Ultrasonic cleaning apparatus

Abstract

An ultrasonic cleaning apparatus which cleans a material at a surface by supplying an ultrasonic wave from an ultrasonic wave application head to a cleaning liquid on the surface, and cleans the surface, wherein the ultrasonic wave application head has an ultrasonic wave transmission member which is provided opposite the surface, and has a curved portion on a first plane placed close to the surface, an ultrasonic transducer which is provided on a second plane placed opposite the first plane of the ultrasonic wave transmission member, and generates and applies an ultrasonic wave to a cleaning liquid on the surface through the ultrasonic wave transmission member, and a preventive portion which is provided in the ultrasonic wave transmission member, and prevents the ultrasonic wave applied to the cleaning liquid and reflected on the surface from entering the ultrasonic transducer through the ultrasonic wave transmission member.

1 . An ultrasonic cleaning apparatus comprising an ultrasonic wave application head which cleans a material at a surface by applying an ultrasonic wave to a cleaning liquid supplied to the surface, the ultrasonic wave application head comprising: 
 an ultrasonic wave transmission member which is placed opposite to the surface and has a curved portion on a first plane placed close to the surface;    an ultrasonic transducer which is provided on a second plane opposite to the first plane of the ultrasonic transmission member, and generates and applies an ultrasonic wave to the cleaning liquid on the surface through the ultrasonic wave transmission member; and    a preventive portion which is provided in the ultrasonic wave transmission member and prevents the ultrasonic wave applied to the cleaning liquid and reflected on the surface from entering the ultrasonic transducer through the ultrasonic wave transmission member.    
   
   
       2 . An ultrasonic cleaning apparatus comprising an ultrasonic wave application head which cleans a material at a surface by applying an ultrasonic wave to a cleaning liquid supplied to the surface, the ultrasonic wave application head comprising: 
 an ultrasonic wave transmission member which is placed opposite to the surface and has a curved portion on a first plane placed close to the surface;    an ultrasonic transducer which is provided on a second plane opposite to the first plane of the ultrasonic transmission member, and generates and applies an ultrasonic wave to the cleaning liquid on the surface through the first plane of the ultrasonic wave transmission member; and    a preventive portion which is provided in the ultrasonic wave transmission member, and prevents the ultrasonic wave generated by the ultrasonic transducer from exiting to the cleaning liquid on the surface at a substantially right angle to the surface.    
   
   
       3 . An ultrasonic cleaning apparatus comprising an ultrasonic wave application head which cleans a material at a surface by applying an ultrasonic wave to a cleaning liquid supplied to the surface, the ultrasonic wave application head comprising: 
 a cylindrical ultrasonic wave transmission member with a first plane facing the surface; and    an ultrasonic transducer which is provided on a second plane opposite to the first plane of the ultrasonic wave transmission member, and applies an ultrasonic wave to the cleaning liquid on the surface through the ultrasonic wave transmission member;    wherein a portion of the first plane of the ultrasonic wave transmission member closest to the surface is circular surrounding a axial line of the ultrasonic wave transmission member.    
   
   
       4 . An ultrasonic cleaning apparatus comprising an ultrasonic wave application head which cleans a material at a surface by applying an ultrasonic wave to a cleaning liquid supplied to the surface, the ultrasonic wave application head comprising: 
 a bar-shaped ultrasonic wave transmission member which is placed with an axial line parallel to the surface and a first plane facing the surface; and    an ultrasonic transducer which is provided on a second plane opposite to the first plane of the ultrasonic transmission member, and generates and applies an ultrasonic wave to a cleaning liquid on the surface through the ultrasonic wave transmission member;    wherein a portion of the first plane of the ultrasonic wave transmission member closest to the surface is formed as two linear lines which are located on both sides of a axial line of the ultrasonic wave transmission member respectively.    
   
   
       5 . The ultrasonic cleaning apparatus according to  claim 1 , wherein the ultrasonic wave transmission member is a cylindrical member placed substantially perpendicular to the surface.  
   
   
       6 . The ultrasonic cleaning apparatus according to  claim 1 , wherein the ultrasonic wave transmission member is a bar-shaped member placed substantially parallel to the surface.  
   
   
       7 . The ultrasonic cleaning apparatus according to  claim 1 , wherein the preventive portion is a notch formed on a first plane of the ultrasonic wave transmission member, and the notch is formed by oblique planes inclined to the surface.  
   
   
       8 . The ultrasonic cleaning apparatus according to  claim 1 , wherein the preventive portion is provided inside the ultrasonic wave transmission member.  
   
   
       9 . The ultrasonic cleaning apparatus according to  claim 2 , wherein the ultrasonic wave transmission member is a cylindrical member placed substantially perpendicular to the surface.  
   
   
       10 . The ultrasonic cleaning apparatus according to  claim 2 , wherein the ultrasonic wave transmission member is a bar-shaped member placed substantially parallel to the surface.  
   
   
       11 . The ultrasonic cleaning apparatus according to  claim 2 , wherein the preventive portion is a notch formed on a first plane of the ultrasonic wave transmission member, and the notch is formed by oblique planes inclined to the surface.  
   
   
       12 . The ultrasonic cleaning apparatus according to  claim 2 , wherein the preventive portion is provided inside the ultrasonic wave transmission member.  
   
   
       13 . The ultrasonic cleaning apparatus according to  claim 8 , wherein the preventive portion is made of rubber.  
   
   
       14 . The ultrasonic cleaning apparatus according to  claim 12 , wherein the preventive portion is made of rubber.  
   
   
       15 . The ultrasonic cleaning apparatus according to  claim 8 , wherein the preventive portion is hollow.  
   
   
       16 . The ultrasonic cleaning apparatus according to  claim 12 , wherein the preventive portion is hollow.