Methods and apparatus for pfc abatement using a cdo chamber

Abstract

In some aspects, an apparatus is provided for abating perfluorocarbons (PFCs) in a controlled decomposition oxidation (CDO) thermal reaction chamber. The apparatus includes (1) a cartridge insertable into the thermal reaction chamber having gas-permeable first and second ends and including a catalyst material; and (2) thermally-conductive fixtures positioned within the cartridge. Numerous other aspects are provided.

1 . An apparatus for abating perfluorocarbons (PFCs) in a controlled decomposition oxidation (CDO) thermal reaction chamber comprising: 
 a cartridge insertable into the thermal reaction chamber having gas-permeable first and second ends and including a catalyst material; and    thermally-conductive fixtures positioned within the cartridge.    
     
     
         2 . The apparatus of  claim 1 , wherein the thermally-conductive features comprise vertically-extending thermal fins arranged radially within the cartridge.  
     
     
         3 . The apparatus of  claim 1 , wherein the cartridge includes porous structures that allow the gaseous waste stream to travel through the catalyst material.  
     
     
         4 . The apparatus of  claim 1 , wherein the catalyst material includes one or more of: ceramics; oxides of calcium, magnesium, barium, strontium, iron, tungsten, cobalt, aluminum, zirconium, titanium, silicon, vanadium and tin; hydroxides of calcium, magnesium, barium, and strontium; carbonates of calcium, magnesium, barium, and strontium; nitrates of calcium, magnesium, barium, and strontium; phosphates of aluminum, boron, an alkali earth metal, titanium, zirconium, lanthanum, cerium, yttrium, a rare earth metal, vanadium, niobium, chromium, manganese, iron, cobalt and nickel; a metal of groups 4 to 14 of the periodic table; platinum; palladium; rhodium; gamma alumina; and cerium.  
     
     
         5 . The apparatus of  claim 4 , wherein the catalyst material is formed as one or more of: rings, pellets, beads, barrels and a honeycomb structure.  
     
     
         6 . The apparatus of  claim 1 , wherein the catalyst material includes inverse spinal structure manganese.  
     
     
         7 . The apparatus of  claim 1 , wherein the cartridge includes a support structure having catalytic surfaces that support catalyst material.  
     
     
         8 . The apparatus of  claim 7 , wherein the catalytic surfaces are coated with one or more of: oxides of zirconium, aluminum, titanium.  
     
     
         9 . The apparatus of  claim 7 , wherein the catalytic surfaces are impregnated with catalytic metals.  
     
     
         10 . The apparatus of  claim 7 , wherein the support structure comprises a honeycomb member.  
     
     
         11 . The apparatus of  claim 1 , wherein the cartridge has an interior volume of approximately 4.7 to 6.4 liters.  
     
     
         12 . The apparatus of  claim 1 , wherein the cartridge comprises an annular catalyst bed having an outer porous liner and an inner porous liner, the inner porous liner positioned within a central region of the thermal reaction chamber so as to define an inner plenum.  
     
     
         13 . The apparatus of  claim 12 , wherein a gaseous waste stream introduced into the thermal reaction chamber may flow freely through the outer porous liner through the catalyst bed and into the inner plenum.  
     
     
         14 . An apparatus for abating perfluorocarbons (PFCs) in a controlled decomposition oxidation thermal reaction chamber comprising: 
 a cartridge insertable into the thermal reaction chamber having gas-permeable first and second ends and including a catalyst material.    
     
     
         15 . The apparatus of  claim 14 , wherein the cartridge includes porous structures that allow the gaseous waste stream to travel through the catalyst material.  
     
     
         16 . The apparatus of  claim 14 , wherein the catalyst material includes one or more of: ceramics; oxides of calcium, magnesium, barium, strontium, iron, tungsten, cobalt, aluminum, zirconium, titanium, silicon, vanadium and tin; hydroxides of calcium, magnesium, barium, and strontium; carbonates of calcium, magnesium, barium, and strontium; nitrates of calcium, magnesium, barium, and strontium; phosphates of aluminum, boron, an alkali earth metal, titanium, zirconium, lanthanum, cerium, yttrium, a rare earth metal, vanadium, niobium, chromium, manganese, iron, cobalt and nickel; a metal of groups 4 to 14 of the periodic table; platinum; palladium; rhodium; gamma alumina; and cerium.  
     
     
         17 . The apparatus of  claim 16 , wherein the catalyst material is formed as one or more of: rings, pellets, beads, barrels and a honeycomb structure.  
     
     
         18 . The apparatus of  claim 14 , wherein the catalyst material includes inverse spinal structure manganese.  
     
     
         19 . The apparatus of  claim 14 , wherein the cartridge includes a support structure having catalytic surfaces that support catalyst material.  
     
     
         20 . The apparatus of  claim 19 , wherein the catalytic surfaces are coated with one or more of: oxides of zirconium, aluminum, titanium.  
     
     
         21 . The apparatus of  claim 19 , wherein the catalytic surfaces are impregnated with catalytic metals.  
     
     
         22 . The apparatus of  claim 19 , wherein the support structure comprises a honeycomb member.  
     
     
         23 . The apparatus of  claim 14 , wherein the cartridge has an interior volume of approximately 4.7 to 6.4 liters.  
     
     
         24 . The apparatus of  claim 14 , wherein the cartridge comprises an annular catalyst bed having an outer porous liner and an inner porous liner, the inner porous liner positioned within a central region of the thermal reaction chamber so as to define an inner plenum.  
     
     
         25 . The apparatus of  claim 24 , wherein a gaseous waste stream introduced into the thermal reaction chamber may flow freely through the outer porous liner through the catalyst bed and into the inner plenum.  
     
     
         26 . An apparatus for abating perfluorocarbons (PFCs) in a controlled decomposition oxidation (CDO) thermal reaction chamber comprising: 
 an annular catalyst bed embedded in the thermal reaction chamber having an outer porous liner and an inner porous liner, the inner porous liner positioned within a central region of the thermal reaction chamber so as to define an inner plenum;    wherein a gaseous waste stream introduced into the thermal reaction chamber may flow through the outer porous liner through the catalyst bed and into the inner plenum.    
     
     
         27 . The apparatus of  claim 26 , wherein the catalyst bed includes catalyst material positioned between the outer and inner porous liners.  
     
     
         28 . The apparatus of  claim 27 , wherein the catalyst material comprises a high-surface area catalyst support including porous yttrium doped, zirconia stabilized alumina.  
     
     
         29 . The apparatus of  claim 28 , wherein the catalyst support is formed using at least one of cylinders and disks.  
     
     
         30 . The apparatus of  claim 27 , further comprising: 
 an electromagnetic radiation generator adapted to direct electromagnetic energy onto the catalyst material so as to increase a reactivity of the catalyst material.    
     
     
         31 . The apparatus of  claim 30 , wherein the electromagnetic radiation generator is adapted to emit pulsed microwaves.  
     
     
         32 . An apparatus for abating perfluorocarbons (PFCs) in a gaseous waste stream comprising: 
 a controlled decomposition oxidation (CDO) thermal reaction chamber having an inlet adapted to receive the gaseous waste stream; and    a catalyst bed including a catalyst material positioned within the CDO thermal reaction chamber so as to expose the gaseous waste stream to the catalyst material.    
     
     
         33 . The apparatus of  claim 32 , wherein the catalyst bed comprises a cartridge.  
     
     
         34 . The apparatus of  claim 33 , wherein the cartridge is insertable into the CDO thermal reaction chamber and includes gas-permeable first and second ends, and thermally-conductive fixtures extending through the cartridge.  
     
     
         35 . The apparatus of  claim 34 , wherein the thermally-conductive features comprise fins arranged radially within the cartridge.  
     
     
         36 . The apparatus of  claim 33 , further comprising: 
 a heating device positioned proximate to and upstream from the inlet of the CDO thermal reaction chamber adapted to pre-heat the gaseous waste stream before the gaseous waste stream enters the CDO thermal reaction chamber.    
     
     
         37 . The apparatus of  claim 36 , wherein the heating device comprises an electric heater.  
     
     
         38 . The apparatus of  claim 36 , wherein the heating device comprises: 
 a chamber through which the gaseous waste stream is conveyed coupled to and adapted to receive combustible fuel supplied from a combustible fuel source; and    a pilot device positioned within the chamber adapted to ignite combustible fuel provided to the chamber.    
     
     
         39 . The apparatus of  claim 36 , wherein the heating device comprises a heat exchanger.  
     
     
         40 . The apparatus of  claim 39 , further comprising: 
 a first conduit adapted to convey the gaseous waste stream to the CDO thermal reaction chamber, the heat exchanger positioned in the first conduit proximate to the inlet of the CDO thermal reaction chamber; and    a second conduit having a first end coupled to the catalyst bed and a second end coupled to the heat exchanger.    
     
     
         41 . The apparatus of  claim 33 , wherein the catalyst material includes one or more of: ceramics; oxides of calcium, magnesium, barium, strontium, iron, tungsten, cobalt, aluminum, zirconium, titanium, silicon, vanadium and tin; hydroxides of calcium, magnesium, barium, and strontium; carbonates of calcium, magnesium, barium, and strontium; nitrates of calcium, magnesium, barium, and strontium; phosphates of aluminum, boron, an alkali earth metal, titanium, zirconium, lanthanum, cerium, yttrium, a rare earth metal, vanadium, niobium, chromium, manganese, iron, cobalt and nickel; a metal of groups 4 to 14 of the periodic table; platinum; palladium; rhodium; gamma alumina; and cerium.  
     
     
         42 . The apparatus of  claim 41 , wherein the catalyst material is formed as one or more of: rings, pellets, beads, barrels and a honeycomb structure.  
     
     
         43 . The apparatus of  claim 33 , wherein the catalyst material includes inverse spinal structure manganese.  
     
     
         44 . The apparatus of  claim 33 , wherein the cartridge includes a support structure having catalytic surfaces that support catalyst material.  
     
     
         45 . The apparatus of  claim 44 , wherein the support structure comprises a honeycomb member.  
     
     
         46 . The apparatus of  claim 33 , wherein the cartridge comprises an annular catalyst bed having an outer porous liner and an inner porous liner, the inner porous liner positioned within a central region of the CDO thermal reaction chamber so as to define an inner plenum.  
     
     
         47 . The apparatus of  claim 46 , wherein a gaseous waste stream introduced into the CDO thermal reaction chamber may flow through the outer porous liner through the catalyst bed and into the inner plenum.  
     
     
         48 . The apparatus of  claim 33 , wherein the cartridge has an interior volume of approximately 4.7 to 6.4 liters.