Inventor · disambiguated record
Hubert Holderer
Also filed as: HOLDERER HUBERT
61 granted patents·11 pending applications·1,086 citations·filing 1998–2022
99Inventor score
Files withZEISS CARL SMT AG34ZEISS STIFTUNG14ZEISS CARL SMT GMBH12WEBER ULRICH4ZEISS CARL SEMICONDUCTOR MFG2
Top patents by PatentIndex Score
72 records- 0195US7830611B2Projection objective of a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2008·Granted Nov 9, 2010·34 cites·48 claims
- 0293US8508868B2Holding arrangement for an optical elementWEBER ULRICH·Filed 2012·Granted Aug 13, 2013·23 cites·20 claims
- 0393US7570343B2Microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2005·Granted Aug 4, 2009·14 cites·8 claims
- 0493US6275344B1Device for displacing an optical element along the optical axisZEISS CARL·Filed 2000·Granted Aug 14, 2001·64 cites·20 claims
- 0592US8456771B2Holding arrangement for an optical elementWEBER ULRICH·Filed 2012·Granted Jun 4, 2013·12 cites·20 claims
- 0692US6504597B2Optical arrangementZEISS STIFTUNG·Filed 2001·Granted Jan 7, 2003·54 cites·15 claims
- 0791US7990622B2Projection objective of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2010·Granted Aug 2, 2011·7 cites·47 claims
- 0891US7816022B2Composite structure for microlithography and optical arrangementZEISS CARL SMT AG·Filed 2009·Granted Oct 19, 2010·21 cites·39 claims
- 0991US6388823B1Optical system, especially a projection light facility for microlithographyZEISS STIFTUNG·Filed 1999·Granted May 14, 2002·126 cites·13 claims
- 1091US6229657B1Assembly of optical element and mountZEISS STIFTUNG·Filed 1999·Granted May 8, 2001·118 cites·37 claims
- 1189US6781668B2Optical arrangementZEISS STIFTUNG·Filed 2000·Granted Aug 24, 2004·36 cites·14 claims
- 1288US7193794B2Adjustment arrangement of an optical elementZEISS CARL SMT AG·Filed 2004·Granted Mar 20, 2007·29 cites·110 claims
- 1388US6879379B2Projection lens and microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2003·Granted Apr 12, 2005·27 cites·51 claims
- 1488US6784977B2Projection exposure system as well as a process for compensating image defects occuring in the projection optics of a projection exposure system, in particular for microlithographyZEISS CARL SEMICONDUCTOR MFG·Filed 2002·Granted Aug 31, 2004·43 cites·12 claims
- 1588US6521877B1Optical arrangement having improved temperature distribution within an optical elementZEISS STIFTUNG·Filed 2000·Granted Feb 18, 2003·37 cites·17 claims
- 1688US6259571B1Adjustable assemblyZEISS STIFTUNG·Filed 2000·Granted Jul 10, 2001·70 cites·11 claims
- 1787US10514608B2Method for producing an illumination system for an EUV projection exposure system, and illumination systemZEISS CARL SMT GMBH·Filed 2018·Granted Dec 24, 2019·4 cites·25 claims
- 1887US7710542B2Imaging device in a projection exposure machineZEISS CARL SMT AG·Filed 2007·Granted May 4, 2010·7 cites·23 claims
- 1987US6522392B1Optical systems and methods of compensating rotationally non-symmetrical image defects in an optical systemZEISS STIFTUNG·Filed 2000·Granted Feb 18, 2003·34 cites·5 claims
- 2086US8342701B2Reflective optical element for use in an EUV systemZEISS CARL LASER OPTICS GMBH·Filed 2010·Granted Jan 1, 2013·14 cites·25 claims
- 2186US7961294B2Imaging device in a projection exposure facilityZEISS CARL SMT GMBH·Filed 2008·Granted Jun 14, 2011·6 cites·21 claims
- 2284US7486382B2Imaging device in a projection exposure machineZEISS CARL SMT AG·Filed 2005·Granted Feb 3, 2009·8 cites·19 claims
- 2381US6583850B2Optical systemZEISS STIFTUNG·Filed 2001·Granted Jun 24, 2003·21 cites·24 claims
- 2480US7242537B2Holding and positioning apparatus for an optical elementZEISS CARL SMT AG·Filed 2004·Granted Jul 10, 2007·15 cites·16 claims
- 2580US6503383B1Galvanoplastic optical mountingZEISS STIFTUNG·Filed 2000·Granted Jan 7, 2003·20 cites·11 claims
- 2680US6466382B2Optical arrangementZEISS STIFTUNG·Filed 2000·Granted Oct 15, 2002·26 cites·10 claims
- 2778US7304717B2Imaging device in a projection exposure facilityZEISS CARL SMT AG·Filed 2002·Granted Dec 4, 2007·12 cites·21 claims
- 2876US6369959B1Assembly comprising an optical element and a mountZEISS STIFTUNG·Filed 2000·Granted Apr 9, 2002·21 cites·18 claims
- 2975US6166868AGalvanoplastic optical mountingZEISS STIFTUNG·Filed 1998·Granted Dec 26, 2000·38 cites·14 claims
- 3073US8902401B2Optical imaging device with thermal attenuationZEISS CARL SMT GMBH·Filed 2012·Granted Dec 2, 2014·1 cites·22 claims
- 3173US7354168B2Facet mirror having a number of mirror facetsZEISS CARL SMT AG·Filed 2004·Granted Apr 8, 2008·17 cites·6 claims
- 3273US7079331B2Device for holding a beam splitter elementZEISS CARL SMT AG·Filed 2005·Granted Jul 18, 2006·7 cites·29 claims
- 3372US7791711B2Projection method including pupillary filtering and a projection lens thereforZEISS CARL SMT AG·Filed 2008·Granted Sep 7, 2010·3 cites·32 claims
- 3472US6967792B2Apparatus for positioning an optical element in a structureZEISS CARL SMT AG·Filed 2003·Granted Nov 22, 2005·11 cites·25 claims
- 3571US8363206B2Optical imaging device with thermal attenuationZEISS CARL SMT GMBH·Filed 2008·Granted Jan 29, 2013·2 cites·48 claims
- 3667US7251086B2Apparatus for positioning an optical element in a structureZEISS CARL SMT AG·Filed 2005·Granted Jul 31, 2007·2 cites·27 claims
- 3767US6728021B1Optical component and method of inducing a desired alteration of an optical property thereinZEISS CARL SMT AG·Filed 2002·Granted Apr 27, 2004·8 cites·14 claims
- 3867US6392824B1Soldering process for optical materials to metal mountings, and mounted assembliesZEISS STIFTUNG·Filed 1998·Granted May 21, 2002·26 cites·14 claims
- 3966US6943965B2Method for correcting oscillation-induced imaging errors in an objectiveZEISS CARL SMT AG·Filed 2003·Granted Sep 13, 2005·8 cites·24 claims
- 4064US7656595B2Adjustment arrangement of an optical elementZEISS CARL SMT AG·Filed 2008·Granted Feb 2, 2010·1 cites·27 claims
- 4164US7090362B2Facet mirror having a number of mirror facetsZEISS CARL SMT AG·Filed 2004·Granted Aug 15, 2006·9 cites·10 claims
- 4264US5991101AUV-resistant jointing technique for lenses and mountsZEISS STIFTUNG·Filed 1998·Granted Nov 23, 1999·26 cites·24 claims
- 4362US7457059B2Adjustment arrangement of an optical elementZEISS CARL SMT AG·Filed 2006·Granted Nov 25, 2008·2 cites·49 claims
- 4461US9810996B2Optical imaging device with thermal attenuationZEISS CARL SMT GMBH·Filed 2014·Granted Nov 7, 2017·0 cites·41 claims
- 4560US11720028B2Measurement illumination optical unit for guiding illumination light into an object field of a projection exposure system for EUV lithographyZEISS CARL SMT GMBH·Filed 2021·Granted Aug 8, 2023·0 cites·20 claims
- 4660US2018181007A1Optical imaging device with thermal attenuationZEISS CARL SMT GMBH·Filed 2017·Application pending·0 cites
- 4759US11789367B2Facet mirror for an illumination optical unit of a projection exposure apparatusZEISS CARL SMT GMBH·Filed 2022·Granted Oct 17, 2023·0 cites·21 claims
- 4859US11048172B2Method for producing an illumination system for an EUV projection exposure system, and illumination systemZEISS CARL SMT GMBH·Filed 2019·Granted Jun 29, 2021·0 cites·22 claims
- 4958US11422470B2Imaging optical unit for EUV microlithographyZEISS CARL SMT GMBH·Filed 2020·Granted Aug 23, 2022·0 cites·20 claims
- 5058US2009141258A1Imaging Device in a Projection Exposure MachineZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
Showing the top 50 of 72 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →