Inventor · disambiguated record
Shinji Furukawa
Also filed as: FURUKAWA SHINJI
34 granted patents·11 pending applications·239 citations·filing 1986–2021
97Inventor score
Top patents by PatentIndex Score
45 records- 0192US9551060B2Film forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 2015·Granted Jan 24, 2017·6 cites·12 claims
- 0291US8837924B2Vacuum heating/cooling apparatus and manufacturing method of magnetoresistance elementTSUNEKAWA KOJI·Filed 2011·Granted Sep 16, 2014·14 cites·6 claims
- 0390US9790590B2Vacuum-processing apparatus, vacuum-processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted Oct 17, 2017·6 cites·8 claims
- 0486US6572934B2Method for manufacturing a magnetic recording diskANELVA CORP·Filed 2001·Granted Jun 3, 2003·20 cites·26 claims
- 0584US10468237B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Nov 5, 2019·3 cites·6 claims
- 0684US7935187B2Film forming apparatusANELVA CORP·Filed 2008·Granted May 3, 2011·4 cites·12 claims
- 0783US8932438B2Method of manufacturing magnetoresistive element, sputter deposition chamber, apparatus for manufacturing magnetoresistive element having sputter deposition chamber, program and storage mediumTSUNEKAWA KOJI·Filed 2010·Granted Jan 13, 2015·6 cites·6 claims
- 0883US6740209B2Multilayer film deposition apparatus, and method and apparatus for manufacturing perpendicular-magnetic-recording mediaANELVA CORP·Filed 2002·Granted May 25, 2004·23 cites·21 claims
- 0981US10049860B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Aug 14, 2018·4 cites·9 claims
- 1074US7625450B2Film forming apparatusCANON ANELVA CORP·Filed 2004·Granted Dec 1, 2009·9 cites·13 claims
- 1173US5181020AThin-film magnetic material and process of production thereofUNITIKA LTD·Filed 1991·Granted Jan 19, 1993·53 cites·25 claims
- 1272US10068798B2Method and processing apparatus for performing pre-treatment to form copper wiring in recess formed in substrateTOKYO ELECTRON LTD·Filed 2017·Granted Sep 4, 2018·1 cites·4 claims
- 1371US10189230B2Method for forming copper filmTOKYO ELECTRON LTD·Filed 2017·Granted Jan 29, 2019·1 cites·5 claims
- 1470US9567667B2Dual-target sputter deposition with controlled phase difference between target powersTOKYO ELECTRON LTD·Filed 2014·Granted Feb 14, 2017·2 cites·18 claims
- 1569US8715417B2Film forming apparatusCANON ANELVA CORP·Filed 2013·Granted May 6, 2014·0 cites·5 claims
- 1669US7824497B2Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatusCANON ANELVA CORP·Filed 2008·Granted Nov 2, 2010·6 cites·8 claims
- 1768US2009151634A1Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing ApparatusCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 1867US7731825B2Manufacturing apparatus of magnetoresistance elementsCANON ANELVA CORP·Filed 2005·Granted Jun 8, 2010·2 cites·4 claims
- 1966US9362167B2Method of supplying cobalt to recessTOKYO ELECTRON LTD·Filed 2015·Granted Jun 7, 2016·1 cites·6 claims
- 2064US8377210B2Film forming apparatusANELVA CORP·Filed 2011·Granted Feb 19, 2013·0 cites·1 claims
- 2163US6154028AMiniature magnetic sensor device using an inductor deviceUNITIKA LTD·Filed 1998·Granted Nov 28, 2000·27 cites·5 claims
- 2259US6872285B2System for depositing a filmANELVA CORP·Filed 2002·Granted Mar 29, 2005·4 cites·11 claims
- 2355US2009139855A1Manufacturing method and manufacturing apparatus of magnetoresistance elementsCANON ANELVA CORP·Filed 2008·Application pending·0 cites
- 2453US8147924B2Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatusWATANABE NAOKI·Filed 2008·Granted Apr 3, 2012·2 cites·9 claims
- 2552US5605768AMagnetic marker and manufacturing method thereforUNITIKA LTD·Filed 1995·Granted Feb 25, 1997·22 cites·17 claims
- 2652US4657604AFine amorphous metal wiresUNITIKA LTD·Filed 1986·Granted Apr 14, 1987·10 cites·10 claims
- 2750US11410837B2Film-forming deviceTOKYO ELECTRON LTD·Filed 2017·Granted Aug 9, 2022·0 cites·3 claims
- 2850US8049793B2Image processing apparatus including image extraction unit, method thereof, and recording mediumSONY CORP·Filed 2010·Granted Nov 1, 2011·0 cites·15 claims
- 2950US7750953B2Image processing apparatus, method thereof, and recording mediumSONY CORP·Filed 2003·Granted Jul 6, 2010·2 cites·14 claims
- 3049US2017317273A1Method for Forming Perpendicular Magnetization Type Magnetic Tunnel Junction Element and Apparatus for Producing Perpendicular Magnetization Type Magnetic Tunnel Junction ElementTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 3146US11469106B2Hard mask and hard mask forming methodTOKYO ELECTRON LTD·Filed 2017·Granted Oct 11, 2022·0 cites·6 claims
- 3245US9001236B2Image processing apparatus, method, and recording medium for extracting images from a composite image fileFURUKAWA SHINJI·Filed 2011·Granted Apr 7, 2015·0 cites·8 claims
- 3345US2023167542A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 3444US2015114835A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 3544US2020227273A1Hard mask and semiconductor device manufacturing methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 3643US10910215B2Method of forming later insulating films for MTJTOKYO ELECTRON LTD·Filed 2017·Granted Feb 2, 2021·0 cites·5 claims
- 3739US2007234958A1Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing ApparatusNIHON MICRO COATING CO INC·Filed 2007·Application pending·0 cites
- 3837US2001033457A1Magnetic recording disk, and method and system for manufacturing a magnetic recording diskFiled 2001·Application pending·0 cites
- 3935US5989691AMagnetic elementUNITIKA LTD·Filed 1997·Granted Nov 23, 1999·4 cites·25 claims
- 4033US4657605AFine amorphous metal wiresUNITIKA LTD·Filed 1986·Granted Apr 14, 1987·3 cites·12 claims
- 4133US2005103271A1Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatusFiled 2004·Application pending·0 cites
- 4233US2003200927A1Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatusFiled 2003·Application pending·0 cites
- 4332US5932310AMagnetic element and process for producing the sameUNITIKA LTD·Filed 1997·Granted Aug 3, 1999·4 cites·29 claims
- 4430US2016071707A1Processing apparatusTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 4527US5912075AMagnetic marker and process for manufacturing a roll having a plurality of magnetic markers arranged transversely thereonUNITIKA LTD·Filed 1996·Granted Jun 15, 1999·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →