Ultrasonic cleaning apparatus

Abstract

An ultrasonic cleaning apparatus which cleans a material at a surface by supplying an ultrasonic wave from an ultrasonic wave application head to a cleaning liquid on the surface, and cleans the surface, wherein the ultrasonic wave application head has an ultrasonic wave transmission member which is provided opposite the surface, and has a curved portion on a first plane placed close to the surface, an ultrasonic transducer which is provided on a second plane placed opposite the first plane of the ultrasonic wave transmission member, and generates and applies an ultrasonic wave to a cleaning liquid on the surface through the ultrasonic wave transmission member, and a preventive portion which is provided in the ultrasonic wave transmission member, and prevents the ultrasonic wave applied to the cleaning liquid and reflected on the surface from entering the ultrasonic transducer through the ultrasonic wave transmission member.

1 . An ultrasonic cleaning apparatus comprising an ultrasonic wave application head which cleans a material at a surface by applying an ultrasonic wave to a cleaning liquid supplied to the surface, the ultrasonic wave application head comprising: 
 an ultrasonic wave transmission member which is placed opposite to the surface and has a curved portion on a first plane placed close to the surface;    an ultrasonic transducer which is provided on a second plane opposite to the first plane of the ultrasonic transmission member, and generates and applies an ultrasonic wave to the cleaning liquid on the surface through the ultrasonic wave transmission member; and    a preventive portion which is provided in the ultrasonic wave transmission member and prevents the ultrasonic wave applied to the cleaning liquid and reflected on the surface from entering the ultrasonic transducer through the ultrasonic wave transmission member.