US2005042383A1PendingUtilityA1
Colloidal seed formation for printed circuit board metallization
Est. expirySep 24, 2022(expired)· nominal 20-yr term from priority
Inventors:Raymond T. GalascoRoy H. MagnusonVoya R. MarkovichThomas E. MillerAnita SargentWilliam E. Wilson
C23C 18/28H05K 3/181
50
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Claims
Abstract
A colloidal metal seed formulation useful for catalytically activating a surface of a non-conductive dielectric substrate in an electroless plating process is provided. The colloidal metal seed formulation includes stannous chloride, palladium chloride, HCl and a surfactant selected from a diphenyloxide disulfonic acid or alkali or alkaline earth metal salt thereof, C 30 H 50 O 10 , an alcohol alkoxylate and mixtures thereof. A method of electroless plating of a conductive metal onto a non-conductive dielectric substrate using the colloidal metal seed formulation is also provided.
Claims
exact text as granted — not AI-modified1 - 10 . (Cancelled)
11 . A method of electroless plating of a conductive metal onto a surface of a non-conductive dielectric substrate, said method comprising the steps of:
laminating a roughened metal sheet to at least one surface of a non-conductive dielectric substrate; etching away all of the roughened metal sheet; contacting the etched surface with an acidic solution containing at least two available ionic moieties to provide a conditioned surface; contacting the conditioned surface with a colloidal metal seed formulation so as to provide an activated surface, said colloidal metal seed formulation comprising stannous chloride, palladium chloride, HCl and a surfactant comprising a diphenyloxide disulfonic acid or an alkali or alkaline metal salt thereof, C 30 H 50 O 10 , an alcohol alkoxylate or mixtures thereof; and plating a conductive metal onto said activated surface
12 . The method of claim 11 wherein said non-conductive dielectric substrate comprises vias or plated-through holes that have a diameter of about 300 μm or less.
13 . The method of claim 11 wherein, following contact, but prior to plating, the activated surface is subjected to the steps of: rinsing the activated surface with deionized water; bringing the rinsed surface into contact with HCl, drying the substrate at a temperature between 60° C. and 100° C.; applying a photoresist layer to the cleaned, activated surface; exposing the photoresist layer to a pattern of radiation; and developing the photoresist layer using a conventional resist developer.
14 . The method of claim 11 wherein said conductive metal is copper (Cu), tungsten (W), nickel (Ni), cobalt (Co), cobalt tungsten (CoW), or cobalt tungsten phosphorus (CoWP).
15 . The method of claim 11 wherein said surfactant is a diphenyloxide disulfonic acid or an alkali metal salt thereof.
16 . The method of claim 15 wherein said diphenyloxide disulfonic acid is a compound having the formula:
wherein at least one of R 1 , R 2 , R 3 and R 4 on each phenyl ring is SO 3 and the remaining R groups on each phenyl ring, independently, are hydrogen, a linear or branched alkyl containing from 1 to about 22 C atoms, a linear or branched alkylene containing from 2 to about 22 C atoms, an alkynyl containing 2 to 22 C atoms, hydroxy, or alkoxy containing from 1 to 22 carbon atoms, or two adjacent remaining R groups taken together form an alicyclic ring containing from 5 to 6 carbon atoms which may optionally include a heteroatom such as N, S or P.
17 . The method of claim 15 wherein said alkali metal salt of said diphenyloxide disulfonic acids includes an alkali metal which provides a net zero charge to the compound.
18 . The method of claim 11 wherein said surfactant is C 30 H 50 O 10 .
19 . The method of claim 11 wherein said surfactant is an alcohol alkoxylate.
20 . The method of claim 19 wherein said alcohol alkoxylate has the formula R—O—(CH 2 CH 2 O) n (CH 2 CHCH 3 O) n CH 2 CH 2 OH wherein R is hydrogen, a linear or branched alkyl containing from 1 to about 22 C atoms, a linear or branched alkylene containing from 2 to about 22 C atoms or an alkynyl containing 2 to 22 C atoms, and n is from 1 to 50.Cited by (0)
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