Inventor · disambiguated record
Sanjeev Baluja
Also filed as: BALUJA SANJEEV
104 granted patents·59 pending applications·2,256 citations·filing 2004–2025
99Inventor score
Top patents by PatentIndex Score
163 records- 0198US8911553B2Quartz showerhead for nanocure UV chamberBALUJA SANJEEV·Filed 2011·Granted Dec 16, 2014·479 cites·9 claims
- 0298US7566891B2Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectorsAPPLIED MATERIALS INC·Filed 2007·Granted Jul 28, 2009·553 cites·33 claims
- 0397US11430686B2Pedestal heater for spatial multi-wafer processing toolAPPLIED MATERIALS INC·Filed 2020·Granted Aug 30, 2022·5 cites·19 claims
- 0497US8338809B2Ultraviolet reflector with coolant gas holes and methodYANG YAO-HUNG·Filed 2011·Granted Dec 25, 2012·408 cites·23 claims
- 0597US7692171B2Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectorsKASZUBA ANDRZEI·Filed 2007·Granted Apr 6, 2010·471 cites·26 claims
- 0696US7663121B2High efficiency UV curing systemAPPLIED MATERIALS INC·Filed 2006·Granted Feb 16, 2010·38 cites·12 claims
- 0796US7589336B2Apparatus and method for exposing a substrate to UV radiation while monitoring deterioration of the UV source and reflectorsAPPLIED MATERIALS INC·Filed 2007·Granted Sep 15, 2009·39 cites·23 claims
- 0895US11584993B2Thermally uniform deposition stationAPPLIED MATERIALS INC·Filed 2020·Granted Feb 21, 2023·4 cites·18 claims
- 0995US11332827B2Gas distribution plate with high aspect ratio holes and a high hole densityAPPLIED MATERIALS INC·Filed 2020·Granted May 17, 2022·3 cites·20 claims
- 1095US7777198B2Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiationAPPLIED MATERIALS INC·Filed 2007·Granted Aug 17, 2010·29 cites·30 claims
- 1194US11501957B2Pedestal support design for precise chamber matching and process controlAPPLIED MATERIALS INC·Filed 2020·Granted Nov 15, 2022·4 cites·17 claims
- 1294US11110425B2Gas distribution plate for thermal depositionAPPLIED MATERIALS INC·Filed 2019·Granted Sep 7, 2021·4 cites·20 claims
- 1394US10490436B2Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide filmsAPPLIED MATERIALS INC·Filed 2016·Granted Nov 26, 2019·10 cites·16 claims
- 1493USD1080812SGas mixerAPPLIED MATERIALS INC·Filed 2022·Granted Jun 24, 2025·6 cites·1 claims
- 1593US8203126B2Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiationROCHA-ALVAREZ JUAN CARLOS·Filed 2010·Granted Jun 19, 2012·26 cites·15 claims
- 1693US7909595B2Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sectionsAPPLIED MATERIALS INC·Filed 2007·Granted Mar 22, 2011·18 cites·7 claims
- 1791US11583816B2Gas distribution plate for thermal depositionAPPLIED MATERIALS INC·Filed 2021·Granted Feb 21, 2023·1 cites·18 claims
- 1891US8657961B2Method for UV based silylation chamber cleanAPPLIED MATERIALS INC·Filed 2013·Granted Feb 25, 2014·8 cites·16 claims
- 1991US8455849B2Method and apparatus for modulating wafer treatment profile in UV chamberBALUJA SANJEEV·Filed 2011·Granted Jun 4, 2013·13 cites·18 claims
- 2089US12305283B2Dithering or dynamic offsets for improved uniformityAPPLIED MATERIALS INC·Filed 2024·Granted May 20, 2025·0 cites·12 claims
- 2189US11818810B2Heater assembly with purge gap control and temperature uniformity for batch processing chambersAPPLIED MATERIALS INC·Filed 2021·Granted Nov 14, 2023·2 cites·8 claims
- 2288US10570517B2Apparatus and method for UV treatment, chemical treatment, and depositionAPPLIED MATERIALS INC·Filed 2016·Granted Feb 25, 2020·2 cites·20 claims
- 2388US10312076B2Application of bottom purge to increase clean efficiencyAPPLIED MATERIALS INC·Filed 2018·Granted Jun 4, 2019·5 cites·20 claims
- 2488US10233543B2Showerhead assembly with multiple fluid delivery zonesAPPLIED MATERIALS INC·Filed 2015·Granted Mar 19, 2019·4 cites·16 claims
- 2588US9506145B2Method and hardware for cleaning UV chambersAPPLIED MATERIALS INC·Filed 2016·Granted Nov 29, 2016·3 cites·20 claims
- 2688US9364871B2Method and hardware for cleaning UV chambersAPPLIED MATERIALS INC·Filed 2013·Granted Jun 14, 2016·4 cites·11 claims
- 2787USD1037778SGas distribution plateAPPLIED MATERIALS INC·Filed 2022·Granted Aug 6, 2024·13 cites·1 claims
- 2887US10600624B2System and method for substrate processing chambersAPPLIED MATERIALS INC·Filed 2018·Granted Mar 24, 2020·5 cites·22 claims
- 2987US8753449B2Enhancement in UV curing efficiency using oxygen-doped purge for ultra low-K dielectric filmAPPLIED MATERIALS INC·Filed 2013·Granted Jun 17, 2014·9 cites·17 claims
- 3087US7964858B2Ultraviolet reflector with coolant gas holes and methodAPPLIED MATERIALS INC·Filed 2008·Granted Jun 21, 2011·21 cites·44 claims
- 3187US2025354614A1High conductance variable orifice valveAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 3285US8274017B2Multifunctional heater/chiller pedestal for wide range wafer temperature controlYAP LIPYEOW·Filed 2009·Granted Sep 25, 2012·12 cites·20 claims
- 3383US11293099B2Showerhead assembly with multiple fluid delivery zonesAPPLIED MATERIALS INC·Filed 2020·Granted Apr 5, 2022·1 cites·13 claims
- 3483US11169547B2Gas-pulsing-based shared precursor distribution system and methods of useAPPLIED MATERIALS INC·Filed 2019·Granted Nov 9, 2021·2 cites·18 claims
- 3582US8309421B2Dual-bulb lamphead control methodologyYANG YAO-HUNG·Filed 2011·Granted Nov 13, 2012·5 cites·17 claims
- 3681US8679987B2Deposition of an amorphous carbon layer with high film density and high etch selectivityREILLY PATRICK·Filed 2012·Granted Mar 25, 2014·7 cites·20 claims
- 3780US11713508B2Apparatus and methods for improving chemical utilization rate in deposition processAPPLIED MATERIALS INC·Filed 2022·Granted Aug 1, 2023·0 cites·18 claims
- 3880US11586789B2Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformityAPPLIED MATERIALS INC·Filed 2021·Granted Feb 21, 2023·1 cites·13 claims
- 3980US10636628B2Method for cleaning a process chamberAPPLIED MATERIALS INC·Filed 2017·Granted Apr 28, 2020·2 cites·13 claims
- 4079US11746417B2Clean isolation valve for reduced dead volumeAPPLIED MATERIALS INC·Filed 2022·Granted Sep 5, 2023·0 cites·11 claims
- 4179US11220747B2Complementary pattern station designsAPPLIED MATERIALS INC·Filed 2019·Granted Jan 11, 2022·2 cites·13 claims
- 4279US10153185B2Substrate temperature measurement in multi-zone heaterAPPLIED MATERIALS INC·Filed 2014·Granted Dec 11, 2018·3 cites·14 claims
- 4379US10113231B2Process kit including flow isolator ringAPPLIED MATERIALS INC·Filed 2016·Granted Oct 30, 2018·1 cites·18 claims
- 4477US12442080B2Plasma showerhead assembly and method of reducing defectsAPPLIED MATERIALS INC·Filed 2024·Granted Oct 14, 2025·0 cites·19 claims
- 4577US11047043B2Chamber liner for high temperature processingAPPLIED MATERIALS INC·Filed 2019·Granted Jun 29, 2021·0 cites·18 claims
- 4677US10669629B2Showerhead assembly with multiple fluid delivery zonesAPPLIED MATERIALS INC·Filed 2018·Granted Jun 2, 2020·0 cites·20 claims
- 4777US10612135B2Method and system for high temperature cleanAPPLIED MATERIALS INC·Filed 2017·Granted Apr 7, 2020·2 cites·20 claims
- 4877US8597011B2Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sectionsKASZUBA ANDRZEI·Filed 2010·Granted Dec 3, 2013·3 cites·18 claims
- 4976US12087555B2Method and system for cleaning a process chamberAPPLIED MATERIALS INC·Filed 2022·Granted Sep 10, 2024·0 cites·12 claims
- 5076US11512391B2Process kit for a high throughput processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Nov 29, 2022·0 cites·20 claims
Showing the top 50 of 163 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →