Transport apparatus and vacuum processing system using the same

Abstract

This invention provides a transport apparatus having a simple configuration that can reduce its turning radius and transport semiconductor devices at high speed. The transport apparatus comprising the first and second arms having at a first end of each thereof a rotary drive shaft being arranged coaxially, and third and fourth arms rotatably linked at respective the first ends thereof to the respective second ends of the first and second arms. The second ends of the third and fourth arms are supported around centers of coaxially arranged spindles, respectively. The transport apparatus further comprises an articulating mechanism having an attitude control mechanism adapted to apply rotary forces with opposite phases to the respective spindles arranged at the third and fourth arms.

1 - 10 . (canceled)  
   
   
       11 : A transport apparatus for transporting substrates, the apparatus comprising: 
 a first link mechanism formed by a pair of drive arms having respective drive shafts arranged at respective first ends thereof, the drive shafts being arranged coaxially and rotatable in opposite senses, and a pair of driven arms rotatably coupled to respective second ends of the paired drive arms;    an attitude control mechanism having a rotary member rotatable relative to spindles coaxially supporting the respective second ends of the paired driven arms and adapted to transmit rotary motions of the paired driven arms to the rotary member at a same rate in opposite senses; and    a dead point escape mechanism having a second link mechanism formed by a link member of a predetermined length and a pair of arm sections rotatably coupled to the opposite ends of the link member, one of the arm sections being connected to the drive shaft with a predetermined angle of inclination relative to the paired drive arms.    
   
   
       12 : The transport apparatus according to  claim 11 , wherein the paired drive arms and the paired driven arms of the first link mechanism show a same and identical inter-joint distance and a link member of the second link mechanism has an inter-joint distance same as an inter-joint distance of the first link mechanism and is arranged in parallel with one of the paired drive arms.  
   
   
       13 : The transport apparatus according to  claim 11 , wherein the second link mechanism includes either one of the paired drive arm and either one of the paired driven arms.  
   
   
       14 : The transport apparatus according to  claim 11 , wherein the arm sections of the second link mechanism have a length ratio between ⅕ and ⅓ to a paired drive arms of the first link mechanism and an angle of inclination between 20° and 40°.  
   
   
       15 : The transport apparatus according to  claim 11 , further comprising: a holder for holding the substrates, the holder having a plurality of holding sections; the rotary member of the attitude control mechanism being located at a position separated from the holding sections by a same distance.  
   
   
       16 . (canceled)  
   
   
       17 : A vacuum processing system comprising: 
 a vacuum processing chamber; and    a transport apparatus for conveying substrates in a vacuum processing chamber;    the transport apparatus comprising:    a first link mechanism formed by a pair of drive arms having respective drive shafts arranged at respective first ends thereof, the drive shafts being arranged coaxially and rotatable in opposite senses, and a pair of driven arms rotatably coupled to respective second ends of the paired drive arms;    an attitude control mechanism having a rotary member rotatable relative to spindles coaxially supporting the respective second ends of the paired driven arms and adapted to transmit rotary motions of the paired driven arms to the rotary member at a same rate in opposite senses; and    a dead point escape mechanism having a second link mechanism formed by a link member of a predetermined length and a pair of arm sections rotatably coupled to the opposite ends of the link member, one of the arm sections being fixed to the drive shaft with a predetermined angle of inclination relative to the paired drive arms.