Wet abatemenbt system for waste SiH4

Abstract

A new method of silane abatement is achieved. The novel silane abatement system comprises a water-filled chamber within an outer chamber. An air intake is located in one upper portion of said outer chamber and an exhaust output is located in another upper portion of the outer chamber. A silane gas intake pipe runs into the outer chamber and has its output under water in the water-filled chamber. A drain is connected through a valve at a bottom portion of the water-filled chamber. Many safety features are built into the wet abatement system, including temperature and water level sensors, water sprinklers, and means for shutting off air supply, exhaust, and silane intake. Waste silane gas is bubbled into a water-filled chamber. The waste silane gas is reacted with oxygen in water in the water-filled chamber whereby SiO 2 precipitates are formed and wherein the SiO 2 precipitates settle to a bottom surface of the water-filled chamber. The SiO 2 precipitates are drained out of the water-filled chamber to complete the abatement process.

1 . A silane abatement system comprising: 
 a water-filled chamber within an outer chamber;    an air intake in one upper portion of said outer chamber;    an exhaust output in another upper portion of said outer chamber;    a silane gas intake pipe running into said outer chamber and having its output under water in said water-filled chamber; and    a drain connected through a valve at a bottom portion of said water-filled chamber.    
     
     
         2 . The silane abatement system according to  claim 1  wherein said output of said silane gas intake pipe is into a C-shaped stainless steel pipe having upwardly opening flippers whereby silane gas is released into water within said water-filled chamber.  
     
     
         3 . The silane abatement system according to  claim 1  wherein said air intake and said exhaust output both comprise inwardly opening flippers.  
     
     
         4 . The silane abatement system according to  claim 1  further comprising an overflow drain at a bottom portion of said outer chamber.  
     
     
         5 . The silane abatement system according to  claim 1  further comprising: 
 a water supply pipe connected to said water-filled chamber;    a water level sensor connected to said water-filled chamber; and    a water temperature sensor connected to said water-filled chamber.    
     
     
         6 . The silane abatement system according to  claim 5  further comprising a controller that controls said water supply and monitors said water level sensor and said water temperature sensor.  
     
     
         7 . The silane abatement system according to  claim 6  wherein in the event that said controller detects an unacceptable condition from either of said water level sensor or said water temperature sensor, said air intake and said exhaust output are closed, and residue waste silane gas within said silane gas intake pipe is pumped into said water-filled chamber.  
     
     
         8 . The silane abatement system according to  claim 1  further comprising: 
 an exhaust pipe exiting said outer chamber through said exhaust output;    an exhaust temperature sensor connected to said exhaust pipe; and    a fusible link within said exhaust pipe.    
     
     
         9 . The silane abatement system according to  claim 8  wherein in the event that an unacceptable condition is detected in either of said exhaust temperature sensor or said fusible link, said air intake and said exhaust output are closed, and residue waste silane gas within said silane gas intake pipe is pumped into said water-filled chamber.  
     
     
         10 . The silane abatement system according to  claim 1  further comprising a high pressure pump connected to said silane gas intake pipe.  
     
     
         11 . The silane abatement system according to  claim 10  wherein said high pressure pump provides N 2  gas for pushing silane gas through said gas intake pipe into said water-filled chamber.  
     
     
         12 . The silane abatement system according to  claim 1  further comprising a fusible link within said high pressure pump.  
     
     
         13 . The silane abatement system according to  claim 1  further comprising water sprinklers on an upper portion of said outer chamber and over said water-filled chamber.  
     
     
         14 . The silane abatement system according to  claim 1  further comprising water sprinklers on surfaces of said exhaust pipe.  
     
     
         15 . The silane abatement system according to  claim 1  wherein waste silane gas is abated by: 
 bubbling silane gas through said silane gas intake pipe and into said water-filled chamber;    reacting said silane gas with oxygen dissolved in water in said water-filled chamber whereby SiO 2  precipitates are formed and wherein said SiO 2  precipitates settle to a bottom surface of said water-filled chamber; and    opening said valve to drain said SiO 2  precipitates out of said water-filled chamber through said drain.    
     
     
         16 - 17 . (canceled)  
     
     
         18 . A silane abatement system comprising: 
 a water-filled chamber within an outer chamber;    an air intake in one upper portion of said outer chamber;    an exhaust output in another upper portion of said outer chamber connecting to an exhaust pipe;    water sprinklers on an upper portion of said outer chamber and over said water-filled chamber and on surfaces of said exhaust pipe;    a silane gas intake pipe running into said outer chamber and having its output under water in said water-filled chamber; and    a drain connected through a valve at a bottom portion of said water-filled chamber.    
     
     
         19 . The silane abatement system according to  claim 18  wherein said output of said silane gas intake pipe is into a C-shaped stainless steel pipe having upwardly opening flippers whereby silane gas is released into water within said water-filled chamber.  
     
     
         20 . The silane abatement system according to  claim 18  wherein said air intake and said exhaust output both comprise inwardly opening flippers.  
     
     
         21 . The silane abatement system according to  claim 18  further comprising an overflow drain at a bottom portion of said outer chamber.  
     
     
         22 . The silane abatement system according to  claim 18  further comprising: 
 a water supply pipe connected to said water-filled chamber;    a water level sensor connected to said water-filled chamber;    a water temperature sensor connected to said water-filled chamber;    an exhaust temperature sensor connected to said exhaust pipe;    a fusible link within said exhaust pipe; and    a controller that controls said water supply and monitors said water level sensor, said water temperature sensor, said exhaust temperature sensor, and said fusible link.    
     
     
         23 . The silane abatement system according to  claim 18  further comprising a high pressure pump connected to said silane gas intake pipe having a fusible link within said high pressure pump.  
     
     
         24 . The silane abatement system according to  claim 18  wherein waste silane gas is abated by: 
 bubbling silane gas through said silane gas intake pipe and into said water-filled chamber;    reacting said silane gas with oxygen in water in said water-filled chamber whereby SiO 2  precipitates are formed and wherein said SiO 2  precipitates settle to a bottom surface of said water-filled chamber; and    opening said valve to drain said SiO 2  precipitates out of said water-filled chamber through said drain.    
     
     
         25 . The silane abatement system according to  claim 22  wherein in the event that said controller detects an unacceptable condition from any of said water level sensor, said water temperature sensor, said exhaust temperature sensor, or said fusible link, said water sprinklers are triggered, said air intake and exhaust flippers are closed, and residue waste silane gas within said silane gas intake pipe is pumped into said water-filled chamber.  
     
     
         26 . A silane abatement system comprising: 
 a water-filled chamber within an outer chamber;    an air intake in one upper portion of said outer chamber; and    a silane gas intake pipe running into said outer chamber and having its output under water in said water-filled chamber.    
     
     
         27 . The silane abatement system according to  claim 26  wherein waste silane gas is abated by: 
 flowing N 2  gas at high pressure to push waste silane gas through said silane gas intake pipe into said water-filled chamber;    reacting said silane gas with oxygen dissolved in water in said water-filled chamber whereby SiO 2  precipitates are formed and wherein said SiO 2  precipitates settle to a bottom surface of said water-filled chamber; and    draining said SiO 2  precipitates out of said water-filled chamber. surface of said water-filled chamber; and    draining said SiO 2  precipitates out of said water-filled chamber.