US2007212976A1PendingUtilityA1

Smart polishing media assembly for planarizing substrates

42
Assignee: APPLIED MATERIALS INCPriority: Mar 13, 2006Filed: Mar 13, 2006Published: Sep 13, 2007
Est. expiryMar 13, 2026(expired)· nominal 20-yr term from priority
Inventors:Peter McreynoldsGregory E. MenkBenjamin A. BonnerGopalakrishna B. PrabhuErik S. RondumGarlen C. LeungAnand N. Iyer
B24B 21/004B24B 37/20
42
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Claims

Abstract

A smart polishing media assembly is provided, along with a polishing system and a method for using the same. In one embodiment, the smart polishing media assembly includes a memory device coupled to a polishing material. The polishing material may be in pad, web or belt form. The memory device generally stores at least one material information, historical use information, and/or conditioning information of the polishing material.

Claims

exact text as granted — not AI-modified
1 . A smart polishing media assembly, comprising: 
 a polishing material; and    a memory device coupled to the polishing material.    
     
     
         2 . The apparatus of  claim 1  further comprising: 
 a core having the polishing material wound thereon.    
     
     
         3 . The apparatus of  claim 2 , wherein the memory device is coupled to the core.  
     
     
         4 . The apparatus of  claim 1 , wherein the memory device is coupled to a leader of the polishing material.  
     
     
         5 . The apparatus of  claim 1 , wherein the memory device is a computer readable and writable device.  
     
     
         6 . The apparatus of  claim 1 , wherein the memory device is coupled to an exterior surface of the polishing material.  
     
     
         7 . The apparatus of  claim 1 , wherein the memory device is embedded in the polishing material.  
     
     
         8 . The apparatus of  claim 1 , wherein the memory device includes information relating to the polishing material, the information comprising at least one of length, thickness, brand, material type, sequence numbers or unique identification code stored thereon.  
     
     
         9 . The apparatus of  claim 1 , wherein the memory device includes historical use information associated with the polishing material stored thereon.  
     
     
         10 . The apparatus of  claim 1 , wherein the memory device includes conditioning information stored thereon.  
     
     
         11 . The apparatus of  claim 1 , wherein the polishing material is a web or belt.  
     
     
         12 . The apparatus of  claim 1 , wherein the polishing material is a pad.  
     
     
         13 . A polishing system, comprising: 
 a polishing station;    a polishing material disposed in the polishing station;    a memory device coupled to the polishing material; and    a computer based controller adapted to communicate with the memory device.    
     
     
         14 . The apparatus of  claim 13 , wherein the memory device is a computer readable and writable device.  
     
     
         15 . The apparatus of  claim 13 , wherein the memory device includes information relating to the polishing material, the information comprising at least one of length, thickness, brand, material type, sequence numbers or unique identification code stored thereon.  
     
     
         16 . The apparatus of  claim 13 , wherein the memory device includes historical use information of the polishing material stored thereon.  
     
     
         17 . The apparatus of  claim 13 , wherein the memory includes conditioning information relating to the polishing material stored thereon.  
     
     
         18 . The apparatus of  claim 13 , wherein the polishing material is a web or belt.  
     
     
         19 . The apparatus of  claim 13 , wherein the polishing material is a pad.  
     
     
         20 . The apparatus of  claim 13  further comprising: 
 a core having the polishing material wound thereon, wherein the memory device is coupled to the core.    
     
     
         21 . A method for using a smart polishing media assembly in a polishing system, comprising: 
 reading information from a memory device coupled to a polishing material disposed in a polishing station; and    polishing a substrate placed in contact with the polishing material.    
     
     
         22 . The method of  claim 21 , further comprising: 
 writing information to the memory device relating to historical use of the polishing material.    
     
     
         23 . The method of  claim 22 , wherein the information written to the memory device is at least one of conditioning information, material polished, fluids used on the polishing material, life of the polishing material or remaining length of a web.  
     
     
         24 . The method of  claim 21 , further comprising: 
 analyzing the read information; and    determining if polishing should be commenced in response to the read information.    
     
     
         25 . The method of  claim 21 , wherein the step of reading information from a memory device comprises: 
 reading information indicative of polishing material life.    
     
     
         26 . The method of  claim 21 , wherein the step of reading information from a memory device comprises: 
 reading information indicative of an unused length of the polishing material.    
     
     
         27 . The method of  claim 22 , wherein the step of reading information from a memory device comprises: 
 reading information relating to process fluids used on the polishing material.    
     
     
         28 . The method of  claim 22 , wherein the step of reading information from a memory device comprises: 
 reading information relating to materials polished on the polishing material.

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