US2006292749A1PendingUtilityA1

Photochromic substrate container

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Assignee: ENTEGRIS INCPriority: Oct 24, 2003Filed: Jul 11, 2006Published: Dec 28, 2006
Est. expiryOct 24, 2023(expired)· nominal 20-yr term from priority
Inventors:John BurnsMatthew A. FullerJeffery J. KingMartin L. ForbesMark V. Smith
H10P 72/1911H10P 72/0616H10P 72/50H10P 72/10B65D 79/02G03F 1/66B65D 85/38
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Claims

Abstract

A semiconductor wafer, substrate, or reticle storage or shipping device that includes a photochromic indicator of exposure to undesired electromagnetic radiation. The present invention includes the incorporation of a photochromic material into the plastic used to fabricate at least a portion of a semiconductor wafer, disk, or reticle shipping or storage containers. The container may include photochromic material in the form of a transparent window or a larger portion of the container. the photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.

Claims

exact text as granted — not AI-modified
1 . A carrier for transporting articles including semiconductor wafers, disks, or reticles, comprising: 
 a container comprising an openable enclosure, the container being formed to support, enclose and protect the articles; and    an at least partially transparent portion at least partially formed of a photochromic material that changes color or darkness in response to exposure to electromagnetic radiation of a selected wavelength or range of wavelengths.    
   
   
       2 . The carrier as claimed in  claim 2 , in which the container comprises a case and a door  
   
   
       3 . The carrier as claimed in  claim 2 , in which the transparent portion is a part of the case.  
   
   
       4 . The carrier as claimed in  claim 2 , in which the transparent portion is a part of the door.  
   
   
       5 . The carrier as claimed in  claim 1 , in which the selected wavelength or range of wavelengths comprises ultraviolet light.  
   
   
       6 . The carrier as claimed in  claim 1 , in which the selected wavelength or range of wavelengths comprises deep ultraviolet light.  
   
   
       7 . The carrier as claimed in  claim 2 , in which substantially the entire door is formed of the photochromic material.  
   
   
       8 . The carrier as claimed in  claim 2 , in which substantially the entire case is formed of the photochromic material.  
   
   
       9 . The carrier as claimed in  claim 1 , in which a window in the carrier is formed of the photochromic material.  
   
   
       10 . A method for determining if a carrier for transporting articles including semiconductor wafers, disks, or reticles is exposed to undesired electromagnetic radiation comprising the steps of: 
 placing the articles in a container comprising an openable enclosure, the container being formed to support, enclose and protect the articles; and an at least partially transparent portion at least partially formed of a photochromic material that changes color or darkness in response to exposure to electromagnetic radiation of a selected wavelength or range of wavelengths;    transporting the container; and    observing the photochromic material to discern any change in color or darkness.    
   
   
       11 . The method as claimed in  claim 10 , further comprising the step of selecting the wavelength to include ultraviolet light.  
   
   
       12 . The method as claimed in  claim 10 , further comprising the step of selecting the wavelength to include deep ultraviolet light.  
   
   
       13 . The method as claimed in  claim 10 , in which the in which the container comprises a case and a door  
   
   
       14 . The carrier as claimed in  claim 13 , in which the transparent portion is a part of the case.  
   
   
       15 . The carrier as claimed in  claim 13 , in which the transparent portion is a part of the door.  
   
   
       16 . A method for protecting articles including semiconductor wafers, disks, or reticles from exposure to undesired electromagnetic radiation comprising the steps of: 
 placing the articles in a container comprising an openable enclosure,    forming the container to support, enclose and protect the articles; and    forming the container to include an least partially transparent portion at least partially formed of a photochromic material that changes color or darkness in response to exposure to electromagnetic radiation of a selected wavelength or range of wavelengths.    
   
   
       17 . The method as claimed in  claim 16 , further comprising the step of selecting the photochromic material such that it changes color or darkens to absorb or reflect the undesired electromagnetic radiation.  
   
   
       18 . The method as claimed in  claim 16 , further comprising the steps of observing the photochromic to discern a change in color or darkness; and 
 acting to remove the container from the exposure to undesired electromagnetic radiation.    
   
   
       19 . The method as claimed in  claim 16 , further comprising the step of selecting the wavelength to include ultraviolet light.  
   
   
       20 . The method as claimed in  claim 16 , further comprising the step of selecting the wavelength to include deep ultraviolet light.  
   
   
       21 . The method as claimed in  claim 16 , in which the in which the container comprises a case and a door.  
   
   
       22 . The carrier as claimed in  claim 21 , in which the transparent portion is a part of the case.  
   
   
       23 . The carrier as claimed in  claim 21 , in which the transparent portion is a part of the door.

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