a Schottky contact or Schottky-like region with the semiconductor substrate.  
     
     
         54 . The method of  claim 44 , wherein dopants are introduced into the channel region.  
     
     
         55 . A method for manufacture of a device for regulating the flow of electrical current, the method comprising: 
 providing for a semiconductor substrate;    providing for an electrically insulating layer in contact with the semiconductor substrate, the insulating layer having a dielectric constant greater than 15;    providing for a gate electrode located in contact with at least a portion of the insulating layer;    exposing the semiconductor substrate on one or more areas proximal to the gate electrode;    providing for a thin film of metal on at least a portion of the exposed semiconductor substrate; and    reacting the metal with the exposed semiconductor substrate such that a Schottky or Schottky-like source electrode and drain electrode are formed on the semiconductor substrate.    
     
     
         56 . The method of  claim 55 , wherein the gate electrode is provided by: 
 depositing a thin conducting film on the insulating layer;    patterning and etching the conducting film to form a gate electrode; and    forming one or more thin insulating layers on one or more sidewalls of the gate electrode.    
     
     
         57 . The method of  claim 55 , further comprising removing metal not reacted during the reacting process.  
     
     
         58 . The method of  claim 55 , wherein the reacting comprises thermal annealing.  
     
     
         59 . The method of  claim 55 , wherein the source and drain electrodes are formed from a member of the group consisting of: platinum silicide, palladium silicide and iridium silicide.  
     
     
         60 . The method of  claim 55 , wherein the source and drain electrodes are formed from a member of the group consisting of the rare earth silicides.  
     
     
         61 . The method of  claim 55 , wherein the insulating layer is formed from a member of the group consisting of metal oxides.  
     
     
         62 . The method of  claim 55 , wherein the insulating layer is formed from an oxy-nitride stack.  
     
     
         63 . The method of  claim 55 , wherein the Schottky contact or Schottky-like region is formed at least in areas adjacent to the channel.  
     
     
         64 . The method of  claim 55 , wherein an entire interface between at least one of the source electrode and the drain electrode and the semiconductor substrate forms a Schottky contact or Schottky-like region with the semiconductor substrate.  
     
     
         65 . The method of  claim 55 , wherein dopants are introduced into the channel region.  
     
     
         66 . A device for regulating the flow of electrical current, the device comprising: 
 a semiconductor substrate;    a gate electrode;    an electrically insulating layer located between the gate electrode and the semiconductor substrate, the insulating layer having a dielectric constant greater than 4.0; and    a source electrode and a drain electrode in contact with the semiconductor substrate and proximal to the gate electrode wherein at least one of the source electrode and the drain electrode forms a Schottky contact or Schottky-like region with the semiconductor substrate.    
     
     
         67 . The device of  claim 66 , wherein the source and drain electrodes are formed from a member of the group consisting of: platinum silicide, palladium silicide and iridium silicide.  
     
     
         68 . The device of  claim 66 , wherein the source and drain electrodes are formed from a member of the group consisting of the rare earth silicides.  
     
     
         69 . The device of  claim 66 , wherein the insulating layer is formed from a member of the group consisting of the metal oxides.  
     
     
         70 . The device of  claim 66 , wherein the insulating layer is formed from an oxy-nitride stack.  
     
     
         71 . The device of  claim 66 , wherein the Schottky contact or Schottky-like region is at least in areas adjacent to the channel.  
     
     
         72 . The device of  claim 66 , wherein an entire interface between at least one of the source and the drain electrodes and the semiconductor substrate forms a Schottky contact or Schottky-like region with the semiconductor substrate.  
     
     
         73 . The device of  claim 66 , wherein the channel region is doped.  
     
     
         74 . The device of  claim 66 , wherein the insulating layer includes more than one layer.  
     
     
         75 . The device of  claim 67  or  68 , wherein the insulating layer is formed from a member of the group consisting of metal oxides.  
     
     
         76 . The device of  claim 67  or  68 , wherein the insulating layer is formed from an oxy-nitride stack.  
     
     
         77 . The device of  claim 75 , wherein the Schottky contact or Schottky-like region is formed at least in areas adjacent to the channel, and wherein the channel region is doped.  
     
     
         78 . The device of  claim 76 , wherein the Schottky contact or Schottky-like region is formed at least in areas adjacent to the channel, and wherein the channel region is doped.  
     
     
         79 . A device for regulating the flow of electrical current, the device comprising: 
 a semiconductor substrate;    a gate electrode;    an electrically insulating layer located between the gate electrode and the semiconductor substrate, the insulating layer having a dielectric constant greater than 7.6; and    a source electrode and a drain electrode in contact with the semiconductor substrate and proximal to the gate electrode wherein at least one of the source electrode and the drain electrode forms a Schottky contact or Schottky-like region with the semiconductor substrate.    
     
     
         80 . The device of  claim 79 , wherein the source and drain electrodes are formed from a member of the group consisting of: platinum silicide, palladium silicide and iridium silicide.  
     
     
         81 . The device of  claim 79 , wherein the source and drain electrodes are formed from a member of the group consisting of the rare earth silicides.  
     
     
         82 . The device of  claim 79 , wherein the insulating layer is formed from a member of the group consisting of the metal oxides.  
     
     
         83 . The device of  claim 79 , wherein the insulating layer is formed from an oxy-nitride stack.  
     
     
         84 . The device of  claim 79 , wherein the Schottky contact or Schottky-like region is at least in areas adjacent to the channel.  
     
     
         85 . The device of  claim 79 , wherein an entire interface between at least one of the source and the drain electrodes and the semiconductor substrate forms a Schottky contact or Schottky-like region with the semiconductor substrate.  
     
     
         86 . The device of  claim 79 , wherein the channel region is doped.  
     
     
         87 . The device of  claim 79 , wherein the insulating layer includes more than one layer.  
     
     
         88 . A device for regulating the flow of electrical current, the device comprising: 
 a semiconductor substrate;    a gate electrode;    an electrically insulating layer located between the gate electrode and the semiconductor substrate, the insulating layer having a dielectric constant greater than 15; and    a source electrode and a drain electrode in contact with the semiconductor substrate and proximal to the gate electrode wherein at least one of the source electrode and the drain electrode forms a Schottky contact or Schottky-like region with the semiconductor substrate.    
     
     
         89 . The device of  claim 88 , wherein the source and drain electrodes are formed from a member of the group consisting of: platinum silicide, palladium silicide and iridium silicide.  
     
     
         90 . The device of  claim 88 , wherein the source and drain electrodes are formed from a member of the group consisting of the rare earth silicides.  
     
     
         91 . The device of  claim 88 , wherein the insulating layer is formed from a member of the group consisting of the metal oxides.  
     
     
         92 . The device of  claim 88 , wherein the insulating layer is formed from an oxy-nitride stack.  
     
     
         93 . The device of  claim 88 , wherein the Schottky contact or Schottky-like region is at least in areas adjacent to the channel.  
     
     
         94 . The device of  claim 88 , wherein an entire interface between at least one of the source and the drain electrodes and the semiconductor substrate forms a Schottky contact or Schottky-like region with the semiconductor substrate.  
     
     
         95 . The device of  claim 88 , wherein the channel region is doped.  
     
     
         96 . The device of  claim 88 , wherein the insulating layer includes more than one layer.