Modular injector and exhaust assembly

Abstract

An injector and exhaust assembly for providing delivery of gas to a substrate is provided. The injector and exhaust assembly comprises at least two injectors positioned adjacent each other and spaced apart to form at least one exhaust channel therebetween, and a mounting plate for securing the at least two injectors, wherein each of the at least two injectors being individually mounted to or removed from the mounting plate, and the mounting plate being provided with at least one exhaust slot in fluid communication with the at least one exhaust channel. An exhaust assembly is coupled to the mounting plate to remove exhaust gases from the injectors.

1 . An injector assembly for delivering gas to a substrate, comprising: 
 at least two injectors positioned adjacent each other and spaced apart to form at least one exhaust channel therebetween; and    a mounting plate for securing the at least two injectors, wherein each of the at least two injectors being individually mountable to or removable from the mounting plate, and the mounting plate being provided with at least one exhaust slot in fluid communication with the at least one exhaust channel.    
   
   
       2 . The injector assembly of  claim 1  wherein said injectors are of same type.  
   
   
       3 . The injector assembly of  claim 1  wherein said injectors are of different type.  
   
   
       4 . The injector assembly of  claim 1  wherein said injectors further comprises: 
 a single elongated member having end surfaces, and an elongated external gas delivery surface, said gas delivery surface extending along the length of the member directly facing the substrate;    at least one elongated passage formed in said elongated member and extending between the end surfaces for receiving a gas; and    at least one thin, elongated distribution slot formed in said single elongated member and extending between said elongated passage and the gas delivery surface for delivering a gas along the gas delivery surface.    
   
   
       5 . The injector assembly of  claim 5  where said gas delivery surface includes a center recessed region.