Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus

Abstract

This invention presents a method and an apparatus for manufacturing a magnetic recording disk, where steps from magnetic-film deposition to lubricant-layer preparation are carried out without vacuum breaking. The invention also presents a method and an apparatus for manufacturing a magnetic recording disk, where a substrate is cleaned prior to the lubricant-layer preparation. The invention also presents a method and an apparatus for manufacturing a magnetic recording disk, where burnishing is carried out in vacuum after the magnetic-film deposition. The invention also presents a method and an apparatus for manufacturing a magnetic recording disk, where post-preparation treatment to coordinate adhesive strength and surface lubricity of the lubricant layer is carried out in vacuum. The invention also presents an in-line type substrate processing apparatus comprising a plurality of vacuum chambers provided along each of a plurality of circumventive transfer paths, a connection transfer path connecting at least two of the circumventive transfer paths, and a transfer system that transfers a substrate to be processed along the circumventive transfer paths and transfers the substrate along the connection transfer path without exposing the substrate to the atmosphere.

1 . A method for manufacturing a magnetic recording disk, comprising; 
 depositing a magnetic film for a recording layer on a substrate in a magnetic-film deposition camper,    transferring said substrate from said magnetic-film deposition chamber to a lubricant-layer preparation chamber without exposing said substrate to the atmosphere, and    preparing a lubricant layer on said substrate in said lubricant-layer preparation chamber.    
   
   
       2 . A method for manufacturing a magnetic recording disk, comprising: 
 a magnetic-film deposition step where a magnetic film for a recording layer is deposited on a substrate,    a lubricant-layer preparation step where a lubricant layer is prepared on said substrate after said magnetic-film deposition step, and    a cleaning step where said substrate is cleaned in vacuum after said magnetic-film deposition step before said lubricant-layer preparation step.    
   
   
       3 . A method for manufacturing a magnetic recording disk, as claimed in  claim 2 , wherein; 
 in said cleaning step, contaminants adhering to said substrate are removed by oxidizing said contaminants into volatile oxides, utilizing reaction with oxygen ion or activated oxygen produced in oxygen plasma generated at a space facing to said substrate.    
   
   
       4 . A method for manufacturing a magnetic recording disk, as claimed in  claim 2 , wherein; 
 in said cleaning step, contaminants adhering to said substrate are removed by energy of laser beam irradiated onto said substrate.    
   
   
       5 . A method for manufacturing a magnetic recording disk, as claimed in  claim 2 , wherein; 
 in said cleaning step, gas is blown onto said substrate, thereby blowing away contaminants awing to said substrate.    
   
   
       6 . A method for manufacturing a magnetic recording disk, as claimed in  claim 2 ,  3 ,  4 , or  5 , wherein; 
 from said cleaning step to said lubricant-layer preparation step, said substrate is not exposed to the atmosphere.    
   
   
       7 . A method for manufacturing a magnetic recording disk comprising; 
 a magnetic-film deposition step where a magnetic film for a recording layer is deposited on a substrate, and    a burnishing step where protrusions on said substage are removed,    said burnishing step being carried out in vacuum.    
   
   
       8 . A method for manufacturing a magnetic recording disk, as claimed in  claim 7 , wherein; 
 from said magnetic-film deposition step to said burnishing step, said substrate is not exposed to the atmosphere.    
   
   
       9 . A method for manufacturing a magnetic recording disk, as claimed in  claim 7  or  8 , wherein; 
 in said burnishing step, a burnishing tape is rubbed said substrate with, and    said burnishing tape is used after cleaning in vacuum.    
   
   
       10 . A method for manufacturing a magnetic recording disk comprising: 
 a magnetic-film deposition step where a magnetic film for a recording layer is deposited on a substage;    a lubricant-layer preparation step where a lubricant layer is prepared on send substrate after said magnetic-film deposition step; and    a burnishing step where protrusions on said substrate are removed are carried out simultaneously after said magnetic-film deposition step;    said burnishing being step carried out by rubbing said substrate with a burnishing tape;    said lubricant-layer preparation step being carried out by pouring lubricant on said burnishing tape, and extending said lubricant on said substrate as said burnishing tape is rubbed with.    
   
   
       11 . A method for manufacturing a magnetic recording disk, as claimed in  claim 10 , wherein; 
 prior to said burnishing in said burnishing, a surface of said burnishing tape is cleaned in vacuum.    
   
   
       12 . A method fox manufacturing a magnetic recording disk, as claimed in  claim 10  or  11 , wherein; 
 said lubricant is poured without diluting with solvent.    
   
   
       13 . A method for manufacturing a magnetic recording disk, as claimed in  claim 10  or  11 , wherein; 
 said burnishing and said lubricant-layer preparation are carried out in vacuum.    
   
   
       14 . A method for manufacturing a magnetic recording disk, as claimed in  claim 12 , wherein; 
 said burnishing and said lubricant-layer preparation are carried out in vacuum.    
   
   
       15 . A method for manufacturing a magnetic recording disk, comprising: 
 a magnetic-film deposition step where a magnetic film for a recording layer is deposited on a substrate;    a lubricant-layer preparation step where a lubricant layer is prepared on said substrate after said magnetic-film deposition step;    a post-preparation treatment step where adhesive strength and surface lubricity of said lubricant layer are coordinated by healing or irradiating said lubricant layer;    said post-preparation treatment step being carried out in vacuum.    
   
   
       16 . A method for manufacturing a magnetic recording disk, as claimed in  claim 15 , wherein; 
 from said lubricant-layer preparation step to said post-preparation treatment step, said substrate is not exposed to the atmosphere.    
   
   
       17 . An apparatus for manufacturing a magnetic recording disk, comprising: 
 a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate;    a lubricant-layer preparation chamber in which a lubricant layer is prepared on said substrate in vacuum; and    a transfer system that transfers said substrate from said magnetic-film deposition chamber to said lubricant-layer preparation chamber without exposing said substrate to the atmosphere.    
   
   
       18 . An apparatus for manufacturing a magnetic recording disk comprising: 
 a magnetic-film deposition chamber in which a magnetic film for a recording in layer is deposited on a substrate;    a lubricant-layer preparation chamber in which a lubricant layer is prepared on said substrate in vacuum; and    a cleaning chamber in which said substrate is cleaned in vacuum after deposition in said magnetic-film chamber and before preparation in said lubricant-layer chamber.    
   
   
       19 . An apparatus for manufacturing a magnetic recording disk, as claimed in  claim 18 , wherein; 
 in said cleaning chamber, contaminants adhering to said substrate are removed by oxidizing said contaminants into volatile oxides, utilizing reaction with oxygen ion or activated oxygen produced in oxygen plasma generated at a space facing to said substrate.    
   
   
       20 . An apparatus for manufacturing a magnetic recording disk, as claimed in clam  18 , wherein; 
 in said cleaning chamber, contaminants adhering to said substrate are removed by energy of laser beam irradiated onto said substrate.    
   
   
       21 . An apparatus for manufacturing a magnetic recording disk, as claimed in  claim 18 , wherein; 
 in said cleaning chamber, gas is blown onto said substrate, thereby contaminants adhering to said substrate are blown away from said substrate.    
   
   
       22 . An apparatus for manufacturing a magnetic recording disk, as claimed in clam  17 ,  18 ,  19 , or  20 , comprising; 
 a transfer system that transfers said substrate from said cleaning chamber to said lubricant-layer preparation chamber without exposing said substrate to the atmosphere.    
   
   
       23 . An apparatus for manufacturing a magnetic recording disk comprising: 
 a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited;    an overcoat deposition chamber in which an overcoat is deposited on said substrate after said magnetic-film deposition; and    a transfer system that transfers said substrate from said magnetic-film deposition chamber to said overcoat deposition chamber without exposing said substrate to the atmosphere;    said overcoat deposition chamber comprising a means for generating plasma in which oxygen ion or activated oxygen is produced;    said oxygen ion or said activated oxygen oxidizing contaminants on said substrate into volatile oxides, thereby removing said contaminants.    
   
   
       24 . An apparatus for manufacturing a magnetic recording disk, comprising: 
 a magnetic-film deposition chamber in which a magnetic film for a recoding layer is deposited; and    a burnishing chamber in which a burnishing is carried out in vacuum after said magnetic-film deposition.    said burnishing being a step where protrusions on said substrate are removed.    
   
   
       25 . An apparatus for manufacturing a magnetic recording disk, as claimed in  claim 23 , comprising; 
 a lubricant-layer preparation chamber in which a lubricant layer is prepared on said substrate after said burnishing, and    a transfer system that transfers said substrate from said burnishing chamber to said lubricant-layer preparation chamber without exposing said substrate to the atmosphere.    
   
   
       26 . An apparatus for manufacturing a magnetic recording disk, as claimed in  claim 23  or  24 , wherein 
 said burnishing chamber comprises a burnishing tape that is rubbed said substrate with for said burnishing, and    a cleaning means for cleaning a surface of said burnishing tape prior to said burnishing is provided.    
   
   
       27 . An apparatus for manufacturing a magnetic recording disk, comprising; 
 a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited, and    a burnishing-preparation chamber in which a burnishing and a lubricant-layer preparation are carried out after said magnetic-film deposition,    said burnishing being a step where protrusions on said substrate are removed,    said lubricant-layer preparation being a step where a lubricant-layer is prepared on said substrate.    
   
   
       28 . An apparatus for manufacturing a magnetic recording disk, as claimed in  claim 27 , wherein; 
 said burnishing-preparation chamber comprises; 
 a burnishing tape that is rubbed said substrate with thereby removing said protrusions, and  
 a lubricant coater that pours said lubricant on said burnishing being rubbed said substrate with, thereby coating said lubricant on said substrate.  
   
   
   
       29 . An apparatus for manufacturing a magnetic recording disk, as claimed in  claim 27 , comprising; 
 a cleaning means for cleaning a surface of said burnishing tape in vacuum prior to said burnishing.    
   
   
       30 . An apparatus for manufacturing a magnetic recording disk, as claimed in  claim 28  or  29 , wherein; 
 said lubricant coater coats said lubricant without diluting said lubricant with solvent.    
   
   
       31 . An apparatus for manufacturing a magnetic recording disk, as claimed in  claim 28  or  29 , wherein; 
 said burnishing and said lubricant-layer preparation are carried out at a vacuum pressure.    
   
   
       32 . An apparatus for manufacturing a magnetic recording disk, as claimed in  claim 30 , wherein; 
 said burnishing and said lubricant-layer preparation are carried out at a vacuum pressure.    
   
   
       33 . An apparatus for manufacturing a magnetic recording disk, comprising; 
 a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited,    a lubricant-layer preparation chamber in which a lubricant layer is prepared on said substrate after said magnetic-film deposition, and    a post-preparation treatment chamber in which a post-preparation treatment is carried out onto said substrate in vacuum,    said post-preparation treatment being a step to coordinate adhesive strength and surface lubricity of said lubricant layer by heating or irradiating said lubricant layer.    
   
   
       34 . An apparatus for manufacturing a magnetic recording disk, as claimed in  claim 33 , comprising 
 a transfer system that transfers said substrate from said lubricant-layer preparation chamber to said post-preparation treatment chamber without exposing said substrate to the atmosphere.    
   
   
       35 . An in-line type substrate processing apparatus, comprising: 
 a plurality of circumventive transfer paths;    a plurality of vacuum chambers provided along said transfer paths;    a connection transfer path connecting at least two of said circumventive transfer paths; and    a transfer system that transfers a substrate to be processed along said circumventive transfer paths, and transfers said substrate along said connection transfer path without exposing said substrate to the atmosphere.