Method of manufacturing semiconductor device

Abstract

Disclosed is a method for manufacturing a semiconductor device comprising forming a hydrophobic interlayer insulating film having a relative dielectric constant of 3.5 or less above a semiconductor substrate, forming a recess in the interlayer insulating film, depositing a conductive material above the interlayer insulating film having the recess to form a conductive layer, selectively removing the conductive material deposited above the interlayer insulating film by polishing to expose a surface of the interlayer insulating film while leaving the conductive material in the recess, and subjecting the surface of the interlayer insulating film having the recess filled with the conductive material to pressure washing using a resin member and an alkaline washing liquid containing an inorganic alkali and exhibiting a pH of more than 9.

1 . A method for manufacturing a semiconductor device comprising: 
 forming a hydrophobic interlayer insulating film having a relative dielectric constant of 3.5 or less above a semiconductor substrate;    forming a recess in the interlayer insulating film;    depositing a conductive material above the interlayer insulating film having the recess to form a conductive layer;    selectively removing the conductive material deposited above the interlayer insulating film by polishing to expose a surface of the interlayer insulating film while leaving the conductive material in the recess; and    subjecting the surface of the interlayer insulating film having the recess filled with the conductive material to pressure washing using a resin member and an alkaline washing liquid containing an inorganic alkali and exhibiting a pH of more than 9.    
     
     
         2 . The method according to  claim 1 , wherein an aqueous solution having a pH of more than 9 and less than 14 is employed as the alkaline washing liquid.  
     
     
         3 . The method according to  claim 1 , wherein the pressure washing is performed by press-contacting the interlayer insulating film having the conductive material buried therein with the resin member at a pressure ranging from 20 to 250 gf/cm 2 .  
     
     
         4 . The method according to  claim 1 , wherein the resin member comprises polyurethane or polypropylene.  
     
     
         5 . The method according to  claim 1 , wherein the alkaline washing liquid further comprises an organic acid.  
     
     
         6 . The method according to  claim 1 , wherein the alkaline washing liquid further comprises a nonionic surfactant.  
     
     
         7 . A method for manufacturing a semiconductor device comprising: 
 forming a hydrophobic interlayer insulating film having a relative dielectric constant of 3.5 or less above a semiconductor substrate;    forming a recess in the interlayer insulating film;    depositing a conductive material above the interlayer insulating film having the recess to form a conductive layer;    contacting the semiconductor substrate having the conductive layer formed thereabove with a polishing pad, thereby selectively removing the conductive material deposited above the interlayer insulating film by polishing, thus exposing a surface of the interlayer insulating film while leaving the conductive material in the recess; and    slide-contacting the surface of the interlayer insulating film having the recess filled with the conductive material with the polishing pad while pressing the semiconductor substrate against the polishing pad and feeding an alkaline solution containing an inorganic alkali and exhibiting a pH of more than 9 to the polishing pad.    
     
     
         8 . The method according to  claim 7 , wherein an aqueous solution having a pH of more than 9 and less than 14 is employed as the alkaline solution.  
     
     
         9 . The method according to  claim 7 , wherein the inorganic alkali comprises at least one selected from the group consisting of potassium hydroxide, calcium hydroxide, magnesium hydroxide and sodium hydroxide.  
     
     
         10 . The method according to  claim 7 , wherein the inorganic alkali is included in the alkaline solution at a concentration ranging from 0.05 wt % to 5 wt %.  
     
     
         11 . The method according to  claim 7 , wherein the semiconductor substrate is pressed against the polishing pad at a pressure ranging from 20 to 250 gf/cm 2 .  
     
     
         12 . The method according to  claim 7 , wherein the alkaline solution further comprises an organic acid.  
     
     
         13 . The method according to  claim 12 , wherein the organic acid is selected from the group consisting of oxalic acid, citric acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, maleic acid, fumaric acid, phthalic acid, malic acid, tartaric acid, and quinaldinic acid.  
     
     
         14 . The method according to  claim 7 , further comprising, after slide-contacting the surface of the interlayer insulating film with the polishing pad, subjecting the interlayer insulating film to pressure washing by using a roll having at least resinous surface while feeding an alkaline washing liquid containing an inorganic alkali and exhibiting a pH of more than 9 to the surface of the interlayer insulating film.  
     
     
         15 . A method for manufacturing a semiconductor device comprising: 
 forming a hydrophobic interlayer insulating film having a relative dielectric constant of 3.5 or less above a semiconductor substrate;    forming a recess in the interlayer insulating film;    depositing a conductive material above the interlayer insulating film having the recess to form a conductive layer;    contacting the semiconductor substrate having the conductive layer formed thereabove with a polishing pad, thereby selectively removing the conductive material deposited above the interlayer insulating film by polishing, thus exposing a surface of the interlayer insulating film while leaving the conductive material in the recess; and    subjecting the surface of the interlayer insulating film having the recess filled with the conductive material to pressure washing using a roll having at least resinous surface and an alkaline washing liquid containing an inorganic alkali and exhibiting a pH of more than 9.    
     
     
         16 . The method according to  claim 15 , wherein an aqueous solution having a pH of more than 9 and less than 14 is employed as the alkaline washing liquid.  
     
     
         17 . The method according to  claim 15 , wherein the inorganic alkali comprises at least one selected from the group consisting of potassium hydroxide, calcium hydroxide, magnesium hydroxide and sodium hydroxide.  
     
     
         18 . The method according to  claim 15 , wherein the inorganic alkali is included in the alkaline washing liquid at a concentration ranging from 0.05 to 5 wt %.  
     
     
         19 . The method according to  claim 15 , wherein the alkaline washing liquid further comprises an organic acid.  
     
     
         20 . The method according to  claim 19 , wherein the organic acid is selected from the group consisting of oxalic acid, citric acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, maleic acid, fumaric acid, phthalic acid, malic acid, tartaric acid, and quinaldinic acid.