Imaging Device in a Projection Exposure Machine

Abstract

An imaging device in a projection exposure machine for microlithography includes at least one optical element and at least one manipulator, a linear drive for manipulating the position of the optical element. The linear drive has at least one moving element, the moving element having a shearing part and a lifting part. The shearing part is arranged to move the optical element and the lifting part is arranged to move the shearing part. The linear drive has a supporting element which is in contact with and prevents movement of the optical element while the shearing part is moved by the lifting part.

1 . An imaging device in a projection exposure machine for microlithography, comprising at least one optical element and at least one manipulator, comprising a linear drive for manipulating the position of the optical element, wherein said linear drive has at least one moving element, said moving element having a lifting part and a shearing part, said shearing part being arranged to move the optical element and said lifting part being arranged to move said shearing part, and wherein said linear drive has a supporting element being in contact with and preventing movement of the optical element while the shearing part is moved by the lifting part. 
   
   
       2 .- 19 . (canceled)