Method and system for producing ozonized deionized water

Abstract

The invention relates to a method and system for cleaning semiconductor elements accommodated in a tank which uses ozonized, deionized (DI) ultrapure water. According to the invention, ozone is generated in an ozone generator ( 3 ) according to the principal of silent electric discharge while admitting highly pure oxygen. Said ozone is fed to a contactor ( 7 ) through which DI water flows. The ozone is then dissolved in the DI water. While optionally admitting additional chemicals, the ozonized DI water is conducted through the tank ( 12 ) holding the semiconductor elements in order to clean the same, and the used DI water is carried away ( 15 ). In order to stabilize the ozone concentration, CO<SUB>2 </SUB>is added to the ozone/oxygen mixture generated by the ozone generator ( 7 ).

1 - 13 . (canceled)  
     
     
         14 . A method for producing ozonized deionized water, comprising: 
 providing CO 2  to a mixture of ozone and oxygen; and    providing the mixture of CO 2 , ozone and oxygen and deionized water to a contactor to dissolve the mixture of CO 2 , ozone and oxygen to produce ozonized deionized water.    
     
     
         15 . The method of  claim 14 , comprising providing deionized water to the ozonized deionized water.  
     
     
         16 . The method of  claim 14 , comprising removing spent ozonized deionized water.  
     
     
         17 . The method of  claim 16 , comprising filtering at least a portion of the spent ozonized deionized water and mixing at least a portion of the filtered ozonized deionized water with ozonized deionized water in the contactor.  
     
     
         18 . The method of  claim 14  wherein providing CO 2  to the mixture of ozone and oxygen slows down the decomposition of the ozone.  
     
     
         19 . The method of  claim 14  wherein providing CO 2  to the mixture of ozone and oxygen comprises adding sufficient CO 2  to decrease the decomposition of the ozone.  
     
     
         20 . The method of  claim 19  wherein a concentration of CO 2  of less than about 5000 ppm is achieved in the mixture of CO 2 , ozone and oxygen.  
     
     
         21 . The method of  claim 16 , comprising converting oxygen to ozone using silent electrical discharge.  
     
     
         22 . The method of  claim 16 , comprising controlling ozone concentration in the ozonized deionized water.  
     
     
         23 . A system for producing ozonized deionized water, comprising: 
 a CO 2  source coupled to the output of a source of a mixture of ozone and oxygen to provide CO 2  to the mixture of ozone and oxygen and to create a CO 2 , ozone and oxygen mixture; and    a contactor that receives the CO 2 , ozone and oxygen mixture and is coupled to an output of a deionized water source for dissolving the mixture of CO 2 , ozone and oxygen in the deionized water to produce ozonized deionized water.    
     
     
         24 . The system of  claim 23  wherein deionized water is provided to the ozonized deionized water.  
     
     
         25 . The system of  claim 23 , comprising a filter that filters at least a portion of the spent ozonized deionized water and directs a least a portion of the filtered ozonized deionized water to be mixed with ozonized deionized water in the contactor.  
     
     
         26 . The system of  claim 23 , comprising an ozone generator for converting oxygen to ozone.  
     
     
         27 . The system of  claim 26  wherein the ozone generator converts oxygen to ozone using silent electrical discharge.  
     
     
         28 . The system of  claim 23  wherein providing CO 2  to the mixture of ozone and oxygen slows down the decomposition of the ozone.  
     
     
         29 . The system of  claim 23  wherein providing CO 2  to the mixture of ozone and oxygen comprises adding sufficient CO 2  to decrease the decomposition of the ozone.  
     
     
         30 . The system of  claim 29  wherein a concentration of CO 2  of less than about 5000 ppm is achieved in the mixture of CO 2 , ozone and oxygen.  
     
     
         31 . The system of  claim 23 , comprising a control unit to control ozone concentration in the ozonized deionized water.  
     
     
         32 . A system for producing ozonized deionized water, comprising: 
 a source of a mixture of ozone and oxygen;    a means for mixing CO 2  with the mixture of ozone and oxygen to create a CO 2 , ozone and oxygen mixture;    a deionized water source; and    a contactor that receives the CO 2 , ozone and oxygen mixture and is coupled to the output of the deionized water source for dissolving the mixture of CO 2 , ozone and oxygen in the deionized water to produce ozonized deionized water.    
     
     
         33 . A system for producing ozonized deionized water, comprising: 
 means for providing CO 2 , a mixture of ozone and oxygen, and deionized water; and    means for providing the deionized water, and a mixture of the CO 2  and the mixture of ozone and oxygen, to a contactor to dissolve the mixture of CO 2 , ozone and oxygen to produce ozonized deionized water.