Ultra-precision micro-differential pressure measuring device and ultra-precision differential pressure measuring device

Abstract

The ultra-precision micro-differential pressure measuring device comprises a device body 1 having an inner space part therein, a pressure receiving plate 3 which is installed inside the inner space of the device body 1 and divides the said inner space hermetically into a lower space 7 and an upper part space 8 , an electronic weighing and pressure converting device 2 which is installed in the lower space 7 , and supports and secures the pressure receiving plate 3 , and a liquid sealing part R which liquid-seals the outer peripheral part of the afore-mentioned pressure receiving plate 3 and maintains the air-tightness between the lower space 7 and the upper space 8 . A micro-differential pressure between a pressure P 1 inside the upper space 8 and a pressure P 2 inside the lower space 7 is measured by the electronic weighing and pressure converting device 2 through the pressure receiving plate 3.

1 - 9 . (canceled)  
     
     
         10 . An ultra-precision differential pressure measuring device comprising 
 a device body having an inner space inside;    a pressure receiving plate installed in the inner space of the device body and that divides the inner space hermetically into a lower space and an upper space;    an electronic weighing and pressure converting device installed inside the lower space on which the pressure receiving plate is supported and secured; and    a dividing film is provided in a space between the outer periphery of the pressure receiving plate and the inner wall face of the device body to keep air-tightness between the lower space and the upper space, wherein a differential pressure between a pressure P 1  inside the upper space and a pressure P 2  inside the lower space is measured by the electronic weighing and pressure converting device via the pressure receiving plate.    
     
     
         11 . An ultra-precision differential pressure measuring device as claimed in  claim 10 , wherein the device body is constructed so that a lower part body provided with a pressure introducing hole in communication with the lower space and an upper part body provided with a pressure introducing hole in communication with the upper space are placed opposite to each other and combined to form the device body; and 
 a first fitting groove is formed on the outer periphery of the pressure receiving plate at a right angle relative thereto so that the inner periphery of the dividing film is inserted into the first fitting groove while a second fitting groove is formed on the inner face of the device body at a right angle relative thereto and at the position as high as the position of the first fitting groove so that the outer periphery of the dividing film is inserted into the second fitting groove.    
     
     
         12 . An ultra-precision differential pressure measuring device as claimed in  claim 10 , wherein the dividing film is a brim-shaped dividing film formed of a resin film or a thin metal film, and an outer peripheral part of the dividing film and an inner peripheral part thereof are hermetically inserted into a second fitting groove of the device body and a first fitting groove of the pressure sensing plate, respectively.  
     
     
         13 . An ultra-precision differential pressure measuring device as claimed in  claim 10 , wherein measurement values are continuously taken out from the electronic weighing and pressure converting device in the form of electric signals, and converted to the differential pressure by a computer and outputted.  
     
     
         14 . An ultra-precision differential pressure measuring device as claimed in  claim 10  wherein the electronic weighing and pressure converting device comprises an electronic weighing device and a computer that converts measurement signals from the electronic weighing device into the differential pressure and outputs the differential pressure.  
     
     
         15 . An ultra-precision differential pressure measuring device as claimed in  claim 10  wherein a supporting body is provided on a base on the electronic weighing and pressure converting device so that the pressure receiving plate is supported by and fixed to the supporting body.  
     
     
         16 . An ultra-precision differential pressure measuring device as claimed in  claim 10 , wherein the electronic weighing and pressure converting devices is constructed so that the pressure receiving plate is supported and fixed by the supporting body whose upper ends or lower ends or both are pointed.