Holding and positioning apparatus for an optical element

Abstract

In a holding and positioning apparatus for an optical element, the optical element is mounted in a mounting ring and the mounting ring is mounted via at least one manipulator unit. The manipulator unit has a linear actuating element. The manipulator unit has a manipulator head, a movable manipulator part and a manipulator foot, the manipulator head being connected to the movable manipulator part via a solid body joint. The movable manipulator part is connected to the manipulator foot via an actuator and at least one solid body joint, the linear actuating element being coupled to the manipulator foot and the actuator.

1 - 2 . (canceled)  
   
   
       3 . A holding and positioning apparatus for an optical element, the optical element being mounted in a mounting ring and the mounting ring being mounted via at least one manipulator unit, the manipulator unit having a linear actuating element, a manipulator head, a movable manipulator part and a manipulator foot, the manipulator head being connected to the movable manipulator part via a solid body joint, and the movable manipulator part being connected to the manipulator foot via an actuator and at least one solid body joint, the linear actuating element being coupled to the manipulator foot and the actuator, and the manipulator unit comprising a crossed-spring joint.  
   
   
       4 . The holding and positioning apparatus as claimed in  claim 3 , the crossed-spring joint being implemented as a double leaf spring, the actuator additionally being connected to the manipulator foot via a further solid body joint.  
   
   
       5 . The holding and positioning apparatus as claimed in  claim 3 , rotation or tilting of the manipulator head about an axis being provided by means of the solid body joint, which is connected to the movable manipulator part and the manipulator head.  
   
   
       6 . The holding and positioning apparatus as claimed in  claim 3 , rotation or tilting of the movable manipulator part about an axis being provided by means of the at least one solid body joint, which is connected to the movable manipulator part and the actuator.  
   
   
       7 . The holding and positioning apparatus as claimed in  claim 3 , at least three sensors being provided in order to measure lifting and tilting movements of the optical element with respect to a base body.  
   
   
       8 . The holding and positioning apparatus as claimed in  claim 7 , the sensors being formed as capacitive sensors.  
   
   
       9 - 10 . (canceled)  
   
   
       11 . A manipulator unit for moving an optical element, in particular a mirror, on an axis at right angles to a plane of the optical element and for tilting the optical element about two mutually independent axes, having a manipulator head, a movable manipulator part, a manipulator foot and a linear actuating element, the manipulator head being connected to the movable manipulator part via a solid body joint, and the movable manipulator part being connected to the manipulator foot via an actuator and at least one solid body joint, and the manipulator unit comprising a crossed-spring joint.  
   
   
       12 . The manipulator unit as claimed in  claim 11 , the crossed-spring joint being implemented as a double leaf spring, the actuator additionally being connected to the manipulator foot via a further solid body joint.  
   
   
       13 - 14 . (canceled)  
   
   
       15 . A projection objective for semiconductor lithography, having optical elements arranged in an objective housing, at least one optical element being provided with a holding and positioning device, the optical element being mounted in a mounting ring and the mounting ring being mounted via at least one manipulator unit, the manipulator unit being connected to a base body and having a linear actuating element, a manipulator head, a movable manipulator part and a manipulator foot, the manipulator head being connected to the movable manipulator part via a solid body joint, and the movable manipulator part being connected to the manipulator foot via an actuator and at least one solid body joint, the linear actuating element being coupled to the manipulator foot and the actuator, and the manipulator unit comprising a crossed-spring joint.  
   
   
       16 . The projection objective as claimed in  claim 15 , the crossed-spring joint being implemented as a double leaf spring, the actuator additionally being connected to the manipulator foot via a further solid body joint.  
   
   
       17 . The projection objective as claimed in  claim 15 , the at least one optical element being formed as a mirror, in particular as a deflection mirror.  
   
   
       18 . The projection objective as claimed in  claim 17 , in an implementation of the projection objective as a catadioptric objective with a radial arm.  
   
   
       19 . A manipulator unit for moving an optical element, comprising 
 a manipulator foot relative to which the optical element can be moved,    an actuating element for adjusting a movable actuator connected to the manipulator foot via a first solid body joint,    a movable manipulator part, connected to the actuator via a second solid body joint, for attachment to the optical element,    the first solid body joint defining a first axis of rotation of the actuator and the second solid body joint defining a second axis of rotation of the movable manipulator part in such a way that rotation about the first axis of rotation results in displacement of the second axis of rotation relative to the manipulator foot, the position of the first and/or second axis of rotation being determined at the same time by at least a third solid body joint.    
   
   
       20 . The manipulator unit as claimed in  claim 19 , the third solid body joint connecting the manipulator foot and the movable actuator.  
   
   
       21 . The manipulator unit as claimed in  claim 19 , the third solid body joint connecting the movable manipulator part to the movable actuator.  
   
   
       22 . The manipulator unit as claimed in  claim 19 , the third solid body joint connecting the movable manipulator part to the manipulator foot.  
   
   
       23 . The manipulator unit as claimed in  claim 19 , at least one of the solid body joints being formed in the manner of a leaf spring.  
   
   
       24 . The manipulator unit as claimed in  claim 23 , the third solid body joint being arranged to be rotated through an angle in the deflection direction relative to the first and/or second solid body joint with regard to the respective deflection directions of the solid body joints.  
   
   
       25 . The manipulator unit as claimed in  claim 24 , the angle being between 30° and 150°.