Multi-tip surface cantilever probe

Abstract

In order to establish processing techniques capable of making multi-tip probes with sub-micron intervals and provide such microscopic multi-tip probes, there is provided an outermost surface analysis apparatus for semiconductor devices etc. provided with a function for enabling positioning to be performed in such a manner that there is no influence on measurement in electrical measurements, at an extremely small region using this microscopic multi-tip probe, and there are provided the steps of making a cantilever 1 formed with a plurality of electrodes 3 using lithographic techniques, and forming microscopic electrodes 6 minute in pitch by sputtering or gas-assisted etching a distal end of the cantilever 1 using a focused charged particle beam or using CVD.

1 - 18 . (canceled)  
   
   
       19 . A multi-tip probe for use with a scanning probe apparatus, comprising: 
 a cantilever formed using lithographic techniques;    a plurality of lead portions formed on the cantilever; and    a plurality of electrodes formed using focused ion beam techniques and connected to respective ones of the lead portions,    wherein the pitch between the electrodes is narrower than the pitch between the lead portions, and    wherein the lead portions and the electrodes lie in the same plane at a distal end portion of the cantilever.    
   
   
       20 . A multi-tip probe for use with a scanning probe apparatus, comprising: 
 a cantilever formed using lithographic techniques;    a plurality of lead portions formed on the cantilever; and    a plurality of electrodes formed using focused ion beam techniques and connected to respective ones of the lead portions,    wherein the pitch between the electrodes is narrower than the pitch between the lead portions, and    wherein the cantilever has two opposed major surfaces, and the lead portions and the electrodes are disposed entirely on one of the two opposed major surfaces.    
   
   
       21 . A multi-tip probe according to  claim 20;  wherein the electrodes are spaced apart less than one micron from one another.  
   
   
       22 . A multi-tip probe for use with a scanning probe apparatus, comprising: 
 a cantilever formed using lithographic techniques;    a plurality of lead portions formed on the cantilever; and    a plurality of electrodes formed using focused ion beam techniques and connected to respective ones of the lead portions, wherein the pitch between the electrodes is narrower than the pitch between the lead portions, and the electrodes are spaced apart less than one micron from one another.    
   
   
       23 . A multi-tip probe for use with a scanning probe apparatus, comprising: 
 a cantilever formed using lithographic techniques;    a plurality of lead portions formed on the cantilever;    a plurality of electrodes formed using focused ion beam techniques and connected to respective ones of the lead portions, wherein the pitch between the electrodes is narrower than the pitch between the lead portions; and    an electrically conductive needle projecting outwardly from a distal end portion of each electrode.    
   
   
       24 . A multi-tip probe according to  claim 23;  wherein the needles have a curved shape.  
   
   
       25 . A multi-tip probe according to  claim 24;  wherein the needles have sufficient resiliency to enable them to exert a constant contact pressure on a sample during use of the multi-tip probe.  
   
   
       26 . A multi-tip probe for use with a scanning probe apparatus, comprising: a cantilever having a distal end portion and two opposed major surfaces; plural conductive lead portions extending lengthwise along one major surface of the cantilever; and plural electrodes disposed on the one major surface of the cantilever at the distal end portion thereof and connected to respective ones of the lead portions, the electrodes having distal ends spaced apart less than one micron from one another.  
   
   
       27 . A multi-tip probe according to  claim 26;  wherein the lead portions and the electrodes constitute portions of a common conductive film.  
   
   
       28 . A multi-tip probe according to  claim 26;  wherein the distal end portion of the cantilever tapers inwardly in a direction toward the distal end portion.  
   
   
       29 . A multi-tip probe according to  claim 26;  further including a conductive needle connected to and projecting outwardly from a distal end portion of each electrode.  
   
   
       30 . A multi-tip probe according to  claim 29;  wherein the needles are generally perpendicular to the one major surface of the cantilever.  
   
   
       31 . A multi-tip probe according to  claim 29;  wherein the needles have a curved shape.  
   
   
       32 . A multi-tip probe according to  claim 26;  wherein the distal end portion of the cantilever terminates in a protrusion that protrudes upwardly from and constitutes a continuation of the one major surface of the cantilever, and the electrodes extend along the protrusion.  
   
   
       33 . A multi-tip probe according to  claim 32;  wherein the protrusion has a crest, and the distal ends of the electrodes terminate at the crest.