Processing apparatus and processing method

Abstract

A processing apparatus according to the present invention comprises: a container 3 that contains a plurality of objects to be processed w, the container including an outlet port 3 a formed in a front surface thereof for taking out the object to be processed w, and a lid 3 b for hermetically sealing the outlet port 3 a; a loading area Sa into which the container 3 is loaded; a conveying area Sb whose atmosphere differs from an atmosphere in the loading area Sa; a partition wall 6 that separates the loading area Sa and the conveying area Sb from each other, and has an opening 13; a door 14 for opening and closing the opening 13 in the partition wall 6; and a stage 10 for placing the container 3 at a position near the opening 13 in the loading area Sa. Parts to be pressed 20 are provided on opposite sides on a side of the front surface of the container 3. The partition wall 6 is provided with a pressing and holding mechanism 23 having a pressing roller 22 that rides on the part to be pressed 20 of the container 3 from a lateral side to press the container 3 against the opening 13 in the partition wall 6 and hold the container 3 tightly in place.

1 . A processing apparatus comprising: 
 a container that contains a plurality of objects to be processed, the container including an outlet port formed in a front surface thereof for taking out the object to be processed, and a lid for hermetically sealing the outlet port;    a loading area into which the container is loaded;    a conveying area whose atmosphere differs from an atmosphere in the loading area;    a partition wall that separates the loading area and the conveying area from each other, and has an opening;    a door for opening and closing the opening in the partition wall; and    a stage for placing the container at a position near the opening in the loading area;    wherein parts to be pressed are provided on opposite sides on a side of the front surface of the container, and    the partition wall is provided with a pressing and holding mechanism having a pressing roller that rides on the part to be pressed of the container from a lateral side to press the container against the opening in the partition wall and hold the container tightly in place.    
   
   
       2 . The processing apparatus according to  claim 1 , 
 wherein the pressing and holding mechanism includes: a vertically extended rotating shaft rotatably supported on the partition wall via a bracket; a flat spring member radially extended from the rotating shaft, the flat spring member holding the pressing roller at a distal end, and forwardly pressing and urging the pressing roller; and a driving part for rotating the rotating shaft.    
   
   
       3 . The processing apparatus according to  claim 2 , 
 wherein at least the pair of upper and lower pressing rollers are connected with the rotating shaft through the flat spring members.    
   
   
       4 . The processing apparatus according to  claim 1 , 
 wherein an atmosphere in the conveying area is an inert gas, and    a pressure in the conveying area is set higher than a pressure in the loading area.    
   
   
       5 . The processing apparatus according to  claim 1 , further comprising a guiding surface disposed on a rear surface of the partition wall on a side of the loading area, the guiding surface guiding the pressing roller of the pressing and holding mechanism positioned at a standby position toward the part to be pressed of the container.  
   
   
       6 . The processing apparatus according to  claim 2 , further comprising a restricting member extended from the rotating shaft along an outer surface of the flat spring member, the restricting member supporting the flat spring member from a side of the outer surface when the pressing roller rides on the part to be pressed of the container from a lateral side.  
   
   
       7 . The processing apparatus according to  claim 1 , further comprising a sealing member disposed on a rear surface of the partition wall on a side of the loading area, the sealing member sealing a gap between the partition wall and the container, when the container is brought into contact with the opening.  
   
   
       8 . The processing apparatus according to  claim 1 , further comprising an inert gas introducing passage disposed in the partition wall, the inert gas introducing passage introducing an inert gas into the container, when the lid of the container is opened while the door is being closed.  
   
   
       9 . The processing apparatus according to  claim 1 , 
 wherein the parts to be pressed are formed of flange portions projecting from a front surface of the container in opposite directions.    
   
   
       10 . The processing apparatus according to  claim 1 , 
 wherein the parts to be pressed are formed of recesses provided in opposite sides on a side of the front surface of the container.    
   
   
       11 . The processing apparatus according to  claim 1 , 
 wherein the flat spring member is made of stainless, and    the pressing roller is made of a fluorocarbon resin.    
   
   
       12 . A processing method using a processing apparatus comprising a container that contains a plurality of objects to be processed, the container including an outlet port formed in a front surface thereof for taking out the object to be processed, and a lid for hermetically sealing the outlet port; a loading area into which the container is loaded; a conveying area whose atmosphere differs from an atmosphere in the loading area; a partition wall that separates the loading area and the conveying area from each other, and has an opening; a door for opening and closing the opening in the partition wall; and a stage for placing the container at a position near the opening in the loading area; wherein parts to be pressed are provided on opposite sides on a side of the front surface of the container, and the partition wall is provided with a pressing and holding mechanism having a pressing roller that rides on the part to be pressed of the container from a lateral side to press the container against the opening in the partition wall and hold the container tightly in place; the processing method comprising the steps of: 
 placing the container on the stage;    bringing the container placed on the stage into contact with the opening;    causing the pressing roller of the pressing and holding mechanism disposed on the partition wall to ride on the parts to be pressed disposed on opposite side on a side of the front surface of the container from a lateral side, to press the container against the opening in the partition wall and hold the container tightly in place; and    opening the door and the lid, and transferring an object to be processed in the container from the loading area to the conveying area.