Assignee
AVIZA TECH INC
US·18 granted patents·12 pending applications·1,154 citations·filing 2001–2007
Top patents by PatentIndex Score
30 records- 0198US6713846B1Multilayer high κ dielectric filmsAVIZA TECH INC·Filed 2002·Granted Mar 30, 2004·230 cites·13 claims
- 0296US7205247B2Atomic layer deposition of hafnium-based high-k dielectricAVIZA TECH INC·Filed 2004·Granted Apr 17, 2007·563 cites·13 claims
- 0392US6921437B1Gas distribution systemAVIZA TECH INC·Filed 2004·Granted Jul 26, 2005·61 cites·21 claims
- 0492US6890386B2Modular injector and exhaust assemblyAVIZA TECH INC·Filed 2002·Granted May 10, 2005·61 cites·11 claims
- 0588US6846149B2Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer systemAVIZA TECH INC·Filed 2001·Granted Jan 25, 2005·56 cites·6 claims
- 0685US6798529B2In-situ method and apparatus for end point detection in chemical mechanical polishingAVIZA TECH INC·Filed 2001·Granted Sep 28, 2004·35 cites·27 claims
- 0780US6900413B2Hot wall rapid thermal processorAVIZA TECH INC·Filed 2002·Granted May 31, 2005·26 cites·10 claims
- 0876US7335569B2In-situ formation of metal insulator metal capacitorsAVIZA TECH INC·Filed 2003·Granted Feb 26, 2008·15 cites·16 claims
- 0972US6901317B2Inertial temperature control system and methodAVIZA TECH INC·Filed 2002·Granted May 31, 2005·18 cites·26 claims
- 1071US6761770B2Atmospheric pressure wafer processing reactor having an internal pressure control system and methodAVIZA TECH INC·Filed 2002·Granted Jul 13, 2004·18 cites·32 claims
- 1168US7470470B2System and method for forming multi-component dielectric filmsAVIZA TECH INC·Filed 2004·Granted Dec 30, 2008·12 cites·4 claims
- 1268US7153580B2Low κ dielectric inorganic/organic hybrid films and method of makingAVIZA TECH INC·Filed 2003·Granted Dec 26, 2006·8 cites·10 claims
- 1366US6874770B2High flow rate bubbler system and methodAVIZA TECH INC·Filed 2002·Granted Apr 5, 2005·14 cites·19 claims
- 1466US6844528B2Hot wall rapid thermal processorAVIZA TECH INC·Filed 2002·Granted Jan 18, 2005·9 cites·17 claims
- 1563US7029381B2Apparatus and method for chemical mechanical polishing of substratesAVIZA TECH INC·Filed 2001·Granted Apr 18, 2006·10 cites·16 claims
- 1655US6933011B2Two-step atomic layer deposition of copper layersAVIZA TECH INC·Filed 2003·Granted Aug 23, 2005·4 cites·17 claims
- 1755US2005217580A1Gas distribution systemAVIZA TECH INC·Filed 2005·Application pending·0 cites
- 1854US2005183825A1Modular injector and exhaust assemblyAVIZA TECH INC·Filed 2005·Application pending·0 cites
- 1952US6864466B2System and method to control radial delta temperatureAVIZA TECH INC·Filed 2002·Granted Mar 8, 2005·5 cites·8 claims
- 2049US2007194470A1Direct liquid injector deviceAVIZA TECH INC·Filed 2007·Application pending·0 cites
- 2148US7109131B2System and method for hydrogen-rich selective oxidationAVIZA TECH INC·Filed 2003·Granted Sep 19, 2006·9 cites·10 claims
- 2248US2005255243A1System and method for forming multi-component dielectric filmsAVIZA TECH INC·Filed 2005·Application pending·0 cites
- 2344US2005233156A1System and method for forming multi-component dielectric filmsAVIZA TECH INC·Filed 2005·Application pending·0 cites
- 2444US2007137794A1Thermal processing system with across-flow linerAVIZA TECH INC·Filed 2007·Application pending·0 cites
- 2543US2008000424A1Showerhead for a Gas Supply ApparatusAVIZA TECH INC·Filed 2006·Application pending·0 cites
- 2642US2006264066A1Multilayer multicomponent high-k films and methods for depositing the sameAVIZA TECH INC·Filed 2006·Application pending·0 cites
- 2742US2010117203A1Oxide-containing film formed from siliconAVIZA TECH INC·Filed 2007·Application pending·0 cites
- 2840US2007010072A1Uniform batch film deposition process and films so producedAVIZA TECH INC·Filed 2006·Application pending·0 cites
- 2936US2006178019A1Low temperature deposition of silicon oxides and oxynitridesAVIZA TECH INC·Filed 2003·Application pending·0 cites
- 3035US2008079220A1Rotary seal for diffusion furnance incorporating nonmetallic sealsAVIZA TECH INC·Filed 2006·Application pending·0 cites
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