Method of making a perpendicular recording magnetic head pole tip with an etchable adhesion CMP stop layer

Abstract

The method of making a magnetic head assembly includes forming a second pole piece layer that is recessed from a head surface, forming a reactive ion etchable (RIEable) pole tip forming layer on the second pole piece layer, forming an adhesion/stop layer of tantalum (Ta) on the pole tip forming layer, forming a photoresist mask on the adhesion/stop layer with an opening for patterning the adhesion/stop layer and the pole tip forming layer with another opening, reactive ion etching (RIE) through the opening to form the other opening, forming the second pole piece pole tip in the other opening with a top which is above a top of the adhesion/stop layer and chemical mechanical polishing (CMP) the top of the second pole piece pole tip until the CMP contacts the adhesion/stop layer. The invention also includes the magnetic head made by such a process.

1 . A method of making a pole piece pole tip for a perpendicular recording write head, which has a head surface, comprising the steps of: 
 forming a reactive ion etchable (RIEable) pole tip forming layer;    forming a RIEable adhesion/stop layer of tantalum (Ta) on the pole tip forming layer;    the adhesion/stop layer and the pole tip forming layer being commonly RIEable;    forming a photoresist mask on the adhesion/stop layer with an opening for patterning the adhesion/stop layer and the pole tip forming layer with another opening;    reactive ion etching (RIE) through said opening into the adhesion/stop layer and the pole tip forming layer to form said another opening; and    forming the pole piece pole tip in said another opening.    
   
   
       2 . A method as claimed in  claim 1  further comprising: 
 before forming the pole tip forming layer forming a second pole piece layer that is recessed from the head surface;    planarizing the second pole piece layer and a field about the second pole piece layer to form a flat surface; and    said pole tip forming layer being formed on the flat surface.    
   
   
       3 . A method as claimed in  claim 2  wherein the pole tip forming layer is selected from the group consisting of Mo, W, Ta 2 O 3 , SiON X , SiO 2  and Si 3 N 4 .  
   
   
       4 . A method as claimed in  claim 3  wherein after forming the pole piece pole tip a remainder of the pole tip forming layer is removed by RIE.  
   
   
       5 . A method as claimed in  claim 4  wherein the pole piece pole tip is formed by plating.  
   
   
       6 . A method as claimed in  claim 4  wherein the pole piece pole tip is formed by sputtering.  
   
   
       7 . A magnetic head assembly, which has a head surface, comprising: 
 ferromagnetic first and second pole pieces;    a back gap which is recessed from the head surface;    the first and second pole pieces being connected at said back gap;    an insulation stack with a write coil layer embedded therein located between the first and second pole pieces and located between the head surface and said back gap;    the second pole piece having a pole tip which is located at the head surface;    the pole tip being bounded by oppositely facing top and bottom surfaces, oppositely facing front and back surfaces and oppositely facing first and second side surface;    the first and second side surfaces having first and second top side surface portions respectively which are contiguous with said top surface;    first and second adhesion/stop layers having first and second edge surfaces which interface only the first and second top side surface portions; and    the adhesion/stop layer being tantalum (Ta).    
   
   
       8 . A magnetic head assembly as claimed in  claim 7  further comprising: 
 a read head including: 
 ferromagnetic first and second shield layers;  
 a read sensor located between the first and second shield layers; and  
 the second shield layer being a common layer with the first pole piece.  
   
   
   
       9 . A magnetic head assembly as claimed in  claim 7  further comprising: 
 the second pole piece having first and second layers with the first layer being located between the insulation stack and the second layer;    the first layer being recessed from the head surface; and    the second layer being magnetically connected to said first layer and having said pole tip at the head surface.    
   
   
       10 . A magnetic head assembly as claimed in  claim 9  further comprising: 
 a read head including: 
 ferromagnetic first and second shield layers;  
 a read sensor located between the first and second shield layers; and  
 the second shield layer being a common layer with the first pole piece.