Substrate edge grip apparatus

Abstract

In one embodiment, the invention is a substrate edge gripper assembly for positioning a semiconductor substrate upon a transfer robot. In one embodiment, a modular assembly comprises spring loaded jaws that are mounted on either side of a robot end effector. The jaws are adapted to be actuated by a feature remote from the robot end effector to release the substrate for delivery.

1 . An apparatus for positioning a substrate on a transfer robot comprising: 
 a rotatable jaw comprising: 
 a base portion having a first end and a second end; and  
 an arm extending from the first end of the base portion to a gripper adapted to contact an edge of the substrate;  
   a mounting bracket pivotably coupled to the base portion between the first and second ends, the mounting bracket adapted for mounting to a portion of the transfer robot; and    a biasing member disposed between the jaw and the mounting bracket, the biasing member urging the jaw to rotate about an axis substantially normal to the jaw.    
   
   
       2 . The apparatus of  claim 1 , further comprising: 
 a striker coupled to the second end of the base portion and extending therefrom at an angle substantially normal to the base portion;    
   
   
       3 . The apparatus of  claim 2 , wherein the jaw is adapted to rotate upon contact of the striker with a feature remote from the transfer robot.  
   
   
       4 . The apparatus of  claim 1 , wherein the jaw further comprises: 
 a pivot hole disposed through the first end of the base portion; and    a pin disposed through the pivot hole and coupling the jaw to the mounting bracket, the jaw.    
   
   
       5 . The apparatus of  claim 2 , wherein the gripper comprises: 
 a shaft having a first end coupled to the arm; and    a disk supported for rotation upon a second end of the shaft.    
   
   
       6 . The apparatus of  claim 5 , wherein a bearing is disposed between the shaft and the disk.  
   
   
       7 . The apparatus of  claim 2 , wherein the striker comprises: 
 a shaft projecting from the base portion at an angle substantially normal to the base portion; and    a sleeve coupled to the shaft and adapted to rotate about a longitudinal axis of the shaft.    
   
   
       8 . The apparatus of  claim 7 , wherein a bearing is disposed between the shaft and the sleeve.  
   
   
       9 . The apparatus of  claim 1 , wherein the angular displacement of the jaw is adjustable.  
   
   
       10 . The apparatus of  claim 9 , wherein the mounting bracket further comprises: 
 a first pin extending outwardly from the mounting bracket; and    a second pin extending outwardly from the mounting bracket, the jaw separating the first and second pins, wherein a position of at least on of the pins is adjustable to limit the displacement of the jaw.    
   
   
       11 . The apparatus of  claim 1 , wherein the biasing member is at least one of a flat spring, a compression spring, a torsion spring, a gas spring, a magnet, a resilient material, a spring form, a linear actuator, a solenoid.  
   
   
       12 . A robot adapted for transferring a substrate from a first location to a second location within a semiconductor substrate processing system, comprising: 
 a robot having a linkage for moving at least one end effector adapted for supporting the substrate thereon; and    at least two rotatable jaws coupled to opposite sides of the end effector, wherein each jaw is mechanically actuatable by a structure remote from the robot and end effector.    
   
   
       13 . The robot of  claim 12 , wherein each jaw comprises: 
 a base portion adapted for rotation about an axis substantially normal to a direction of extension of the end effector, the base portion having a first end and a second end; and    an arm extending from the first end of the base portion to a gripper adapted to contact an edge of the substrate.    
   
   
       14 . The robot of  claim 12 , further comprising: 
 a mounting bracket adapted for mounting at least a first jaw of the jaws to the robot; and    a biasing member disposed between the first jaw and the mounting bracket, and urging the jaw to rotate about an axis substantially normal to a direction of extension of the end effector.    
   
   
       15 . The robot of  claim 13 , wherein each jaw further comprises: 
 a striker coupled to the second end of the base portion and extending therefrom at an angle substantially normal to the base portion.    
   
   
       16 . The robot of  claim 15 , wherein each jaw is adapted to rotate outward relative to the robot end effector upon contact of the striker with the structure remote from the robot and end effector.  
   
   
       17 . The robot of  claim 13 , wherein the each jaw further comprises: 
 a pivot hole disposed through the first end of the base portion; and    a pin disposed through the pivot hole and coupling the jaw to the mounting bracket.    
   
   
       18 . The robot of  claim 12 , wherein each gripper further comprises: 
 a shaft having a first end coupled to the arm; and    a disk supported for rotation upon a second end of the shaft.    
   
   
       19 . The robot of  claim 18 , wherein a bearing is disposed between the shaft and the disk.  
   
   
       20 . The robot of  claim 15 , wherein the striker comprises: 
 a shaft projecting from the base portion at an angle substantially normal to the base portion; and    a sleeve coupled to the shaft and adapted to rotate about a longitudinal axis of the shaft.    
   
   
       21 . The robot of  claim 12 , wherein the angular displacement of the jaws are adjustable.  
   
   
       22 . The robot of  claim 21  further comprising: 
 a biasing member adapted to rotationally urge at least one of the jaws, wherein the biasing member is at least one of a flat spring, a compression spring, a torsion spring, a gas spring, a magnet, a resilient material, a spring form, a linear actuator, a solenoid.