Inventor · disambiguated record
Klaus Rief
Also filed as: RIEF KLAUS
11 granted patents·5 pending applications·87 citations·filing 1994–2025
90Inventor score
Files withZEISS CARL SMT AG7ZEISS CARL SMT GMBH4ZAHNRADFABRIK FRIEDRICHSHAFEN2HUMMEL WOLFGANG1RIEF KLAUS1
Top patents by PatentIndex Score
16 records- 0187US7710542B2Imaging device in a projection exposure machineZEISS CARL SMT AG·Filed 2007·Granted May 4, 2010·7 cites·23 claims
- 0286US7961294B2Imaging device in a projection exposure facilityZEISS CARL SMT GMBH·Filed 2008·Granted Jun 14, 2011·6 cites·21 claims
- 0384US7486382B2Imaging device in a projection exposure machineZEISS CARL SMT AG·Filed 2005·Granted Feb 3, 2009·8 cites·19 claims
- 0480US9513452B2Damping deviceVOGLER ALEXANDER·Filed 2011·Granted Dec 6, 2016·7 cites·34 claims
- 0578US7304717B2Imaging device in a projection exposure facilityZEISS CARL SMT AG·Filed 2002·Granted Dec 4, 2007·12 cites·21 claims
- 0670US8879046B2Method for moving an optical element of a projection exposure apparatus for microlithographyZEISS CARL SMT GMBH·Filed 2013·Granted Nov 4, 2014·3 cites·20 claims
- 0768US8199315B2Projection objective for semiconductor lithographyRIEF KLAUS·Filed 2008·Granted Jun 12, 2012·4 cites·44 claims
- 0866US2025298217A1Mirror socket, optical system and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0965US7609464B2Holding device for an optical element with support force equalizationZEISS CARL SMT AG·Filed 2007·Granted Oct 27, 2009·6 cites·42 claims
- 1063US5839527AMulti-axle steering system for vehiclesZAHNRADFABRIK FRIEDRICHSHAFEN·Filed 1995·Granted Nov 24, 1998·17 cites·15 claims
- 1158US2009141258A1Imaging Device in a Projection Exposure MachineZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 1253US5799259AVehicle with steerable front and rear wheelsZAHNRADFABRIK FRIEDRICHSHAFEN·Filed 1994·Granted Aug 25, 1998·17 cites·8 claims
- 1350US8514371B2Imaging device in a projection exposure facilityHUMMEL WOLFGANG·Filed 2011·Granted Aug 20, 2013·0 cites·20 claims
- 1448US2013038848A1Optical devices having kinematic componentsZEISS CARL SMT GMBH·Filed 2012·Application pending·0 cites
- 1545US2010128367A1Projection objective for a microlithography apparatus and methodZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 1644US2008117397A1Optical devices having kinemtaic componentsZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →