US2007141251A1PendingUtilityA1

Method of forming thin metal films on substrates

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Assignee: EBARA CORPPriority: Dec 9, 1999Filed: Feb 16, 2007Published: Jun 21, 2007
Est. expiryDec 9, 2019(expired)· nominal 20-yr term from priority
H10P 72/0448H10P 14/46H10W 20/4473H10W 20/4421H10W 20/425H10W 20/059H10W 20/056H10P 14/20B22F 1/102B22F 1/0545B22F 1/052B22F 1/10B22F 1/054B82Y 30/00C23C 4/123B22F 2998/00C23C 24/08C23C 26/00
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Claims

Abstract

A solution containing a metal component of composite ultrafine metal particles each having a core substantially made of metal component and a covering layer made of an organic compound chemically bonded to the core having an average diameter ranging from 1 to 10 nm, uniformly dispersed in a solvent, forms a thin metal film on the surface of a transfer sheet, after which the transfer sheet is thermally decomposed to transfer the thin metal film to a substrate.

Claims

exact text as granted — not AI-modified
1 . A method of forming a thin metal film, comprising: 
 preparing a solution containing a metal component, comprising at least one of composite ultrafine metal particles and an organic metal compound, and a metal powder having an average particle diameter ranging from 1 to 10 μm;    bringing said solution into contact with a surface of a substrate;    evaporating the solvent in said solution on said surface of said substrate to form an ultrafine particle coating layer on said surface of said substrate; and    thermally decomposing said ultrafine particle coating layer into a thin metal film having a thickness ranging from 10 to 1000 μm;    wherein each of said composite ultrafine metal particles has a core substantially made of a metal component and a covering layer made of an organic compound chemically bonded to said core;    said core has an average diameter ranging from 1 to 10 nm; and    said at least one of said composite ultrafine metal particles and said organic metal compound and said metal powder are uniformly dispersed in a solvent.    
   
   
       2 . A method according to  claim 1 , wherein the metal component in said solution has a total amount ranging from 30 to 90 weight %.  
   
   
       3 . A method of forming a thin metal film comprising: 
 preparing a solution containing a metal component, comprising at least one of composite ultrafine metal particles and an organic metal compound, and a metal powder having an average particle diameter ranging from 1 to 10 μm;    bringing said solution into contact with a surface of a substrate;    evaporating the solvent in said solution on said surface of said substrate to form an ultrafine particle coating layer on said surface of said substrate; and    thermally decomposing said ultrafine particle coating layer into a thin metal film having a thickness ranging from 10 to 1000 μm;    wherein each of said composite ultrafine metal particles has a core substantially made of a metal component and a covering layer made of an organic compound chemically bonded to said core;    said core has an average diameter ranging from 1 to 50 nm; and    said at least one of said composite ultrafine metal particles and said organic metal compound and said metal powder are uniformly dispersed in a solvent.    
   
   
       4 . A method according to  claim 3 , wherein the metal component in said solution has a total amount ranging from 30 to 90 weight %.

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