US2006078457A1PendingUtilityA1
Low oxygen content alloy compositions
Est. expiryOct 12, 2024(expired)· nominal 20-yr term from priority
C22C 38/00C22C 18/00C22C 22/00C22C 28/00C22C 5/04C22C 19/005C22C 30/00C22C 19/07C23C 14/3414
45
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Claims
Abstract
Alloy compositions include Mn alloys that combine Mn with one element selected from Ga, In, Ni and Zn. Also included are Fe alloys and Co alloys in which Fe or Co are combined with either Pt or Pd. The alloy compositions form ordered compounds having L1 0 or L1 2 type crystalline structures within specified compositional ranges. In addition, the alloy compositions have low levels of impurities, such as oxygen and sulfur, which provide better performance in magnetic memory applications. The alloy compositions preferably are formed into sputtering targets used for thin film applications.
Claims
exact text as granted — not AI-modified1 - 44 . (canceled)
45 . A Mn alloy composition having an L1 0 or an L1 2 crystalline structure and containing 500 ppm or less O and 100 ppm or less S.
46 . The Mn alloy composition according to claim 45 , wherein the alloy composition contains 100 ppm or less O and 50 ppm or less S.
47 . The Mn alloy composition according to claim 45 , wherein the alloy composition comprises 50-30 at. % Mn and 50-70 at. % Ga.
48 . The Mn alloy composition according to claim 45 , wherein the alloy composition comprises 45-37 at. % Mn and 55-63 at. % Ga.
49 . The Mn alloy composition according to claim 45 , wherein the alloy composition comprises 50-15 at. % Mn and 50-85 at. % In.
50 . The Mn alloy composition according to claim 45 , wherein the alloy composition comprises 25 at. % Mn and 75 at. % In.
51 . The Mn alloy composition according to claim 45 , wherein the alloy composition comprises 56-40 at. % Mn and 44-60 at. % Ni.
52 . The Mn alloy composition according to claim 45 , wherein the alloy composition comprises 53-44.5 at. % Mn and 47-55.5 at. % Ni.
53 . The Mn alloy composition according to claim 45 , wherein the alloy composition comprises 90-70 at. % Ni and 10-30 at. % Mn.
54 . The Mn alloy composition according to claim 45 , wherein the alloy composition comprises 85-71 at. % Ni and 15-29 at. % Mn.
55 . The Mn alloy composition according to claim 45 , wherein the alloy composition comprises 80-60 at. % Zn and 20-40 at. % Mn.
56 . The Mn alloy composition according to claim 45 , wherein the alloy composition comprises 75-69 at. % Zn and 25-31 at. % Mn.
57 . The Mn alloy composition according to claim 45 , wherein the alloy composition comprises 75-70 at. % Zn and 25-30 at. % Mn.
58 . An Fe alloy composition having an L1 0 or an L1 2 crystalline structure and containing 500 ppm or less O and 100 ppm or less S.
59 . The Fe alloy composition according to claim 58 , wherein the alloy composition contains 100 ppm or less O and 50 ppm or less S.
60 . The Fe alloy composition according to claim 58 , wherein the alloy composition comprises 84-65 at. % Fe and 16-35 at. % Pt.
61 . The Fe alloy composition according to claim 58 , wherein the alloy composition comprises 84-67 at. % Fe and 16-33 at. % Pt.
62 . The Fe alloy composition according to claim 58 , wherein the alloy composition comprises 65-41 at. % Fe and 35-59 at. % Pt.
63 . The Fe alloy composition according to claim 58 , wherein the alloy composition comprises 65-45 at. % Fe and 35-55 at. % Pt.
64 . The Fe alloy composition according to claim 58 , wherein the alloy composition comprises 43-17 at. % Fe and 57-83 at. % Pt.
65 . The Fe alloy composition according to claim 58 , wherein the alloy composition comprises 43-21 at. % Fe and 57-79 at. % Pt.
66 . The Fe alloy composition according to claim 58 , wherein the alloy composition comprises 70-37 at. % Fe and 30-63 at. % Pd.
67 . The Fe alloy composition according to claim 58 , wherein the alloy composition comprises 51.5-40 at. % Fe and 48.5-60 at. % Pd.
68 . The Fe alloy composition according to claim 58 , wherein the alloy composition comprises 40-12 at. % Fe and 60-88 at. % Pd.
69 . The Fe alloy composition according to claim 58 , wherein the alloy composition comprises 37-14 at. % Fe and 63-86 at. % Pd.
70 . A Co alloy composition having an L1 0 or an L1 2 crystalline structure and containing 500 ppm or less O and 100 ppm or less S.
71 . The Co alloy composition according to claim 70 , wherein the alloy composition contains 100 ppm or less O and 50 ppm or less S.
72 . The Co alloy composition according to claim 70 , wherein the alloy composition comprises 60-24 at. % Co and 40-76 at. % Pt.
73 . The Co alloy composition according to claim 70 , wherein the alloy composition comprises 58-26 at. % Co and 42-74 at. % Pt.
74 . The Co alloy composition according to claim 70 , wherein the alloy composition comprises 25-10 at. % Co and 75-90 at. % Pt.
75 . The Co alloy composition according to claim 70 , wherein the alloy composition comprises 25-12 at. % Co and 75-88 at. % Pt.
76 . The Co alloy composition according to claim 70 , wherein the alloy composition comprises 70-42 at. % Co and 30-58 at. % Pd.
77 . The Co alloy composition according to claim 70 , wherein the alloy composition comprises 52-48 at. % Co and 48-52 at. % Pd.
78 . The Co alloy composition according to claim 70 , wherein the alloy composition comprises 42-6 at. % Co and 58-94 at. % Pd.
79 . The Co alloy composition according to claim 70 , wherein the alloy composition comprises 40-10 at. % Co and 60-90 at. % Pd.
80 . The alloy composition according to any one of claims 45 to 79 , wherein the alloy composition is used to form a sputtering target.Cited by (0)
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