Charged particle beam apparatus

Abstract

The object of the present invention is to transmit the position information of a defect that has been specified by means of a circuit pattern inspection apparatus quickly and precisely so that the position information is efficiently used in another apparatus. Marking is carried out on the peripheral area of the defect by use of a charged particle beam irradiation mechanism of the inspection apparatus. The marking realizes sharing of the defect position information with another apparatus. The marking technique includes deposition of a deposit and charging up by means of irradiation of a charged particle beam. The marking in the inspection apparatus allows the defect position information to be transmitted to another apparatus more correctly and easily, and as a result, analysis accuracy is improved and analysis time is shortened.

1 - 9 . (canceled)  
   
   
       10 . A charged particle beam apparatus comprising: 
 a charged particle source;    a scanning deflector for scanning a sample with a charged particle beam emitted by said charged particle source;    an image shift deflector and/or a sample stage for changing the position of scanning of said sample by said scanning deflector; and    a sample image display device for forming an image based on detection of charged particles emitted by said sample, said apparatus further comprising: 
 a first device for controlling the scanning performed by said charged particle beam such that, based on information regarding the position of a defect obtained by inspecting said sample on another inspection apparatus, the scanning range of said charged particle beam covers the place near the defect or the defect itself; and  
 a second device for controlling said image shift deflector and/or said sample stage such that the scanned position is moved on the basis of a charge mark or a carbon deposit, which is formed on said sample in said another inspection apparatus.  
   
   
   
       11 . The charged particle beam apparatus according to claim  1 , further comprising a detector for detecting said charged particles, and an energy filter for discriminating electrons emitted by said sample based on their energy, wherein said energy filter is disposed between said detector and said sample.