Reduced capacity carrier, transport, load port, buffer system

Abstract

A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

1 . An semiconductor workpiece processing system comprising: 
 at least one processing tool for processing semiconductor workpieces;    a primary transport system having one or more constant velocity transport loops;    a secondary transport system having one or more constant velocity transport loops, the secondary transport system being connected to the primary transport system through queue sections wherein, the queue sections are configured to allow the movement of material between the primary transport system and secondary transport system without disrupting the flow of either the primary or secondary transport systems; and    one or more interfaces connected to the one or more transport loops of the secondary transport system through interface shunts for interfacing with the at least one processing tool, wherein the interface shunts are configured to allow the movement of material between the one or more transport loops of the secondary transport system and the one or more interfaces without disrupting a flow of the secondary transport system;    wherein the flow of material along the primary and secondary transport systems is continuous.    
   
   
       2 . The automated material handling system of  claim 1  wherein the one or more constant velocity transport loops of the primary transport system are connected to each other through the one or more constant velocity transport loops of the secondary transport system.  
   
   
       3 . The automated material handling system of  claim 1  wherein the one or more constant velocity loops of the first transport system are connected to each other through one or more cross shunts.  
   
   
       4 . The automated material handling system of  claim 1  wherein the one or more constant velocity loops of the second transport system are connected to each other through one or more cross shunts.  
   
   
       5 . The automated material handling system of  claim 1  wherein at least one of the one or more constant velocity loops of the first transport system are connected to another of the one or more constant velocity loops of the first transport system through queue sections.  
   
   
       6 . The automated material handling system of  claim 1  wherein the automated material handling system if configured for the transportation of containers for holding at least one semiconductor workpiece therein for transport to and from the processing tool.  
   
   
       7 . The automated material handling system of  claim 1  wherein the primary and secondary transport systems are configured to allow a workpiece container designated to be transferred to a queue section or an interface shunt to continue traveling along the primary or secondary system until the queue section or interface shunt becomes available.  
   
   
       8 . The automated material handling system of  claim 1  wherein the primary transport system, the secondary transport system, the queue sections and the interface shunts each comprise a set of parallel tracks wherein each track of the set of parallel tracks is configured to provide transportation of workpiece carriers in opposite directions from each other.