Inventor · disambiguated record
Erich Merz
Also filed as: MERZ ERICH
11 granted patents·1 pending application·381 citations·filing 1999–2011
91Inventor score
Top patents by PatentIndex Score
12 records- 0193US6307688B1Optical system, in particular projection-illumination unit used in microlithographyZEISS STIFTUNG·Filed 1999·Granted Oct 23, 2001·152 cites·9 claims
- 0291US6388823B1Optical system, especially a projection light facility for microlithographyZEISS STIFTUNG·Filed 1999·Granted May 14, 2002·126 cites·13 claims
- 0390US6191898B1Optical imaging device, particularly an objective, with at least one optical elementZEISS STIFTUNG·Filed 2000·Granted Feb 20, 2001·62 cites·12 claims
- 0487US7710542B2Imaging device in a projection exposure machineZEISS CARL SMT AG·Filed 2007·Granted May 4, 2010·7 cites·23 claims
- 0586US7961294B2Imaging device in a projection exposure facilityZEISS CARL SMT GMBH·Filed 2008·Granted Jun 14, 2011·6 cites·21 claims
- 0684US7486382B2Imaging device in a projection exposure machineZEISS CARL SMT AG·Filed 2005·Granted Feb 3, 2009·8 cites·19 claims
- 0778US7304717B2Imaging device in a projection exposure facilityZEISS CARL SMT AG·Filed 2002·Granted Dec 4, 2007·12 cites·21 claims
- 0867US7768721B2Optical assembly, projection exposure apparatus and projection objectiveZEISS CARL SMT AG·Filed 2008·Granted Aug 3, 2010·3 cites·26 claims
- 0965US7548387B2Optical imaging deviceZEISS CARL SMT AG·Filed 2006·Granted Jun 16, 2009·4 cites·20 claims
- 1058US2009141258A1Imaging Device in a Projection Exposure MachineZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 1156US8810934B2Positioning method for an optical arrangement of a projection illumination systemAUBELE KARL-EUGEN·Filed 2011·Granted Aug 19, 2014·1 cites·20 claims
- 1250US8514371B2Imaging device in a projection exposure facilityHUMMEL WOLFGANG·Filed 2011·Granted Aug 20, 2013·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →