US2005117210A1PendingUtilityA1

Method for adjusting a lamp relative to an illuminating beam path of a microscope and a microscope suitable for carrying out the method

Assignee: ZEISS CARL SEMICONDUCTOR MFGPriority: Mar 3, 2001Filed: Jan 4, 2005Published: Jun 2, 2005
Est. expiryMar 3, 2021(expired)· nominal 20-yr term from priority
Inventors:Peter Ott
G02B 21/082G02B 21/06
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Claims

Abstract

The invention relates to a method for automatic lamp adjustment in a microscope without beam homogenizers in the illuminating beam path and a microscope equipped for the application of the method. According to the invention, the light power in the illuminating beam path is integrally measured with a detector behind the pupil plane of the microscope objective or behind the pupil plane of the illuminating beam path and the lamp is so adjusted relative to the illuminating beam path that the light power, which is detected by the detector, is a maximum. In a microscope, which is suitable for an automated lamp adjustment, for example, after an exchange of the lamp according to the method of the invention, motorized drives are provided for adjusting the lamp. These drives are driven sequentially by an evaluation and control computer until a maximum light power is detected with a detector.

Claims

exact text as granted — not AI-modified
1 - 16 . (canceled)  
   
   
       17 . A microscope comprising: 
 a light unit for supplying a light for transmission along an illuminating beam path devoid of a beam homogenizer;    motor drives for adjusting said light unit relative to said illuminating beam path;    a microscope objective defining a pupil plane;    a four-quadrant detector mounted downstream of said pupil plane for detecting the light power of the transmitted light;    an evaluation and control computer connected to said detector and functioning to sequentially drive said motor drives until a maximum of an integral light power is measured with said detector; and,    a specimen table and said four-quadrant detector being integrated into said specimen table.    
   
   
       18 . The microscope of  claim 17 , wherein said microscope defines an optical axis along said beam path; and, said microscope further comprises: a collector optic mounted in said illuminating beam path downstream of said lamp unit; and, an additional motor drive for displacing said collector optic along said optical axis.  
   
   
       19 . The microscope of  claim 18 , wherein said evaluation and control computer further functions to apply a gradient method for locating said maximum of said light power by carrying out the following steps: 
 beginning from a start position and determining the maximum gradient of the light power in dependence upon a position change of at least one of said lamp unit and said collector optic; and,    displacing at least one of said lamp unit and said collector optic in a direction of the maximum gradient of the integral light power.

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